Author:
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ISBN:
Category :
Languages : en
Pages : 0

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Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :

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Author:
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ISBN:
Category :
Languages : en
Pages : 10

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We describe initial experiments with a large (30 in.) plasma source chamber to explore the problems associated with large-area Inductively coupled plasma (ICP) sources to produce high density plasmas useful for processing 400 mm semiconductor wafers. Our experiments typically use a 25 in. diameter planar ICP coil driven at 13.56 MHz. Plasma and system data are taken in Ar and N2 over the pressure range 3--50 mtorr. R.F. Inductive power was run up to 2000W, but typically data were taken over the range 100--1000W. Diagnostics Include optical emission spectroscopy, Langmuir probes, and B-dot probes as well as electrical circuit measurements. The B-dot and E-M measurements are compared with models based on commercial E-M codes. Initial indications are that uniform plasmas suitable for 400 mm processing are attainable. We present a comparison between computer modeling and experimental results for this source. Computer simulations using the fluid code INDUCT94 are used to explain variations In the plasma density profile measurements as a function of Inductive power, gas pressure and gas composition. Both Argon and Nitrogen discharges are modeled. INDUCT94 solves the 2D time-dependent fluid equations for electrons, ions and neutrals Including effects of both Inductive and capacitive coupling. Detailed volume and surface chemistry reactions are treated. We discuss the effects of pressure and power on plasma uniformity.

Author:
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ISBN:
Category : Power resources
Languages : en
Pages : 444

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Author:
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ISBN:
Category : Science
Languages : en
Pages : 796

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Author: Yaoxi Wu
Publisher:
ISBN:
Category :
Languages : en
Pages : 12

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Author:
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ISBN:
Category : Aeronautics
Languages : en
Pages : 488

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Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.

Author: Yaoxi Wu
Publisher: Ann Arbor, Mich. : University Microfilms International
ISBN:
Category :
Languages : en
Pages : 390

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Author: Michael F. L'Annunziata
Publisher: Academic Press
ISBN: 0128143967
Category : Science
Languages : en
Pages : 1076

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Handbook of Radioactivity Analysis: Radiation Physics and Detectors, Volume One, and Radioanalytical Applications, Volume Two, Fourth Edition, constitute an authoritative reference on the principles, practical techniques and procedures for the accurate measurement of radioactivity - everything from the very low levels encountered in the environment, to higher levels measured in radioisotope research, clinical laboratories, biological sciences, radionuclide standardization, nuclear medicine, nuclear power, and fuel cycle facilities, and in the implementation of nuclear forensic analysis and nuclear safeguards. It includes sample preparation techniques for all types of matrices found in the environment, including soil, water, air, plant matter and animal tissue, and surface swipes.Users will find the latest advances in the applications of radioactivity analysis across various fields, including environmental monitoring, radiochemical standardization, high-resolution beta imaging, automated radiochemical separation, nuclear forensics, and more. - Spans two volumes, Radiation Physics and Detectors and Radioanalytical Applications - Includes a new chapter on the analysis of environmental radionuclides - Provides the latest advances in the applications of liquid and solid scintillation analysis, alpha- and gamma spectrometry, mass spectrometric analysis, Cherenkov counting, flow-cell radionuclide analysis, radionuclide standardization, aerosol analysis, high-resolution beta imaging techniques, analytical techniques in nuclear forensics, and nuclear safeguards - Describes the timesaving techniques of computer-controlled automatic separation and activity analysis of radionuclides - Provides an extensive table of the radiation characteristics of most radionuclides of interest for the radioanalytical chemist

Author: Lawrence Livermore National Laboratory
Publisher:
ISBN:
Category : Research
Languages : en
Pages : 252

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