Silicon Nitride for Microelectronic Applications PDF Download
Are you looking for read ebook online? Search for your book and save it on your Kindle device, PC, phones or tablets. Download Silicon Nitride for Microelectronic Applications PDF full book. Access full book title Silicon Nitride for Microelectronic Applications by John T. Milek. Download full books in PDF and EPUB format.
Author: John T. Milek
Publisher: Springer Science & Business Media
ISBN: 1468461621
Category : Technology & Engineering
Languages : en
Pages : 126
Get Book Here
Book Description
The large amount of literature on the technology of thin film silicon nitride indi cates the interest of the Department of Defense, NASA and the semiconductor industry in the development and full utilization of the material. This survey is concerned only with the thin film characteristics and properties of silicon nitride as currently utilized by the semiconductor or microelectronics industry. It also includes the various methods of preparation. Applications in microelectronic devices and circuits are to be provided in Part 2 of the survey. Some bulk silicon nitride property data is included for basic reference and comparison purposes. The survey specifically excludes references and information not within the public domain. ACKNOWLEDGEMENT This survey was generated under U.S. Air Force Contract F33615-70-C-1348, with Mr. B.R. Emrich (MAAM) Air Force Materials Laboratory, Wright-Patterson Air Force Base, Ohio acting as Project Engineer. The author would like to acknowledge the assis tance of Dr. Judd Q. Bartling, Litton Systems, Inc., Guidance and Control Systems Division, Woodland Hills, California and Dr. Thomas C. Hall, Hughes Aircraft Company, Culver City, California in reviewing the survey. v CONTENTS Preface. i Introduction 1 Literature Review. 1 Bulk Characteristics 1 Technology Overview. 2 References 4 Methods of Preparation • 5 Introduction • 5 Direct Nitridation Method 8 Evaporation Method • 9 Glow Discharge Method. 10 Ion Beam Method. 13 Sputtering Methods 13 Pyrolytic Methods. 15 Silane and Ammonia Reaction 15 Silicon Tetrachloride and Tetrafluoride Reaction. 24 Silane and Hydrazine Reaction 27 Production Operations. 28 Equipment.
Author: John T. Milek
Publisher: Springer Science & Business Media
ISBN: 1468461621
Category : Technology & Engineering
Languages : en
Pages : 126
Get Book Here
Book Description
The large amount of literature on the technology of thin film silicon nitride indi cates the interest of the Department of Defense, NASA and the semiconductor industry in the development and full utilization of the material. This survey is concerned only with the thin film characteristics and properties of silicon nitride as currently utilized by the semiconductor or microelectronics industry. It also includes the various methods of preparation. Applications in microelectronic devices and circuits are to be provided in Part 2 of the survey. Some bulk silicon nitride property data is included for basic reference and comparison purposes. The survey specifically excludes references and information not within the public domain. ACKNOWLEDGEMENT This survey was generated under U.S. Air Force Contract F33615-70-C-1348, with Mr. B.R. Emrich (MAAM) Air Force Materials Laboratory, Wright-Patterson Air Force Base, Ohio acting as Project Engineer. The author would like to acknowledge the assis tance of Dr. Judd Q. Bartling, Litton Systems, Inc., Guidance and Control Systems Division, Woodland Hills, California and Dr. Thomas C. Hall, Hughes Aircraft Company, Culver City, California in reviewing the survey. v CONTENTS Preface. i Introduction 1 Literature Review. 1 Bulk Characteristics 1 Technology Overview. 2 References 4 Methods of Preparation • 5 Introduction • 5 Direct Nitridation Method 8 Evaporation Method • 9 Glow Discharge Method. 10 Ion Beam Method. 13 Sputtering Methods 13 Pyrolytic Methods. 15 Silane and Ammonia Reaction 15 Silicon Tetrachloride and Tetrafluoride Reaction. 24 Silane and Hydrazine Reaction 27 Production Operations. 28 Equipment.
Author: J. T. Milek
Publisher: Springer Science & Business Media
ISBN: 1461596092
Category : Technology & Engineering
Languages : en
Pages : 124
Get Book Here
Book Description
This survey is concerned with the use of silicon nitride in the semi conductor and microelectronics industries. The Handbook of Electronic Materials, volume 3, comprises part 1 of this survey and includes preparation and properties information. This report was prepared by Hughes Aircraft Company, Culver City, California under Contract Number F336lS-70-C-1348. The work was admini stered under the direction of the Air Force Materials Laboratory, Air Force Systems Command, Wright-Patterson Air Force Base, Ohio, with Hr. B. Emrich, Project Engineer. The Electronic Properties Information Center (EPIC) is a designated Information Analysis Center of the Department of Defense, authorized to pro vide information to the entire DoD community. The purpose of the Center is to provide a highly competent source of information and data on the electronic, optical and magnetic properties of materials of value to the Department of Defense. Its major function is to evaluate, compile and publish the experi mental data from the world's unclassified literature concerned with the properties of materials. All materials relevant to the field of electronics are within the scope of EPIC: insulators, semiconductors, metals, super conductors, ferrites, ferroelectrics, ferromagnetics, electroluminescents, thermionic emitters and optical materials. The Center's scope includes information on over 100 basic properties of materials; information generally regarded as being in the area of devices and/or circuitry is excluded. v CONTENTS Foreword. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 Diffusion Mask Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . '" 11 Glass-to-Metal Seals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 Passivation Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 Isolation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 Memory Devices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 Capacitors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76 Radiation Hardening Applications . . . . . . . . . . . . . . . •. . . . . . . . .
Author: M. A. Leeds
Publisher: Springer Science & Business Media
ISBN: 1461596122
Category : Technology & Engineering
Languages : en
Pages : 105
Get Book Here
Book Description
Composites are the fastest growing class of structural material. Consequently, electronic properties are often difficult to find. This report was prepared in order to present a compilation of reliable data on the electronic and electrical properties of composites. Composites provide an opportunity to tailor the properties to the application; a factor that allows designers an unlimited variety of new materials for new uses. It is this feature that has contributed to the rapid growth of composites. The electrical properties of a composite can be of vital importance in the use or application of the material in a system. The designer therefore, must be able to obtain the necessary electrical or electronic property data to guide him in the materials selection. It is the purpose of this report to assist the designer and engineer in fulfilling that requirement. Properties This report provides a compilation of the most commonly required electronic properties data of structural composites. Thermal properties often influence electrical design; consequently several of these properties are included. The specific properties tabulated are: Arc Resistance Thermal Conductivity Arc Tracking Resistance Linear Thermal Expansion Dielectric Constant Coefficient Dissipation Factor Electrical (Volume) Resistivity Electrical (Volume) Conductivity Other electrical and thermal properties are compiled as the data was made available.
Author: M. Neuberger
Publisher: Springer Science & Business Media
ISBN: 1461596068
Category : Technology & Engineering
Languages : en
Pages : 120
Get Book Here
Book Description
The Electronic Properties Information Center has developed the Data Table as a precis of the most reliable information available for the physical, crystallographic, mechanical, thermal, electronic, magnetic and optical properties of a given material. Data Tables serve as an introduction to the graphic data compilations on the material published by the Electronic Properties Information Center, EPIC, as Data Sheets. Although the Data Sheets are principally concerned, according to the scope of the Center, with electronic and optical data, it is believed that data covering the complete property spectrum is of the first importance to every scientist and engineer, whatever his information requirements. The enthusiastic reception of these Data Tables has confirmed this opinion and increasing requests for this highly selective type of information has resulted in these III·-V Semiconductor Compounds Data Tables. The major problem in this type of selective data compilation on a semiconducting material, lies in the material purity. Properties may vary so widely with doping, crystallinity, defects, geometric forms and the other parameters of preparation, that any attempts at comparison normally fail. On this basis, we have consis tently attempted to give values derived from experiments on the highest purity single crystals or epitaxial films. At the very least, these data should be reproducible and this gives the data their principal validity. If such values however, are not available, then the next best data are reported, together with material speci fications. These latter include the carrier concentration and the dopant.
Author: M. Neuberger
Publisher: Springer Science & Business Media
ISBN: 1468479172
Category : Technology & Engineering
Languages : en
Pages : 73
Get Book Here
Book Description
This report was prepared by Hughes Aircraft Company, Culver City, California under Contract Number F33615-70-C-1348. The work was administered under the direc tion of the Air Force Materials Laboratory, Air Force Systems Command, Wright Patterson Air Force Base, Ohio, with Mr. B. Emrich, Project Engineer. The Electronic Properties Information Center (EPIC) is adesignated Information Analysis Center of the Department of Defense, authorized to provide information to the entire DoD community. The purpose of the Center is to provide a highly competent source of information and data on the electronic, optical and magnetic properties of materials of value to the Department of Defense. Its major function is to evaluate, compile and publish the experimental data from the world's unclassified literature concerned with the properties of materials. All materials relevant to the field of electronics are within the scope of EPIC: insulators, semiconductors, metals, super conductors, ferrites, ferroelectrics, ferromagnetics, electroluminescents, thermionic emitters and optical materials. The Center's scope includes information on over 100 basic properties of materials; information gene rally regarded as being in the area of devices and/or circuitry is excluded. Grateful acknowledgement is made for the review and comments by Dr. Victor Rehn of the U. S. Naval Ordnance Test Station at China Lake, California, as weIl as for review by staff members of the National Bureau of Standards, National Standard Data Reference System. v CONTENTS Introduction . •. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Composite Data Table. . . . . . . . . . . . . . . . . . . . . . . . . 5 Diamond. . . . . . . . •. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 Bibliography . . . . . . •. . . . . . . . . . . . . . . . . . . . . . . 11 Germanium . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 Bibliography . . . . . . . . •. . . . . . . . . . . . . . . . . . . . . 28 Silicon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36 Bibliography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Author: J. T. Milek
Publisher: Springer Science & Business Media
ISBN: 1468461680
Category : Technology & Engineering
Languages : en
Pages : 265
Get Book Here
Book Description
This survey of 13 electrooptic materials includes both a review and compilation of all materials properties relevant to their use in linear (Pockels) electrooptic modulator applications. Information on actual electrooptic modulator design as well as applications for these materials, and data on materials exhibiting a quadratic (Kerr) electrooptic effect, are not included. With these restrictions in mind, every attempt was made to be as comprehensive as possible by utilizing all available sources of literature: books, periodicals, reports, and vendor literature. The files of the Electronic Properties Information Center and full resources of the Hughes Aircraft Company Library were searched for pertinent data, and approximately 1000 articles were reviewed for this pUblication. A brief Introduction to the survey is followed by a description of the Prin ciples of Electrooptic Modulation, emphasizing the importance of crystal symmetry on the electrooptic properties of materials, and including the relationships between the electrooptic, piezooptic, elastooptic and piezoelectric effects in crystals. The survey consists of 13 independent sections, each section covering the properties of one material: crystallographic, optical, electrooptic, photoelastic, piezoelectric, dielectric and thermal. References appearing in the text are listed at the conclusion of each section. Tables and Figures are numbered separately for each section. v TABLE OF CONTENTS INTRODUCTION . • . . . . . 1 PRINCIPLES OF ELECTROOPTIC MODULATION. 5 AMMONIUM DIHYDROGEN ARSENATE (ADA) . 15 AMMONIUM DIHYDROGEN PHOSPHATE (ADP).
Author: M. Neuberger
Publisher: Springer Science & Business Media
ISBN: 1475760019
Category : Technology & Engineering
Languages : en
Pages : 78
Get Book Here
Book Description
This report was prepared by Hughes Aircraft Company, Culver City, California under Contract No. F33615-70-C-1348. The work was administered under the direction of the Air Force Materials Laboratory, Air Force Systems Cornrnand, Wright-Patterson Air Force Base, Ohio, with Mr. B. Emrich, Project Engineer. The Electronic Properties Information Center (EPIC) is a designated inforrnation Analysis Center of the Departrnent of Defense, authorized to provide inforrnation to the entire DoD cornrnunity. The purpose of the Center is to provide a highly competent source of inforrnation and data on the electronic, optical and magnetic properties of materials of value to the Department of Defense. Its major function is to evaluate, compile and publish the experimental data from the world's unclassified literature concerned with the properties of materials. All materials relevant to the field of electronics are within the scope of EPIC: insulators, semiconductors, metals, superconductors, ferrites, ferroelectrics, ferromagnetics, electro luminescents, therrnionic emitters and optical materials. The Center's scope includes inforrnation on over 100 basic properties of materials; information generally regarded as being in the area of devices and/or circuitry is excluded. Grateful acknowledgement is made for the review and comments of Dr. G. D. Cody of RCA Laboratories and Dr. B. W. Roberts of General Electric Co. V CONTENTS Introduction •. . ••••. . . ••••. . . . . . •• 1 Superconductivity Applications •••• 3 Niobium-Hydrogen •. . ••. •. ••. ••. . •• 15 Niobium-Antimony. • . . . • . • • • • . • • . • • .
Author: M. Neuberger
Publisher: Springer Science & Business Media
ISBN: 1468461656
Category : Technology & Engineering
Languages : en
Pages : 61
Get Book Here
Book Description
Gallium-Aluminum-Antimony System.- Gallium-Aluminum-Arsenic System.- Gallium-Aluminum-Phosphorous System.- Gallium-Arsenic-Antimony System.- Gallium-Arsenic-Phosphorous System.- Gallium-Indium-Antimony System.- Gallium-Indium-Arsenic System.- Gallium-Indium-Phosphorous System.- Indium-Arsenic-Antimony System.- Indium-Arsenic-Phosphorous System.
Author: William R. Wilcox
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 242
Get Book Here
Book Description
Author: Heinrich Behrens
Publisher:
ISBN:
Category : Chemistry, Physical and theoretical
Languages : en
Pages : 116
Get Book Here
Book Description
