Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies PDF Author: Markku Tilli
Publisher: Elsevier
ISBN: 012817787X
Category : Technology & Engineering
Languages : en
Pages : 1028

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Book Description
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies PDF Author: Markku Tilli
Publisher: Elsevier
ISBN: 0815519885
Category : Technology & Engineering
Languages : en
Pages : 670

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Book Description
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning

Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning PDF Author: Rajiv Kohli
Publisher: William Andrew
ISBN: 0323431720
Category : Science
Languages : en
Pages : 214

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Book Description
Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9, part of the Developments in Surface Contamination and Cleaning series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their associated cleaning methods. This newest volume in the series discusses methods of surface cleaning of contaminants and the resources that are needed to deal with them. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales. - Provides a comprehensive coverage of innovations in surface cleaning - Written by established experts in the surface cleaning field, presenting an authoritative resource - Contains a comprehensive review of the state-of-the-art, including case studies to enhance the learning process

Advanced Materials and Manufacturing Techniques for Biomedical Applications

Advanced Materials and Manufacturing Techniques for Biomedical Applications PDF Author: Arbind Prasad
Publisher: John Wiley & Sons
ISBN: 1394166192
Category : Science
Languages : en
Pages : 468

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Book Description
ADVANCED MATERIALS and MANUFACTURING TECHNIQUES for BIOMEDICAL APPLICATIONS The book provides essential knowledge for the synthesis of biomedical products, development, nanomaterial properties, fabrication processes, and design techniques for different applications, as well as process design and optimization. In origin, biomaterials can come from nature or be synthesized in the laboratory with a variety of approaches that use metals, polymers, ceramic, or composite materials. They are often used or adapted for various biomedical applications. Biomaterials are commonly used in scaffolds, orthopedic, wound healing, fracture fixation, surgical sutures, artificial organ developments, pins and screws to stabilize fractures, surgical mesh, breast implants, artificial ligaments and tendons, and drug delivery systems. The sixteen chapters in Advanced Materials and Manufacturing Techniques in Biomedical Applications cover the synthesis, processing, design, manufacturing, and characterization of advanced materials; self-healing, bioinspired, nature-resourced, nanobiomaterials for biomedical applications; and manufacturing techniques such as rapid prototyping, additive manufacturing, etc. Audience The book is for engineers, technologists, and researchers working in the area of biomedical engineering and manufacturing techniques. It is also appropriate for upper-level undergraduate and graduate students.

Flexible Sensors for Energy-Harvesting Applications

Flexible Sensors for Energy-Harvesting Applications PDF Author: Anindya Nag
Publisher: Springer Nature
ISBN: 303099600X
Category : Technology & Engineering
Languages : en
Pages : 244

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Book Description
This book investigates the fabrication of different types of flexible sensors and their subsequent implementation for energy-harvesting applications. A range of techniques, including 3D printing, soft lithography, laser ablation, micro-contract printing, screen-printing, inkjet printing and others have been used to form the flexible sensors with varied characteristics. These sensors have been used for biomedical, environmental and healthcare applications on the basis of their performances. The quality of these flexible sensors has depended on certain types of nanomaterials that have been used to synthesize the conductive parts of the prototypes. These nanomaterials have been based on different sizes and shapes, whose quality varied on the basis of certain factors like crystallinity, shapes and sizes. One of the primary utilization of these nanotechnology-based flexible sensors has been the harvesting of energy where nano-generators and nano-harvesters have been formed to generate and store energy, respectively, on small and moderate magnitudes. Mechanical and thermal energies have been harvested on the basis of the piezoelectric, pyroelectric and triboelectric effects created by the formed prototypes. The work highlights the amalgamation of these sectors to spotlight the essence of these types of sensors and their intended application.

New Trends in Technologies

New Trends in Technologies PDF Author: Zhichao Lian
Publisher: BoD – Books on Demand
ISBN: 9533072121
Category : Technology & Engineering
Languages : en
Pages : 456

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Book Description
The grandest accomplishments of engineering took place in the twentieth century. The widespread development and distribution of electricity and clean water, automobiles and airplanes, radio and television, spacecraft and lasers, antibiotics and medical imaging, computers and the Internet are just some of the highlights from a century in which engineering revolutionized and improved virtually every aspect of human life. In this book, the authors provide a glimpse of new trends in technologies pertaining to devices, computers, communications and industrial systems.

Comprehensive Materials Processing

Comprehensive Materials Processing PDF Author:
Publisher: Newnes
ISBN: 0080965334
Category : Technology & Engineering
Languages : en
Pages : 5485

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Book Description
Comprehensive Materials Processing, Thirteen Volume Set provides students and professionals with a one-stop resource consolidating and enhancing the literature of the materials processing and manufacturing universe. It provides authoritative analysis of all processes, technologies, and techniques for converting industrial materials from a raw state into finished parts or products. Assisting scientists and engineers in the selection, design, and use of materials, whether in the lab or in industry, it matches the adaptive complexity of emergent materials and processing technologies. Extensive traditional article-level academic discussion of core theories and applications is supplemented by applied case studies and advanced multimedia features. Coverage encompasses the general categories of solidification, powder, deposition, and deformation processing, and includes discussion on plant and tool design, analysis and characterization of processing techniques, high-temperatures studies, and the influence of process scale on component characteristics and behavior. Authored and reviewed by world-class academic and industrial specialists in each subject field Practical tools such as integrated case studies, user-defined process schemata, and multimedia modeling and functionality Maximizes research efficiency by collating the most important and established information in one place with integrated applets linking to relevant outside sources

Advanced Materials Research Vol. 1170

Advanced Materials Research Vol. 1170 PDF Author: Alan Kin Tak Lau
Publisher: Trans Tech Publications Ltd
ISBN: 3036410457
Category : Science
Languages : en
Pages : 178

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Book Description
This volume of the "Advanced Materials Research" journal includes papers reflecting research results in developing new materials and investigating their properties. The covered topics comprise assessment of the algorithm of surface defect classification in silicon wafer manufacturing, designing and simulation of a color-tunable light-emitting diode with two laterally arranged single quantum wells, defect evolution in laser remelting of thermally sprayed coating, analysis of corrosion behavior of welded joint aluminum alloy in simulated marine atmosphere environment, results of an experimental study into thermal behavior of micro friction stir welded joints of aluminum and copper sheets. Some articles demonstrate the review of mechanical properties of foamed cellular concrete and fire retardant materials, the study of properties of materials that are based on the natural fiber, and analysis of technologies of surface water treatment and absorption of various pharmaceutical compounds. The papers collected in this volume will be helpful for professionals in various engineering fields, students, and academic staff.

Modern Trends in Materials Processing

Modern Trends in Materials Processing PDF Author: Sergey Bratan
Publisher: Trans Tech Publications Ltd
ISBN: 3035721491
Category : Science
Languages : en
Pages : 1184

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Book Description
Selected peer-reviewed full text papers from the 5th International Conference on Modern Trends in Manufacturing Technologies and Equipment (ICMTMTE 2021)

Materials Science and Technology IX

Materials Science and Technology IX PDF Author: Peerapong Pinwanich
Publisher: Trans Tech Publications Ltd
ISBN: 3035730822
Category : Technology & Engineering
Languages : en
Pages : 840

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Book Description
MSAT-9 Selected, peer reviewed papers from the 9th International Conference on Materials Science and Technology (MSAT-9), December 14-15, 2016, Bangkok, Thailand