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Mems Reliability Assurance Guidelines for Space Applications

Mems Reliability Assurance Guidelines for Space Applications PDF Author: National Aeronautics and Space Administration (NASA)
Publisher: Createspace Independent Publishing Platform
ISBN: 9781721977048
Category :
Languages : en
Pages : 312

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Book Description
This guide is a reference for understanding the various aspects of microelectromechanical systems, or MEMS, with an emphasis on device reliability. Material properties, failure mechanisms, processing techniques, device structures, and packaging techniques common to MEMS are addressed in detail. Design and qualification methodologies provide the reader with the means to develop suitable qualification plans for the insertion of MEMS into the space environment. Stark, Brian (Editor) Jet Propulsion Laboratory NAS7-1407...