High Q Nanomechanical Resonators Fabricated from Crystalline Silicon Carbide PDF Download
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Author: Yannick Sebastian Klaß
Publisher:
ISBN:
Category :
Languages : en
Pages : 0
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Author: Yannick Sebastian Klaß
Publisher:
ISBN:
Category :
Languages : en
Pages : 0
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Author: Felix Nägele
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Author: Silvan Schmid
Publisher: Springer Nature
ISBN: 3031296281
Category : Technology & Engineering
Languages : en
Pages : 215
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Book Description
Now in an updated second edition, this classroom-tested textbook introduces and summarizes the latest models and skills required to design and optimize nanomechanical resonators, taking a top-down approach that uses macroscopic formulas to model the devices. The authors cover the electrical and mechanical aspects of nanoelectromechanical system (NEMS) devices in six expanded and revised chapters on lumped-element model resonators, continuum mechanical resonators, damping, transduction, responsivity, and measurements and noise. The applied approach found in this book is appropriate for engineering students and researchers working with micro and nanomechanical resonators.
Author: Ernst Obermeier
Publisher: Springer
ISBN: 3642594972
Category : Technology & Engineering
Languages : en
Pages : 1763
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Book Description
The Conference is the premier international meeting for the presentation of original work addressing all aspects of the theory, design, fabrication, assembly, packaging, testing and application of solid-state sensors, actuators, MEMS, and microsystems.
Author: Klaus D. Sattler
Publisher: CRC Press
ISBN: 1420075535
Category : Science
Languages : en
Pages : 790
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Book Description
Handbook of Nanophysics: Functional Nanomaterials illustrates the importance of tailoring nanomaterials to achieve desired functions in applications. Each peer-reviewed chapter contains a broad-based introduction and enhances understanding of the state-of-the-art scientific content through fundamental equations and illustrations, some in color.This
Author: Rebecca Cheung
Publisher: World Scientific
ISBN: 1860946240
Category : Technology & Engineering
Languages : en
Pages : 193
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Book Description
This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS.This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.
Author: Wolfgang J. Choyke
Publisher: Springer Science & Business Media
ISBN: 9783540404583
Category : Technology & Engineering
Languages : en
Pages : 938
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Book Description
Since the 1997 publication of "Silicon Carbide - A Review of Fundamental Questions and Applications to Current Device Technology" edited by Choyke, et al., there has been impressive progress in both the fundamental and developmental aspects of the SiC field. So there is a growing need to update the scientific community on the important events in research and development since then. The editors have again gathered an outstanding team of the world's leading SiC researchers and design engineers to write on the most recent developments in SiC.
Author: Nguyen Van Toan
Publisher: CRC Press
ISBN: 0429560990
Category : Technology & Engineering
Languages : en
Pages : 159
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Book Description
Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology. Features Introduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators Provides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator. Discusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor. Focusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body. Reviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.
Author: Mahdi Nikdast
Publisher: CRC Press
ISBN: 1000480143
Category : Technology & Engineering
Languages : en
Pages : 391
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Book Description
Silicon photonics is beginning to play an important role in driving innovations in communication and computation for an increasing number of applications, from health care and biomedical sensors to autonomous driving, datacenter networking, and security. In recent years, there has been a significant amount of effort in industry and academia to innovate, design, develop, analyze, optimize, and fabricate systems employing silicon photonics, shaping the future of not only Datacom and telecom technology but also high-performance computing and emerging computing paradigms, such as optical computing and artificial intelligence. Different from existing books in this area, Silicon Photonics for High-Performance Computing and Beyond presents a comprehensive overview of the current state-of-the-art technology and research achievements in applying silicon photonics for communication and computation. It focuses on various design, development, and integration challenges, reviews the latest advances spanning materials, devices, circuits, systems, and applications. Technical topics discussed in the book include: • Requirements and the latest advances in high-performance computing systems • Device- and system-level challenges and latest improvements to deploy silicon photonics in computing systems • Novel design solutions and design automation techniques for silicon photonic integrated circuits • Novel materials, devices, and photonic integrated circuits on silicon • Emerging computing technologies and applications based on silicon photonics Silicon Photonics for High-Performance Computing and Beyond presents a compilation of 19 outstanding contributions from academic and industry pioneers in the field. The selected contributions present insightful discussions and innovative approaches to understand current and future bottlenecks in high-performance computing systems and traditional computing platforms, and the promise of silicon photonics to address those challenges. It is ideal for researchers and engineers working in the photonics, electrical, and computer engineering industries as well as academic researchers and graduate students (M.S. and Ph.D.) in computer science and engineering, electronic and electrical engineering, applied physics, photonics, and optics.
Author: Vahid Qaradaghi
Publisher:
ISBN:
Category : Carbon nanotubes
Languages : en
Pages :
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Book Description
Nanoelectromechanical (NEM) resonators have been used to detect masses of organic or inorganic particles in nanoscale or even atomic level. A reduction in the resonator mass can increase its mass sensitivity (frequency shift per loaded mass). However, the operation of most small resonators is restricted to vacuum or air since operation in liquid sharply decreases their quality factor (Q) due to the excessive damping resulting from liquid viscosity. Q factor is a dimensionless parameter that describes how underdamped an oscillator or resonator is, and higher Q indicates a lower rate of energy loss relative to the stored energy of the resonator. Typically, large size resonators such as Quartz Crystal Microbalance (QCM) are used for mass detection in liquid to preserve a high Q factor that determines the resolution of measurements. However, as it was mentioned earlier, such resonators cannot offer high sensitivity due to their relatively large size and mass. Therefore, highly-sensitive resonators capable of real-time mass measurement with high Q both in air and liquid currently do not exist. Thermal piezoresistive disk resonator surface merely slides alongside the solid-liquid interface in the rotational mode, as opposed to paddling against the surrounding liquid offering high Q. In this dissertation, thermal-piezoresistive disk resonators with much smaller dimensions in the deep submicron range have been fabricated using electron beam lithography (EBL), and the effect of scaling on mass sensitivity, power consumption and quality factor (Q) is investigated. Disk resonators with diameter ranging from 2μm to 20μm with thermal actuator beams as narrow as 35nm have been fabricated via electron beam lithography. Mass sensitivity of disk resonators was characterized in air by formation of a self-assembled monolayer of hexa-methyl-disilazane (HMDS) on the surfaces. Frequency shifts as high as 318 Hz were measured for a calculated deposited mass of one attogram using a 2μm diameter disk resonator resonating at 221MHz. Operation in liquid was characterized by exposing a 20μm disk resonator to a 10mM solution of mercaptohexanol (MCH) diluted in ethyl alcohol (ethanol). For this experiment, frequency shift of 20 kHz for 2.8 pg of added MCH mass was obtained. In conventional rotational mode disk resonators, as the dimensions scale down, the mechanical losses including anchor loss increase. This adversely affects the detection of the resonance mode at higher frequencies. To alleviate this issue, donut-shaped resonators have been proposed potentially offering higher Qs while resonating at higher frequencies. Mass sensitivity of donut resonators with different sizes has been investigated with deposited 10nm gold nanoparticles (AuNPs) as added mass showing mass sensitivity of 36 Hz/attogram (712 Hz/AuNp) in air characterization. Due to the reduction of the surface area, the probability of adsorption of molecules or particulates of interest onto the NEM resonator surfaces diminishes. To address this issue, forests of multiwall carbon nanotubes (MWCNTs) have been used to enhance the effective surface area, which allows detection of much lower concentrations of analytes. Using this approach, average effective surface area enhancement as high as 9 times for organic and inorganic nanoparticles was demonstrated.
