Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control PDF Download
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Author: G. S. Mathad
Publisher: The Electrochemical Society
ISBN: 9781566770668
Category : Technology & Engineering
Languages : en
Pages : 452
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Book Description
Author: G. S. Mathad
Publisher: The Electrochemical Society
ISBN: 9781566770668
Category : Technology & Engineering
Languages : en
Pages : 452
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Book Description
Author: G. S. Mathad
Publisher: The Electrochemical Society
ISBN: 9781566771832
Category : Technology & Engineering
Languages : en
Pages : 388
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Book Description
Author: Electrochemical Society. Dielectric Science and Technology Division
Publisher: The Electrochemical Society
ISBN: 9781566771641
Category : Plasma etching
Languages : en
Pages : 740
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Book Description
Author: Electrochemical Society. Dielectric Science and Technology Division
Publisher: The Electrochemical Society
ISBN: 9781566770774
Category : Science
Languages : en
Pages : 622
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Book Description
Author: Karen Reinhardt
Publisher: William Andrew
ISBN: 032351085X
Category : Technology & Engineering
Languages : en
Pages : 760
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Book Description
Handbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet and plasma processing are reviewed, including surface and colloidal aspects. This revised edition includes the developments of the last ten years to accommodate a continually involving industry, addressing new technologies and materials, such as germanium and III-V compound semiconductors, and reviewing the various techniques and methods for cleaning and surface conditioning. Chapters include numerous examples of cleaning technique and their results. The book helps the reader understand the process they are using for their cleaning application and why the selected process works. For example, discussion of the mechanism and physics of contamination, metal, particle and organic includes information on particle removal, metal passivation, hydrogen-terminated silicon and other processes that engineers experience in their working environment. In addition, the handbook assists the reader in understanding analytical methods for evaluating contamination. The book is arranged in an order that segments the various cleaning techniques, aqueous and dry processing. Sections include theory, chemistry and physics first, then go into detail for the various methods of cleaning, specifically particle removal and metal removal, amongst others. Focuses on cleaning techniques including wet, plasma and other surface conditioning techniques used to manufacture integrated circuits Reliable reference for anyone that manufactures integrated circuits or supplies the semiconductor and microelectronics industries Covers processes and equipment, as well as new materials and changes required for the surface conditioning process
Author:
Publisher:
ISBN:
Category : American literature
Languages : en
Pages : 2266
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Book Description
Author:
Publisher:
ISBN:
Category : American literature
Languages : en
Pages : 2264
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Book Description
A world list of books in the English language.
Author: Institute of Physics Conference
Publisher: CRC Press
ISBN: 1000112292
Category : Science
Languages : en
Pages : 1345
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Book Description
Compound Semiconductors 1995 focuses on emerging applications for GaAs and other compound semiconductors, such as InP, GaN, GaSb, ZnSe, and SiC, in the electronics and optoelectronics industries. The book presents the research and development work in all aspects of compound semiconductors. It reflects the maturity of GaAs as a semiconductor material and the rapidly increasing pool of research information on many other compound semiconductors. Covering the full breadth of the subject, from growth through processing to devices and integrated circuits, this volume provides researchers in materials science, device physics, condensed matter physics, and electrical and electronic engineering with a comprehensive overview of developments in this well-established research area.
Author: Woo
Publisher: CRC Press
ISBN: 9780750303422
Category : Technology & Engineering
Languages : en
Pages : 1352
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Book Description
Compound Semiconductors 1995 focuses on emerging applications for GaAs and other compound semiconductors, such as InP, GaN, GaSb, ZnSe, and SiC, in the electronics and optoelectronics industries. The book presents the research and development work in all aspects of compound semiconductors. It reflects the maturity of GaAs as a semiconductor material and the rapidly increasing pool of research information on many other compound semiconductors. Covering the full breadth of the subject, from growth through processing to devices and integrated circuits, this volume provides researchers in materials science, device physics, condensed matter physics, and electrical and electronic engineering with a comprehensive overview of developments in this well-established research area.
Author: F. Ren
Publisher: The Electrochemical Society
ISBN: 9781566771160
Category : Technology & Engineering
Languages : en
Pages : 524
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Book Description
