Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III PDF Download
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Author: Society of Photo-optical Instrumentation Engineers
Publisher: Society of Photo Optical
ISBN: 9780819426451
Category : Technology & Engineering
Languages : en
Pages : 270
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Book Description
Author: Society of Photo-optical Instrumentation Engineers
Publisher: Society of Photo Optical
ISBN: 9780819426451
Category : Technology & Engineering
Languages : en
Pages : 270
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Book Description
Author: Anthony J. Toprac
Publisher: Society of Photo Optical
ISBN: 9780819429667
Category : Technology & Engineering
Languages : en
Pages : 322
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Book Description
A discussion of process, equipment, and materials control in integrated circuit manufacturing. It examines real-time and run-to-run modelling and control in integrated circuit manufacturing, the process of optimization in integrated circuit manufacturing, and more.
Author:
Publisher:
ISBN:
Category : Dielectric films
Languages : en
Pages : 332
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Book Description
Author: Anthony John Toprac
Publisher: Society of Photo Optical
ISBN: 9780819434791
Category : Technology & Engineering
Languages : en
Pages : 310
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Book Description
These papers on the manufacture of integrated circuitry focus on the areas of process, equipment and materials control.
Author: Armando Iturralde
Publisher: Society of Photo Optical
ISBN: 9780819422743
Category : Technology & Engineering
Languages : en
Pages : 258
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Book Description
Author: Anant G. Sabnis
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 238
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Book Description
Author: Anthony J. Toprac
Publisher:
ISBN:
Category : Dielectric films
Languages : en
Pages : 322
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Book Description
Author: Gary S. May
Publisher: John Wiley & Sons
ISBN: 0471790273
Category : Technology & Engineering
Languages : en
Pages : 428
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Book Description
A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
Author: Joseph B. Anthony
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 512
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Book Description
Author: M. Meyyappan
Publisher: The Electrochemical Society
ISBN: 9781566771368
Category : Technology & Engineering
Languages : en
Pages : 366
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Book Description
