Improving the electrical properties of in situ doped silicon films grown by remote plasma-enhanced chemical vapor deposition PDF Download
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Author: Pablo Munguia
Publisher:
ISBN:
Category :
Languages : en
Pages : 240
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Book Description
Author: Pablo Munguia
Publisher:
ISBN:
Category :
Languages : en
Pages : 240
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Book Description
Author: Joel Thornton Irby
Publisher:
ISBN:
Category : Silicon
Languages : en
Pages : 118
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Author: Rajan Sharma
Publisher:
ISBN:
Category :
Languages : en
Pages : 166
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Author: Sunil Thomas
Publisher:
ISBN:
Category : Plasma-enhanced chemical vapor deposition
Languages : en
Pages : 158
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Author: James Hartfiel Comfort
Publisher:
ISBN:
Category :
Languages : en
Pages : 352
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Author: Joseph Edward Schoenholtz
Publisher:
ISBN:
Category :
Languages : en
Pages : 390
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Author: Pio Capezzuto
Publisher: Elsevier
ISBN: 0080539106
Category : Science
Languages : en
Pages : 339
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Book Description
Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference book written by leading authorities in the field. This volume links the fundamental growth kinetics involving complex plasma chemistry with the resulting semiconductor film properties and the subsequent effect on the performance of the electronic devices produced. Focuses on the plasma chemistry of amorphous silicon-based materials Links fundamental growth kinetics with the resulting semiconductor film properties and performance of electronic devices produced Features an international group of contributors Provides the first comprehensive coverage of the subject, from deposition technology to materials characterization to applications and implementation in state-of-the-art devices
Author: Sui-Yuan Lynn
Publisher:
ISBN:
Category : Silicon nitride
Languages : en
Pages : 212
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Author: Matthew W. Deming
Publisher:
ISBN:
Category : Erbium
Languages : en
Pages : 170
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Author: Aditi Banerjee
Publisher:
ISBN:
Category :
Languages : en
Pages : 344
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