Author: Shih-Feng Chou
Publisher:
ISBN:
Category :
Languages : en
Pages : 174
Book Description
Diamond thin films are deposited on silicon wafers by MPECVD process with the presence of methane, argon, and hydrogen gases. The reaction chamber is designed with an internal microwave reaction cavity and a high-pressure pocket for improving deposition conditions. Scanning electron microscopy reveals tetrahedral and cauliflower-shaped crystals for polycrystalline diamond and nanocrystalline diamond films, respectively. Spectroscopy ellipsometer studies indicate that diamond-like carbon (DLC) films are deposited with a thickness of 700 nm. Fourier transform infrared spectroscopy shows C-H stretching in the range from 2800 cm -1 to 3000 cm -1 . Nanoindentation is performed on DLC films with an average hardness of 10.98 GPa and an average elastic modulus of 90.32 GPa. The effects of chamber pressure, microwave forward power, and gas mixture on the plasma chemistry are discussed. Substrate temperature has a significant influence on film growth rate, and substrate pretreatment can enhance the quality of diamond films.
Synthesis and Characterization of Diamond Thin Films by Microwave Plasma-enhanced Chemical Vapor Deposition (MPECVD)
Microwave Plasma-enhanced Chemical Vapor Deposition and Characterization of Diamond and Silicon Nitride Thin Films
Author: Kevin John Grannen
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
Microwave Plasma Enhanced Chemical Vapor Deposition and Structural Characterization of Diamond Films
Author: Wei Zhu
Publisher:
ISBN:
Category : Diamond thin films
Languages : en
Pages : 530
Book Description
Publisher:
ISBN:
Category : Diamond thin films
Languages : en
Pages : 530
Book Description
Diamond Films
Author: Koji Kobashi
Publisher: Elsevier
ISBN: 0080525571
Category : Science
Languages : en
Pages : 350
Book Description
- Discusses the most advanced techniques for diamond growth - Assists diamond researchers in deciding on the most suitable process conditions - Inspires readers to devise new CVD (chemical vapor deposition Ever since the early 1980s, and the discovery of the vapour growth methods of diamond film, heteroexpitaxial growth has become one of the most important and heavily discussed topics amongst the diamond research community. Kobashi has documented such discussions with a strong focus on how diamond films can be best utilised as an industrial material, working from the premise that crystal diamond films can be made by chemical vapour disposition. Kobashi provides information on the process and characterization technologies of oriented and heteroepitaxial growth of diamond films.
Publisher: Elsevier
ISBN: 0080525571
Category : Science
Languages : en
Pages : 350
Book Description
- Discusses the most advanced techniques for diamond growth - Assists diamond researchers in deciding on the most suitable process conditions - Inspires readers to devise new CVD (chemical vapor deposition Ever since the early 1980s, and the discovery of the vapour growth methods of diamond film, heteroexpitaxial growth has become one of the most important and heavily discussed topics amongst the diamond research community. Kobashi has documented such discussions with a strong focus on how diamond films can be best utilised as an industrial material, working from the premise that crystal diamond films can be made by chemical vapour disposition. Kobashi provides information on the process and characterization technologies of oriented and heteroepitaxial growth of diamond films.
Diamond Films Handbook
Author: Jes Asmussen
Publisher: CRC Press
ISBN: 9780203910603
Category : Science
Languages : en
Pages : 692
Book Description
The Diamond Films Handbook is an important source of information for readers involved in the new diamond film technology, emphasizing synthesis technologies and diamond film applications. Containing over 1600 references, drawings, photographs, micrographs, equations, and tables, and contributions by experts from both industry and academia, it inclu
Publisher: CRC Press
ISBN: 9780203910603
Category : Science
Languages : en
Pages : 692
Book Description
The Diamond Films Handbook is an important source of information for readers involved in the new diamond film technology, emphasizing synthesis technologies and diamond film applications. Containing over 1600 references, drawings, photographs, micrographs, equations, and tables, and contributions by experts from both industry and academia, it inclu
Synthesis of Thin and Thick Ultra-nanocrystalline Diamond Films by Microwave Plasma CVD Systems
Author: Dzung Tri Tran
Publisher:
ISBN:
Category : Chemical vapor deposition
Languages : en
Pages : 314
Book Description
Publisher:
ISBN:
Category : Chemical vapor deposition
Languages : en
Pages : 314
Book Description
Thin Film Diamond
Author: A.H. Lettington
Publisher: Springer Science & Business Media
ISBN: 9401107254
Category : Science
Languages : en
Pages : 160
Book Description
This work, written by leading international authorities, deals with nucleation growth and processing, characterization and electrical, thermal, optical and mechanical properties of thin film diamond. The final chapters are devoted to the broad range of applications of this material.
Publisher: Springer Science & Business Media
ISBN: 9401107254
Category : Science
Languages : en
Pages : 160
Book Description
This work, written by leading international authorities, deals with nucleation growth and processing, characterization and electrical, thermal, optical and mechanical properties of thin film diamond. The final chapters are devoted to the broad range of applications of this material.
Growth and Characterization of Nanocrystalline Diamond Films for Microelectronics and Microelectromechanical Systems
Author: Sathyaharish Jeedigunta
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
ABSTRACT: Diamond is widely known for its extraordinary properties, such as high thermal conductivity, energy bandgap and high material hardness and durability making it a very attractive material for microelectronic and mechanical applications. Synthetic diamonds produced by chemical vapor deposition (CVD) methods retain most of the properties of natural diamond. Within this class of material, nanocrystalline diamond (NCD) is being developed for microelectronic and microelectromechanical systems (MEMS) applications. During this research, intrinsic and doped NCD films were grown by the microwave plasma enhanced chemical vapor deposition (MPECVD) method using CH4/Ar/H2 gas mixture and CH4/Ar/N2 gas chemistries respectively. The first part of research focused on the growth and characterization of NCD films while the second part on the application of NCD as a structural material in MEMS device fabrication.
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
ABSTRACT: Diamond is widely known for its extraordinary properties, such as high thermal conductivity, energy bandgap and high material hardness and durability making it a very attractive material for microelectronic and mechanical applications. Synthetic diamonds produced by chemical vapor deposition (CVD) methods retain most of the properties of natural diamond. Within this class of material, nanocrystalline diamond (NCD) is being developed for microelectronic and microelectromechanical systems (MEMS) applications. During this research, intrinsic and doped NCD films were grown by the microwave plasma enhanced chemical vapor deposition (MPECVD) method using CH4/Ar/H2 gas mixture and CH4/Ar/N2 gas chemistries respectively. The first part of research focused on the growth and characterization of NCD films while the second part on the application of NCD as a structural material in MEMS device fabrication.
Synthesis and Characterization of Silicon Dioxide Thin Films by Plasma Enhances Chemical Vapor Deposition from Diethylsilane and Nitrous Oxide
Author: Lan Chen
Publisher:
ISBN:
Category : Silicon dioxide films
Languages : en
Pages : 120
Book Description
Publisher:
ISBN:
Category : Silicon dioxide films
Languages : en
Pages : 120
Book Description
Proceedings of the ... International Symposium on Diamond and Diamond-like Films
Author:
Publisher:
ISBN:
Category : Diamond thin films
Languages : en
Pages : 700
Book Description
Publisher:
ISBN:
Category : Diamond thin films
Languages : en
Pages : 700
Book Description