Kinetic Monte Carlo Simulation of Gas Phase Nucleation of Particles During Chemical Vapor Deposition of Silicon PDF Download
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Author: Xuegeng Li
Publisher:
ISBN:
Category : Chemical engineering
Languages : en
Pages :
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Author: Xuegeng Li
Publisher:
ISBN:
Category : Chemical engineering
Languages : en
Pages :
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Author: Electrochemical Society. High Temperature Materials Division
Publisher: The Electrochemical Society
ISBN: 9781566773195
Category : Science
Languages : en
Pages : 526
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Author: Corbett Chandler Battaile
Publisher:
ISBN:
Category :
Languages : en
Pages : 372
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Author: Fethi Khelfaoui
Publisher:
ISBN:
Category : Electronic books
Languages : en
Pages : 0
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Many physical phenomena can be modeled using Monte Carlo simulation (MCS) because it is a powerful tool to study thermodynamic properties. MCS can be used to simulate interactions between several particles or bodies in the presence of local or external fields. The main idea is to create a high number of different random configurations; statistics can be taken according to appropriate algorithms (Metropolis algorithm). In this chapter, we present basic techniques of MCS as the choice of potential, reaction rates, simulation cell, random configurations, and algorithms. We present some principal ideas of MCS used to study particle-particle collisions in the gas and in plasmas. Other MCS techniques are presented briefly. A numerical application is presented for collisions in gas phase during thin film deposition by plasma-enhanced chemical vapor deposition (PECVD) processes. Parameters and results of the simulation are studied according to a chosen reactor and mixture.
Author: Phillip J. Stout
Publisher:
ISBN:
Category :
Languages : en
Pages : 98
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Author: Martine Kalke
Publisher:
ISBN:
Category :
Languages : en
Pages : 212
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Author: American Chemical Society. Committee on Professional Training
Publisher:
ISBN:
Category : Biochemistry
Languages : en
Pages : 1932
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Faculties, publications and doctoral theses in departments or divisions of chemistry, chemical engineering, biochemistry and pharmaceutical and/or medicinal chemistry at universities in the United States and Canada.
Author:
Publisher: Springer Nature
ISBN: 1461596181
Category :
Languages : en
Pages : 270
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Author: Kurt Binder
Publisher: Springer Science & Business Media
ISBN: 3642828035
Category : Science
Languages : en
Pages : 425
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In the seven years since this volume first appeared. there has been an enormous expansion of the range of problems to which Monte Carlo computer simulation methods have been applied. This fact has already led to the addition of a companion volume ("Applications of the Monte Carlo Method in Statistical Physics", Topics in Current Physics. Vol . 36), edited in 1984, to this book. But the field continues to develop further; rapid progress is being made with respect to the implementation of Monte Carlo algorithms, the construction of special-purpose computers dedicated to exe cute Monte Carlo programs, and new methods to analyze the "data" generated by these programs. Brief descriptions of these and other developments, together with numerous addi tional references, are included in a new chapter , "Recent Trends in Monte Carlo Simulations" , which has been written for this second edition. Typographical correc tions have been made and fuller references given where appropriate, but otherwise the layout and contents of the other chapters are left unchanged. Thus this book, together with its companion volume mentioned above, gives a fairly complete and up to-date review of the field. It is hoped that the reduced price of this paperback edition will make it accessible to a wide range of scientists and students in the fields to which it is relevant: theoretical phYSics and physical chemistry , con densed-matter physics and materials science, computational physics and applied mathematics, etc.
Author:
Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 944
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