Optical Inspection of Microsystems

Optical Inspection of Microsystems PDF Author: Wolfgang Osten
Publisher: CRC Press
ISBN: 1420019163
Category : Science
Languages : en
Pages : 524

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Book Description
Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

Optical Inspection of Microsystems

Optical Inspection of Microsystems PDF Author: Wolfgang Osten
Publisher: CRC Press
ISBN: 1420019163
Category : Science
Languages : en
Pages : 524

Get Book Here

Book Description
Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

Optical Inspection of Microsystems, Second Edition

Optical Inspection of Microsystems, Second Edition PDF Author: Wolfgang Osten
Publisher: CRC Press
ISBN: 0429532652
Category : Technology & Engineering
Languages : en
Pages : 692

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Book Description
Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS

Microsystems Metrology and Inspection

Microsystems Metrology and Inspection PDF Author: Christophe Gorecki
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Science
Languages : en
Pages : 200

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Book Description


Springer Handbook of Experimental Solid Mechanics

Springer Handbook of Experimental Solid Mechanics PDF Author: William N. Sharpe, Jr.
Publisher: Springer Science & Business Media
ISBN: 0387268839
Category : Mathematics
Languages : en
Pages : 1100

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Book Description
The Springer Handbook of Experimental Solid Mechanics documents both the traditional techniques as well as the new methods for experimental studies of materials, components, and structures. The emergence of new materials and new disciplines, together with the escalating use of on- and off-line computers for rapid data processing and the combined use of experimental and numerical techniques have greatly expanded the capabilities of experimental mechanics. New exciting topics are included on biological materials, MEMS and NEMS, nanoindentation, digital photomechanics, photoacoustic characterization, and atomic force microscopy in experimental solid mechanics. Presenting complete instructions to various areas of experimental solid mechanics, guidance to detailed expositions in important references, and a description of state-of-the-art applications in important technical areas, this thoroughly revised and updated edition is an excellent reference to a widespread academic, industrial, and professional engineering audience.

Microsystem Engineering of Lab-on-a-chip Devices

Microsystem Engineering of Lab-on-a-chip Devices PDF Author: Oliver Geschke
Publisher: John Wiley & Sons
ISBN: 352760636X
Category : Science
Languages : en
Pages : 270

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Book Description
Written by an interdisciplinary team of chemists, biologists and engineers from one of the leading European centers for microsystem research, MIC in Lyngby, Denmark, this book introduces and discusses the different aspects of (bio)chemical microsystem development. Unlike other, far more voluminous and theoretical books on this topic, this is a concise, practical handbook, dealing with analytical applications, particularly in the life sciences. Topics include: * microfluidics * silicon micromachining * glass and polymer micromachining * packaging * analytical chemistry illustrated with examples taken mainly from ongoing research projects at MIC.

Diffractive Optics and Optical Microsystems

Diffractive Optics and Optical Microsystems PDF Author: S. Martellucci
Publisher: Springer Science & Business Media
ISBN: 1489914749
Category : Science
Languages : en
Pages : 406

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Book Description
Proceedings of the 20th Course of the International School of Quantum Electronics held in Erice, Italy, November 14-24, 1996

Introduction to Nonimaging Optics

Introduction to Nonimaging Optics PDF Author: Julio Chaves
Publisher: CRC Press
ISBN: 1420054325
Category : Science
Languages : en
Pages : 560

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Book Description
The world's insatiable consumption of energy must be met with new technologies that offer alternative, environmentally conscious sources of light and power. The relatively young field of nonimaging optics is an ideal tool for designing optimized solar energy collectors and illumination optics and holds great promise in the development of solid stat

Handbook of Optical Metrology

Handbook of Optical Metrology PDF Author: Toru Yoshizawa
Publisher: CRC Press
ISBN: 1351831844
Category : Technology & Engineering
Languages : en
Pages : 866

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Book Description
Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text: Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements Addresses interferometry, holography, and speckle methods and applications Explains Moiré metrology and the optical heterodyne measurement method Delves into the specifics of diffraction, scattering, polarization, and near-field optics Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.

Optoelectronics

Optoelectronics PDF Author: Dave Birtalan
Publisher: CRC Press
ISBN: 1420067818
Category : Science
Languages : en
Pages : 359

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Book Description
Organized as a mini-encyclopedia of infrared optoelectronic applications, this long awaited new edition of an industry standard updates and expands on the groundbreaking work of its predecessor. Pioneering experts, responsible for many advancements in the field, provide engineers with a fundamental understanding of semiconductor physics and the technical information needed to design infrared optoelectronic devices. Fully revised to reflect current developments in the field, Optoelectronics: Infrared-Visible-Ultraviolet Devices and Applications, Second Edition reviews relevant semiconductor fundamentals, including device physics, from an optoelectronic industry perspective. This easy-reading text provides a practical engineering introduction to optoelectronic LEDs and silicon sensor technology for the infrared, visible, and ultraviolet portion of the electromagnetic spectrum. Utilizing a practical and efficient engineering approach throughout, the text supplies design engineers and technical management with quick and uncluttered access to the technical information needed to design new systems.

Optical Imaging and Metrology

Optical Imaging and Metrology PDF Author: Wolfgang Osten
Publisher: John Wiley & Sons
ISBN: 3527648461
Category : Science
Languages : en
Pages : 471

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Book Description
A comprehensive review of the state of the art and advances in the field, while also outlining the future potential and development trends of optical imaging and optical metrology, an area of fast growth with numerous applications in nanotechnology and nanophysics. Written by the world's leading experts in the field, it fills the gap in the current literature by bridging the fields of optical imaging and metrology, and is the only up-to-date resource in terms of fundamental knowledge, basic concepts, methodologies, applications, and development trends.