HANDBOOK OF CHEMICAL VAPOR DEPOSITION (2 VOLUMES). PDF Download
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Author:
Publisher:
ISBN: 9781785693168
Category :
Languages : en
Pages :
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Book Description
Author:
Publisher:
ISBN: 9781785693168
Category :
Languages : en
Pages :
Get Book Here
Book Description
Author: Hugh O. Pierson
Publisher: William Andrew
ISBN: 0815517432
Category : Technology & Engineering
Languages : en
Pages : 507
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Book Description
Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now estimated to be at least double that of a mere seven years ago when the first edition of this book was published. The second edition is an update with a considerably expanded and revised scope. Plasma CVD and metallo-organic CVD are two major factors in this rapid growth. Readers will find the latest data on both processes in this volume. Likewise, the book explains the growing importance of CVD in production of semiconductor and related applications.
Author: Jong-Hee Park
Publisher: ASM International
ISBN: 161503224X
Category : Technology & Engineering
Languages : en
Pages : 477
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Book Description
Author: D. M. Mattox
Publisher: Cambridge University Press
ISBN: 0080946585
Category : Technology & Engineering
Languages : en
Pages : 947
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Book Description
This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.
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Author: Hugh O. Pierson
Publisher: Noyes Publications
ISBN: 9780815514329
Category : Technology & Engineering
Languages : en
Pages : 482
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Book Description
Since the publication of the first edition of the Handbook of Chemical Vapor Deposition (CVD) in early 1992, the technology has developed at a rapid rate and the number and scope of its applications and their impact of the market have increased considerably. This process is now a key factor in many industries such as semiconductors, optoelectronics, optics, cutting tools, refractory fibers, filters and many others. The size of the CVD market today (1999) is estimated to be at least double that of the market seven years ago. This second edition of the Handbook is an update with a considerably expanded and revised scope.
Author: Anthony C. Jones
Publisher: Royal Society of Chemistry
ISBN: 0854044655
Category : Science
Languages : en
Pages : 600
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Book Description
"The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket
Author: Edited by Jong-Hee Park and T.S. Sudarshan
Publisher: ASM International
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 478
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Book Description
This handbook provides guidelines and practical information on the chemical vapor deposition (CVD) process for surface engineering design, product development, and manufacturing. The first of the 14 chapters discuss the basic principles of CVD thermodynamics and kinetics, stresses and mechanical sta
Author: Sam Zhang
Publisher: CRC Press
ISBN: 1439849986
Category : Medical
Languages : en
Pages : 446
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Book Description
Written in a versatile, contemporary style that will benefit both novice and expert alike, Biological and Biomedical Coatings Handbook, Two-Volume Set covers the state of the art in the development and implementation of advanced thin films and coatings in the biological field. Consisting of two volumes-Processing and Characterization and Applicatio
Author: Wiley
Publisher: John Wiley & Sons
ISBN: 0470105402
Category : Science
Languages : en
Pages : 2597
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Book Description
The two-volume reference work Chemical Technology and the Environment provides readers with knowledge on contemporary issues in environmental pollution, prevention and control, as well as regulatory, health and safety issues as related to chemical technology. It introduces and expands the knowledge on emerging "green" materials and processes and "greener" energy technology, as well as more general concepts and methodology including sustainable development and chemistry and green chemistry. Based on Wiley's renowned, Kirk-Othmer Encyclopedia of Chemical Technology, this compact reference features the same breadth and quality of coverage and clarity of presentation found in the original.
Author: Karl M Kadish
Publisher: World Scientific
ISBN: 9814401455
Category : Science
Languages : en
Pages : 780
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Book Description
A hands on reference guide for scientists working in the area of medicine, biology, chemistry, physics, materials science, sensor and biosensor, devices and nanotechnology. The first volume compiles topics from leading authors on medicinal and bio-related applications while the second volume covers topics ranging from materials and fundamental applications. In-depth and comprehensive coverage of topics combined with the perspectives for future research by the contributing authors. An invaluable reference source essential for both beginning and advanced researchers in the field.
