Low-temperature Epitaxial Silicon Using Hot Wire Chemical Vapor Deposition PDF Download
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Author: Jack H. Thiesen
Publisher:
ISBN:
Category : Chemical vapor deposition
Languages : en
Pages : 418
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Book Description
Author: Jack H. Thiesen
Publisher:
ISBN:
Category : Chemical vapor deposition
Languages : en
Pages : 418
Get Book Here
Book Description
Author:
Publisher:
ISBN:
Category : Chemical vapor deposition
Languages : en
Pages : 0
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Author: Richard J. Matson
Publisher:
ISBN:
Category : Chemical vapor deposition
Languages : en
Pages : 6
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Author: Jack H. Thiesen
Publisher:
ISBN:
Category : Chemical vapor deposition
Languages : en
Pages : 11
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Author: Manal Abdullah Aldawsari
Publisher:
ISBN: 9781321697520
Category : Chemical vapor deposition
Languages : en
Pages : 232
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Book Description
Crystallinity quality is a significant factor toward confirming the epitaxial layer. Raman scattering, X-Ray Diffraction (XRD), Scanning Electron Microscope (SEM), and Transmission Electron Microscope (TEM) were used to determine the crystallinity. Epitaxial growth of Si at 500 °C was obtained even with a low vacuum of 1x10-3 torr.
Author:
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ISBN:
Category : Chemical vapor deposition
Languages : en
Pages : 0
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Author: Torsten Bistritschan
Publisher:
ISBN:
Category :
Languages : de
Pages : 112
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Author: Hideki Matsumura
Publisher: John Wiley & Sons
ISBN: 352734523X
Category : Technology & Engineering
Languages : en
Pages : 438
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Book Description
The authoritative reference on catalytic chemical vapor deposition, written by the inventor of the technology. This comprehensive book covers a wide scope of Cat-CVD and related technologies from the fundamentals to the many applications, including the design of a Cat-CVD apparatus. Featuring contributions from four senior leaders in the field, including the father of catalytic chemical vapor deposition, it also introduces some of the techniques used in the observation of Cat-CVD related phenomena so that readers can understand the concepts of such techniques. Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD begins by reviewing the analytical tools for elucidating the chemical reactions in Cat-CVD, such as laser-induced fluorescence and deep ultra-violet absorption, and explains in detail the underlying physics and chemistry of the Cat-CVD technology. Subsequently it provides an overview of the synthesis and properties of Cat-CVD-prepared inorganic and organic thin films. The last parts of this unique book are devoted to the design and operation of Cat-CVD apparatuses and the applications. Provides coherent coverage of the fundamentals and applications of catalytic chemical vapor deposition (Cat-CVD) Assembles in one place the state of the art of this rapidly growing field, allowing new researchers to get an overview that is difficult to obtain solely from journal articles Presents comparisons of different Cat-CVD methods which are usually not found in research papers Bridges academic and industrial research, showing how CVD can be scaled up from the lab to large-scale industrial utilization in the high-tech industry. Catalytic Chemical Vapor Deposition: Technology and Applications is an excellent one-stop resource for researchers and engineers working on or entering the field of Cat-CVD, Hot-Wire CVD, iCVD, and related technologies.
Author: Hunter John King
Publisher:
ISBN: 9783839618202
Category :
Languages : en
Pages :
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Author: Scott Dwight Habermehl
Publisher:
ISBN:
Category :
Languages : en
Pages : 306
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Book Description
