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Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1439895309
Category : Technology & Engineering
Languages : en
Pages : 670
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Book Description
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the d
Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1439895309
Category : Technology & Engineering
Languages : en
Pages : 670
Get Book Here
Book Description
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the d
Author: P. Rai-Choudhury
Publisher: IET
ISBN: 9780852969069
Category : Technology & Engineering
Languages : en
Pages : 784
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Book Description
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1482274663
Category : Technology & Engineering
Languages : en
Pages : 1983
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Book Description
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Author: Ivor Brodie
Publisher: Springer Science & Business Media
ISBN: 1489921605
Category : Technology & Engineering
Languages : en
Pages : 518
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Book Description
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.
Author: Marc J. Madou
Publisher: CRC Press
ISBN: 9780849308260
Category : Technology & Engineering
Languages : en
Pages : 826
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Book Description
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter
Author: Ivor Brodie
Publisher: Springer Science & Business Media
ISBN: 1475767757
Category : Science
Languages : en
Pages : 661
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Book Description
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Author:
Publisher:
ISBN:
Category : Electrical engineering
Languages : en
Pages : 216
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Book Description
Author: Georg Gaertner
Publisher: Springer Nature
ISBN: 3030472914
Category : Technology & Engineering
Languages : en
Pages : 609
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Book Description
This book gives an overview of modern cathodes and electron emitters for vacuum tubes and vacuum electron devices in general. It covers the latest developments in field emission theory as well as new methods towards improving thermionic and cold cathodes. It addresses thermionic cathodes, such as oxide cathodes, impregnated and scandate cathodes, as well as photocathodes and field emitters – the latter comprising carbon nanotubes, graphene and Spindt-type emitter arrays. Despite the rise and fall of the once dominant types of vacuum tubes, such as radio valves and cathode ray tubes, cathodes are continually being improved upon as new applications with increased demands arise, for example in electron beam lithography, high-power and high-frequency microwave tubes, terahertz imaging and electron sources for accelerators. Written by 17 experts in the field, the book presents the latest developments in cathodes needed for these applications, discussing the state of the art and addressing future trends.
Author: R. E. Howard
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 400
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author:
Publisher:
ISBN:
Category : Dissertations, Academic
Languages : en
Pages : 830
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Book Description
