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Author: Markku Tilli
Publisher: Elsevier
ISBN: 012817787X
Category : Technology & Engineering
Languages : en
Pages : 1028
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Book Description
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Author: Markku Tilli
Publisher: Elsevier
ISBN: 012817787X
Category : Technology & Engineering
Languages : en
Pages : 1028
Get Book Here
Book Description
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Author: Markku Tilli
Publisher: Elsevier
ISBN: 0815519885
Category : Technology & Engineering
Languages : en
Pages : 670
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Book Description
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures
Author: Rajiv Kohli
Publisher: William Andrew
ISBN: 0323431720
Category : Science
Languages : en
Pages : 214
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Book Description
Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9, part of the Developments in Surface Contamination and Cleaning series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their associated cleaning methods. This newest volume in the series discusses methods of surface cleaning of contaminants and the resources that are needed to deal with them. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales. - Provides a comprehensive coverage of innovations in surface cleaning - Written by established experts in the surface cleaning field, presenting an authoritative resource - Contains a comprehensive review of the state-of-the-art, including case studies to enhance the learning process
Author: Reza Ghodssi
Publisher: Springer Science & Business Media
ISBN: 0387473181
Category : Technology & Engineering
Languages : en
Pages : 1211
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Book Description
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
Author: Robin H A Ras
Publisher: Royal Society of Chemistry
ISBN: 1782623957
Category : Science
Languages : en
Pages : 406
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Book Description
The objective of this book is to integrate information about the theory, preparation and applications of non-wettable surfaces in one volume. By combining the discussion of all three aspects together the editors will show how theory assists the development of preparations methods and how these surfaces can be applied to different situations. The book is separated into three sections, first covering the theory, then going on to preparation of these surfaces and finally discussing the applications in detail. Edited by two of the most innovative contributors to the field of superhydrophobicity, this book will be essential reading for materials scientists interested in any aspect of surface, colloid and polymer science, thermodynamics, superhydrophobic and superhygrophobic surfaces.
Author: Anindya Nag
Publisher: Springer Nature
ISBN: 303099600X
Category : Technology & Engineering
Languages : en
Pages : 244
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Book Description
This book investigates the fabrication of different types of flexible sensors and their subsequent implementation for energy-harvesting applications. A range of techniques, including 3D printing, soft lithography, laser ablation, micro-contract printing, screen-printing, inkjet printing and others have been used to form the flexible sensors with varied characteristics. These sensors have been used for biomedical, environmental and healthcare applications on the basis of their performances. The quality of these flexible sensors has depended on certain types of nanomaterials that have been used to synthesize the conductive parts of the prototypes. These nanomaterials have been based on different sizes and shapes, whose quality varied on the basis of certain factors like crystallinity, shapes and sizes. One of the primary utilization of these nanotechnology-based flexible sensors has been the harvesting of energy where nano-generators and nano-harvesters have been formed to generate and store energy, respectively, on small and moderate magnitudes. Mechanical and thermal energies have been harvested on the basis of the piezoelectric, pyroelectric and triboelectric effects created by the formed prototypes. The work highlights the amalgamation of these sectors to spotlight the essence of these types of sensors and their intended application.
Author:
Publisher: Newnes
ISBN: 0080965334
Category : Technology & Engineering
Languages : en
Pages : 5485
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Book Description
Comprehensive Materials Processing, Thirteen Volume Set provides students and professionals with a one-stop resource consolidating and enhancing the literature of the materials processing and manufacturing universe. It provides authoritative analysis of all processes, technologies, and techniques for converting industrial materials from a raw state into finished parts or products. Assisting scientists and engineers in the selection, design, and use of materials, whether in the lab or in industry, it matches the adaptive complexity of emergent materials and processing technologies. Extensive traditional article-level academic discussion of core theories and applications is supplemented by applied case studies and advanced multimedia features. Coverage encompasses the general categories of solidification, powder, deposition, and deformation processing, and includes discussion on plant and tool design, analysis and characterization of processing techniques, high-temperatures studies, and the influence of process scale on component characteristics and behavior. Authored and reviewed by world-class academic and industrial specialists in each subject field Practical tools such as integrated case studies, user-defined process schemata, and multimedia modeling and functionality Maximizes research efficiency by collating the most important and established information in one place with integrated applets linking to relevant outside sources
Author: Alan Kin Tak Lau
Publisher: Trans Tech Publications Ltd
ISBN: 3036410457
Category : Science
Languages : en
Pages : 178
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Book Description
This volume of the "Advanced Materials Research" journal includes papers reflecting research results in developing new materials and investigating their properties. The covered topics comprise assessment of the algorithm of surface defect classification in silicon wafer manufacturing, designing and simulation of a color-tunable light-emitting diode with two laterally arranged single quantum wells, defect evolution in laser remelting of thermally sprayed coating, analysis of corrosion behavior of welded joint aluminum alloy in simulated marine atmosphere environment, results of an experimental study into thermal behavior of micro friction stir welded joints of aluminum and copper sheets. Some articles demonstrate the review of mechanical properties of foamed cellular concrete and fire retardant materials, the study of properties of materials that are based on the natural fiber, and analysis of technologies of surface water treatment and absorption of various pharmaceutical compounds. The papers collected in this volume will be helpful for professionals in various engineering fields, students, and academic staff.
Author: Werner Zapka
Publisher: John Wiley & Sons
ISBN: 3527347801
Category : Technology & Engineering
Languages : en
Pages : 1718
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Book Description
This handbook provides an indispensable overview of all essential aspects of industrial-scale inkjet printing. Inkjet printing, as a scalable deposition technique, has grown in popularity due to its being additive, digital, and contact-free. Given these advantages, the technology can now be used in stable and mature industrial-scale applications. As the mechanisms for inkjet printing have improved, so too have the versatility and applicability of this machinery within industry. The handbook's coverage includes inks, printhead technology, substrates, metrology, software, as well as machine integration and pre- and post-processing approaches. This information is complemented by an overview of printing strategies and application development and covers technological advances in packaging, security printing, printed electronics, robotics, 3D printing, and bioprinting. Important topics like standardisation, regulatory requirements, ecological aspects, and patents. Readers will find: The most comprehensive work on the topic with over 75 chapters and more than 1,500 pages relating to inkjet printing technology The inkjet-printing expertise of corporate development engineers and academic researchers in one manual A hands-on approach utilizing case studies, success stories, and practical hints that allow the reader direct, first-hand experience with the power of inkjet printing technology. The ideal resource for material scientists, engineering scientists in industry, electronic engineers, and surface and solid-state chemists,Inkjet Printing in Industry is an all-in-one tool for modern professionals and researchers alike.
Author: Deepak Uttamchandani
Publisher: Elsevier
ISBN: 0857098616
Category : Technology & Engineering
Languages : en
Pages : 640
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Book Description
The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems. - Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications - Discusses wireless techniques and applications of wireless MEMS, including biomedical applications - Describes monitoring structures and the environment with wireless MEMS
