Single Molecule Source Reagents for CVD of Beta Silicon Carbide PDF Download
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Languages : en
Pages : 4
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Beta silicon carbide is an excellent candidate semiconductor material for demanding applications in high power and high temperature electronic devices due to its high breakdown voltage, relatively large band gap, high thermal conductivity and high melting point. Use of silicon carbide thin films is hampered, however, by the inability to reproducibly grow stoichiometric films free from excess silicon or carbon. The principal difficulty is that absolutely reproducible flows of the source gases cannot be provided with existing gas flow control equipment. The very finest gas flow control equipment has been used in the CVD systems, but small disparities remain between successive deposited films. The production of practical beta silicon carbide devices has been hindered by the lack of a reproducible process for deposition of stoichiometric beta silicon carbide films.
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Category :
Languages : en
Pages : 4
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Beta silicon carbide is an excellent candidate semiconductor material for demanding applications in high power and high temperature electronic devices due to its high breakdown voltage, relatively large band gap, high thermal conductivity and high melting point. Use of silicon carbide thin films is hampered, however, by the inability to reproducibly grow stoichiometric films free from excess silicon or carbon. The principal difficulty is that absolutely reproducible flows of the source gases cannot be provided with existing gas flow control equipment. The very finest gas flow control equipment has been used in the CVD systems, but small disparities remain between successive deposited films. The production of practical beta silicon carbide devices has been hindered by the lack of a reproducible process for deposition of stoichiometric beta silicon carbide films.
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Languages : en
Pages : 23
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Phase I conclusively showed the feasibility of rational design of single molecule-source reagents that could lead to improvements in the chemical vapor deposition of stoichiometric Beta silicon carbide. Four single molecule sources were synthesized, their decomposition pathways studied, and their utility in Beta-silicon carbide CVD investigated. Dramatic differences in the CVD process resulted from small changes in the reagent structure. A strained cyclic molecule, 1,3-disilacyclobutane, allowed growth of a Beta-silicon carbide film at a temperature>300 deg C lower than was possible with a similar straight chain reagent. Furthermore, the highest quality film was grown from the analogous chlorinated cyclic source reagent: 1,1,3,3 tetrachloro-1,3- disilacyclobutane. We propose that decomposition of the cyclic precursors directly produces intermediates that can lead to deposition of stoichiometric silicon carbide. The Phase I results clearly showed that Beta-silicon carbide CVD can be improved by molecular engineering of the source reagents. Cyclic precursors are promising for both the deposition of single crystal films at high temperature and for polycrystalline and single crystal films at low temperature. In Phase II we will optimize the precursor for low temperature deposition and the integration of silicon and silicon carbide HBT device structures.
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Category : Aeronautics
Languages : en
Pages : 308
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Category : Internet
Languages : en
Pages : 320
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Category : Research
Languages : en
Pages : 1720
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Sections 1-2. Keyword Index.--Section 3. Personal author index.--Section 4. Corporate author index.-- Section 5. Contract/grant number index, NTIS order/report number index 1-E.--Section 6. NTIS order/report number index F-Z.
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Category : Science
Languages : en
Pages : 1088
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Author: Gladys Felton
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Category :
Languages : en
Pages : 216
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Author: Robert F. Davis
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Category :
Languages : en
Pages : 33
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The project involves the development of low pressure chemical vapor deposition and r-f sputtering techniques for the synthesis of single crystal thin films of beta-SiC. The CVD apparatus is being produced in-house and a detailed description of the design is provided herein. Theoretical CVD phase diagrams of the Si-C-H system are also being produced as a function of Si/Si+C and total pressure. Both reactive sputtering of Si in CH4 and normal sputtering of a SiC target are being readied. (Author).
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Category : Research
Languages : en
Pages : 436
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![The Growth and Characterization of Beta Silicon Carbide ([beta]-Sic) Thin Films by Chemical Vapor Deposition in a Low Pressure Vertical Reactor PDF](https://books.google.com/books/content/images/frontcover/GZ9RNwAACAAJ?fife=w80-h100)
Author: Kenneth George Irvine
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Category :
Languages : en
Pages : 170
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