Micromachined Ultrasound-Based Proximity Sensors

Micromachined Ultrasound-Based Proximity Sensors PDF Author: Mark R. Hornung
Publisher: Springer Science & Business Media
ISBN: 1461549973
Category : Technology & Engineering
Languages : en
Pages : 132

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Book Description
Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization, optimization and the long-term stability of silicon membrane resonators as well as appropriate packaging for ultrasound microsystems. Micromachined Ultrasound-Based Proximity Sensors describes a cost-effective approach to the realization of a micro electro mechanical system (MEMS). The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques. Additionally, this approach allows the cointegration of the driving and read-out circuitry. To ensure the industrial applicability of the fabricated transducer elements intensive long-term stability and reliability tests were performed under various environmental conditions such as high temperature and humidity. Great effort was undertaken to investigate the packaging and housing of the ultrasound system, which mainly determine the success or failure of an industrial microsystem. A low-stress mounting of the transducer element minimizes thermomechanical stress influences. The developed housing not only protects the silicon chip but also improves the acoustic performance of the transducer elements. The developed ultrasound proximity sensor system can determine object distances up to 10 cm with an accuracy of better than 0.8 mm. Micromachined Ultrasound-Based Proximity Sensors will be of interest to MEMS researchers as well as those involved in solid-state sensor development.

Micromachined Ultrasound-Based Proximity Sensors

Micromachined Ultrasound-Based Proximity Sensors PDF Author: Mark R. Hornung
Publisher: Springer Science & Business Media
ISBN: 1461549973
Category : Technology & Engineering
Languages : en
Pages : 132

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Book Description
Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization, optimization and the long-term stability of silicon membrane resonators as well as appropriate packaging for ultrasound microsystems. Micromachined Ultrasound-Based Proximity Sensors describes a cost-effective approach to the realization of a micro electro mechanical system (MEMS). The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques. Additionally, this approach allows the cointegration of the driving and read-out circuitry. To ensure the industrial applicability of the fabricated transducer elements intensive long-term stability and reliability tests were performed under various environmental conditions such as high temperature and humidity. Great effort was undertaken to investigate the packaging and housing of the ultrasound system, which mainly determine the success or failure of an industrial microsystem. A low-stress mounting of the transducer element minimizes thermomechanical stress influences. The developed housing not only protects the silicon chip but also improves the acoustic performance of the transducer elements. The developed ultrasound proximity sensor system can determine object distances up to 10 cm with an accuracy of better than 0.8 mm. Micromachined Ultrasound-Based Proximity Sensors will be of interest to MEMS researchers as well as those involved in solid-state sensor development.

Micromachined Resonators for Ultrasound Based Proximity Sensing

Micromachined Resonators for Ultrasound Based Proximity Sensing PDF Author: Oliver Brand
Publisher:
ISBN:
Category :
Languages : en
Pages : 164

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Book Description


Micromachined Mirrors

Micromachined Mirrors PDF Author: Robert Conant
Publisher: Springer Science & Business Media
ISBN: 1475737645
Category : Technology & Engineering
Languages : en
Pages : 150

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Book Description
Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.

Measurement, Instrumentation, and Sensors Handbook

Measurement, Instrumentation, and Sensors Handbook PDF Author: John G. Webster
Publisher: CRC Press
ISBN: 1351832999
Category : Medical
Languages : en
Pages : 2273

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Book Description
This new edition of the bestselling Measurement, Instrumentation, and Sensors Handbook brings together all aspects of the design and implementation of measurement, instrumentation, and sensors. Reflecting the current state of the art, it describes the use of instruments and techniques for performing practical measurements in engineering, physics, chemistry, and the life sciences; explains sensors and the associated hardware and software; and discusses processing systems, automatic data acquisition, reduction and analysis, operation characteristics, accuracy, errors, calibrations, and the incorporation of standards for control purposes. Organized according to measurement problem, the Second Edition: Consists of 2 volumes Features contributions from 240+ field experts Contains 53 new chapters, plus updates to all 194 existing chapters Addresses different ways of making measurements for given variables Emphasizes modern intelligent instruments and techniques, human factors, modern display methods, instrument networks, and virtual instruments Explains modern wireless techniques, sensors, measurements, and applications A concise and useful reference for engineers, scientists, academic faculty, students, designers, managers, and industry professionals involved in instrumentation and measurement research and development, Measurement, Instrumentation, and Sensors Handbook, Second Edition provides readers with a greater understanding of advanced applications.

Measurement and Safety

Measurement and Safety PDF Author: Béla G. Lipták
Publisher: CRC Press
ISBN: 1315353253
Category : Science
Languages : en
Pages : 3643

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Book Description
The Instrument and Automation Engineers’ Handbook (IAEH) is the #1 process automation handbook in the world. Volume one of the Fifth Edition, Measurement and Safety, covers safety sensors and the detectors of physical properties. Measurement and Safety is an invaluable resource that: Describes the detectors used in the measurement of process variables Offers application- and method-specific guidance for choosing the best measurement device Provides tables of detector capabilities and other practical information at a glance Contains detailed descriptions of domestic and overseas products, their features, capabilities, and suppliers, including suppliers’ web addresses Complete with 163 alphabetized chapters and a thorough index for quick access to specific information, Measurement and Safety is a must-have reference for instrument and automation engineers working in the chemical, oil/gas, pharmaceutical, pollution, energy, plastics, paper, wastewater, food, etc. industries. About the eBook The most important new feature of the IAEH, Fifth Edition is its availability as an eBook. The eBook provides the same content as the print edition, with the addition of thousands of web addresses so that readers can reach suppliers or reference books and articles on the hundreds of topics covered in the handbook. This feature includes a complete bidders' list that allows readers to issue their specifications for competitive bids from any or all potential product suppliers.

Heat Convection in Micro Ducts

Heat Convection in Micro Ducts PDF Author: Yitshak Zohar
Publisher: Springer Science & Business Media
ISBN: 147573607X
Category : Science
Languages : en
Pages : 210

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Book Description
As the field of Microsystems expands into more disciplines and new applications such as RF-MEMS, Optical MEMS and Bio-MEMS, thermal management is becoming a critical issue in the operation of many microdevices, including microelectronic chips. Heat Convection in Micro Ducts focuses on the fundamental physics of convective heat transfer in microscale and specific applications such as: microchannel heat sinks, micro heat pipes, microcoolers and micro capillary pumped loops. This book will be of interest to the professional engineer and graduate student interested in learning about heat removal and temperature control in advanced integrated circuits and microelectromechanical systems.

Microtransducer CAD

Microtransducer CAD PDF Author: Arokia Nathan
Publisher: Springer Science & Business Media
ISBN: 3709164281
Category : Technology & Engineering
Languages : en
Pages : 445

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Book Description
Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing "parasitic” effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry.

Principles and Applications of NanoMEMS Physics

Principles and Applications of NanoMEMS Physics PDF Author: Hector Santos
Publisher: Springer Science & Business Media
ISBN: 0387258345
Category : Technology & Engineering
Languages : en
Pages : 264

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Book Description
Presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications Provides newcomers with a much needed coherent scientific base for undertaking study and research in this field Takes great pains in rendering transparent advanced physical concepts and techniques, such as quantum information, second quantization, Luttinger liquids, bosonization, and superconductivity

Optimal Synthesis Methods for MEMS

Optimal Synthesis Methods for MEMS PDF Author: S.G.K. Ananthasuresh
Publisher: Springer Science & Business Media
ISBN: 1461504872
Category : Technology & Engineering
Languages : en
Pages : 326

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Book Description
The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.

Micromachined Devices and Components

Micromachined Devices and Components PDF Author:
Publisher:
ISBN:
Category : Micromechanics
Languages : en
Pages : 460

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Book Description