Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication PDF Download
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Author: P. Rai-Choudhury
Publisher: IET
ISBN: 9780852969113
Category : Technology & Engineering
Languages : en
Pages : 716
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Book Description
Contains useful process details, recipes, tables, charts and includes numerous device applications.
Author: P. Rai-Choudhury
Publisher: IET
ISBN: 9780852969113
Category : Technology & Engineering
Languages : en
Pages : 716
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Book Description
Contains useful process details, recipes, tables, charts and includes numerous device applications.
Author: P. Rai-Choudhury
Publisher: SPIE Press
ISBN: 9780819423788
Category : Technology & Engineering
Languages : en
Pages : 780
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Book Description
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.
Author: P. Rai-Choudhury {u. a.
Publisher:
ISBN:
Category : Microfabrication
Languages : en
Pages :
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Book Description
Author: Prosenjit Rai-Choudhury
Publisher:
ISBN:
Category : Electronic book
Languages : en
Pages : 776
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Book Description
Author: P. Rai-Choudhury
Publisher: INSPEC, Incorporated
ISBN: 9780852969106
Category : Microfabrication
Languages : en
Pages : 0
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Book Description
Author: P. Rai-Choudhury
Publisher:
ISBN:
Category :
Languages : en
Pages : 692
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Book Description
Author: Prosenjit Rai-Choudhury
Publisher:
ISBN: 9780819497864
Category :
Languages : en
Pages : 776
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Book Description
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
Author: Mark J. Jackson
Publisher: CRC Press
ISBN: 1420028278
Category : Technology & Engineering
Languages : en
Pages : 416
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Book Description
Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.
Author: Sami Franssila
Publisher: John Wiley & Sons
ISBN: 1119991897
Category : Technology & Engineering
Languages : en
Pages : 534
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Book Description
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike. www.wiley.com/go/Franssila_Micro2e
Author: Mark J. Jackson
Publisher: Springer Science & Business Media
ISBN: 038726132X
Category : Technology & Engineering
Languages : en
Pages : 708
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Book Description
This, the corrected second printing of Jackson’s authoritative volume on the subject, provides a comprehensive treatment of established micro and nanofabrication techniques. It addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. The book provides up-to-date information on a number of subjects of interest to engineers who are seeking more knowledge of how nano and micro devices are designed and fabricated. They will learn about manufacturing and fabrication techniques at the micro and nanoscales; using bulk and surface micromachining techniques, and LiGA, and deep x-ray lithography to manufacture semiconductors. Also covered are subjects including producing master molds with micromachining, the deposition of thin films, pulsed water drop machining, and nanomachining.
