Fabrication and Measurement of Devices in Si/SiGe Nanomembranes

Fabrication and Measurement of Devices in Si/SiGe Nanomembranes PDF Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 111

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Book Description
Silicon/silicon-germanium (Si/SiGe) heterostructures are useful as hosts for gated quantum dots. The quality of the as-grown Si/SiGe heterostructure has a large impact on the final quality of the quantum dot as a qubit host. For many years, quantum dots have been fab- ricated on strain-graded heterostructures. Commonly used strain-graded heterostructures inevitably develop plastic defects that lead to interface roughness, crosshatch, and mosaic tilt. All of these factors are sources of disorder in Si/SiGe quantum electronics. In this dissertation, I report the fabrication of Hall bars and gated quantum dots on heterostruc- tures grown on fully elastically relaxed SiGe nanomembranes, rather than strain-graded heterostructures. I report measurements of Hall bars demonstrating the creation of two- dimensional electron gases in these structures. I report the fabrication procedures used to create pairs of Hall bars and quantum dots on individual membranes. In addition, I explain a general process flow for the creation of Si/SiGe quantum devices. I focus especially on an ion-implantation technique I implemented for the fabrication of Hall bars and quantum dots in Si/SiGe heterostructures without modulation doping layers.

Fabrication and Measurement of Devices in Si/SiGe Nanomembranes

Fabrication and Measurement of Devices in Si/SiGe Nanomembranes PDF Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 111

Get Book Here

Book Description
Silicon/silicon-germanium (Si/SiGe) heterostructures are useful as hosts for gated quantum dots. The quality of the as-grown Si/SiGe heterostructure has a large impact on the final quality of the quantum dot as a qubit host. For many years, quantum dots have been fab- ricated on strain-graded heterostructures. Commonly used strain-graded heterostructures inevitably develop plastic defects that lead to interface roughness, crosshatch, and mosaic tilt. All of these factors are sources of disorder in Si/SiGe quantum electronics. In this dissertation, I report the fabrication of Hall bars and gated quantum dots on heterostruc- tures grown on fully elastically relaxed SiGe nanomembranes, rather than strain-graded heterostructures. I report measurements of Hall bars demonstrating the creation of two- dimensional electron gases in these structures. I report the fabrication procedures used to create pairs of Hall bars and quantum dots on individual membranes. In addition, I explain a general process flow for the creation of Si/SiGe quantum devices. I focus especially on an ion-implantation technique I implemented for the fabrication of Hall bars and quantum dots in Si/SiGe heterostructures without modulation doping layers.

Silicon Nanomembranes

Silicon Nanomembranes PDF Author: John A. Rogers
Publisher: John Wiley & Sons
ISBN: 3527338314
Category : Technology & Engineering
Languages : en
Pages : 368

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Book Description
Edited by the leaders in the fi eld, with chapters from highly renowned international researchers, this is the fi rst coherent overview of the latest in silicon nanomembrane research. As such, it focuses on the fundamental and applied aspects of silicon nanomembranes, ranging from synthesis and manipulation to manufacturing, device integration and system level applications, including uses in bio-integrated electronics, three-dimensional integrated photonics, solar cells, and transient electronics. The first part describes in detail the fundamental physics and materials science involved, as well as synthetic approaches and assembly and manufacturing strategies, while the second covers the wide range of device applications and system level demonstrators already achieved, with examples taken from electronics and photonics and from biomedicine and energy.

Design and fabrication of heterostructure devices using epitaxial Si, SiGe and SiGeC layers

Design and fabrication of heterostructure devices using epitaxial Si, SiGe and SiGeC layers PDF Author: Sandeep Kesrimal Oswal
Publisher:
ISBN:
Category :
Languages : en
Pages : 118

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Book Description


Silicon-on-insulator Technology and Devices 13

Silicon-on-insulator Technology and Devices 13 PDF Author: George K. Celler
Publisher: The Electrochemical Society
ISBN: 1566775531
Category : Semiconductors
Languages : en
Pages : 409

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Book Description
This issue of ESC Transactions covers recent significant advances in SOI technologies. It will be of interest to materials and device scientists, as well as to process and applications oriented engineers. Several keynote papers introduce and review the main topics. This is followed by contributed papers covering the latest research and implementation results.

Functional and Smart Materials

Functional and Smart Materials PDF Author: Chander Prakash
Publisher: CRC Press
ISBN: 1000193152
Category : Technology & Engineering
Languages : en
Pages : 239

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Book Description
This book presents a comprehensive and broad-spectrum picture of the state-of-the-art research, development, and commercial prospective of various discoveries conducted in the real world of functional and smart materials. This book presents various synthesis and fabrication routes of function and smart materials for universal applications such as material science, mechanical engineering, manufacturing, metrology, nanotechnology, physics, biology, chemistry, civil engineering, and food science. The content of this book opens various scientific horizons proved to be beneficial for uplifting the standards of day-to-day practices in the biomedical domain. Myriad innovations in the materials science and engineering are transforming our everyday lives in extraordinary ways. This book captures the emerging areas of materials science and advanced manufacturing engineering and presents recent trends in research for researchers, field engineers, and academic professionals.

Nanobiomaterials

Nanobiomaterials PDF Author: Xiumei Wang
Publisher: John Wiley & Sons
ISBN: 3527698655
Category : Technology & Engineering
Languages : en
Pages : 566

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Book Description
Written by an international team of editors and contributors from renowned universities and institutes, this book addresses the latest research in the field of nanobiomaterials, covering nanotechnologies for their fabrication, developments in biomedical applications, and the challenges of biosafety in clinic uses. Clearly structured, the volume defines the scope and classification of the field, resulting in a broad overview from fundamental principles to current technological advances, and from materials synthesis to biomedical applications along with future trends.

Semiconductor Nanomaterials for Flexible Technologies

Semiconductor Nanomaterials for Flexible Technologies PDF Author: Yugang Sun
Publisher: William Andrew
ISBN: 1437778240
Category : Technology & Engineering
Languages : en
Pages : 320

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Book Description
This book is an overview of the strategies to generate high-quality films of one-dimensional semiconductor nanostructures on flexible substrates (e.g., plastics) and the use of them as building blocks to fabricating flexible devices (including electronics, optoelectronics, sensors, power systems). In addition to engineering aspects, the physics and chemistry behind the fabrication and device operation will also be discussed as well. Internationally recognized scientists from academia, national laboratories, and industries, who are the leading researchers in the emerging areas, are contributing exceptional chapters according to their cutting-edge research results and expertise. This book will be an on-time addition to the literature in nanoscience and engineering. It will be suitable for graduate students and researchers as a useful reference to stimulate their research interest as well as facilitate their research in nanoscience and engineering. Considers the physics and chemistry behind fabrication and device operation Discusses applications to electronics, optoelectronics, sensors and power systems Examines existing technologies and investigates emerging trends

Nanofabrication

Nanofabrication PDF Author: Maria Stepanova
Publisher: Springer Science & Business Media
ISBN: 3709104246
Category : Technology & Engineering
Languages : en
Pages : 344

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Book Description
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

Group IV Semiconductor Nanostructures - 2006: Volume 958

Group IV Semiconductor Nanostructures - 2006: Volume 958 PDF Author: Leonid Tsybeskov
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 336

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Book Description
This book focuses on advances in materials science and device applications of nanostructures composed of Si, Ge, diamond, SiGe and SiCGe. Continuous progress in the development of reproducibly grown quantum dots, wires and wells has produced a new class of functional materials and devices with characteristic dimensions less than 50nm. The broad spectrum of these devices ranges from commercially offered high-mobility transistors using strained Si to exploratory SiGe nanostructures for integrated optical interconnects and THz lasers. This book brings together researchers from chemistry, physics, biology, materials science and engineering to share and discuss both the challenges and progress towards a new generation of Si(SiGe, SiCGe)-based novel functional structures and devices. Topics include: light emission and photonic devices; Ge, SiGe and diamond nanostructures; strains, Si/Ge films and layers and Si nanocrystals.

Thermal Infrared Sensors

Thermal Infrared Sensors PDF Author: Helmut Budzier
Publisher: John Wiley & Sons
ISBN: 0470976756
Category : Technology & Engineering
Languages : en
Pages : 280

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Book Description
The problems involved in designing optimal infrared (IR) measuring systems under given conditions are commensurately complex. The optical set-up and radiation conditions, the interaction between sensor and irradiation and the sensor itself, determine the operation of the sensor system. Simple calculations for solving these problems without any understanding of the causal relationships are not possible. Thermal Infrared Sensors offers a concise explanation of the basic physical and photometric fundamentals needed for the consideration of these interactions. It depicts the basics of thermal IR sensor systems and explains the manifold causal relationships between the most important effects and influences, describing the relationships between sensor parameters such as thermal and special resolution, and application conditions. This book covers: various types of thermal sensors, like thermoelectric sensor, pyroelectric sensors, microbolometers, micro-Golay cells and bimorphous sensors; basic applications for thermal sensors; noise - a limiting factor for thermal resolution and detectivity - including an outline of the mathematics and noise sources in thermal infrared sensors; the properties of IR sensor systems in conjunction with the measurement environment and application conditions; 60 examples showing calculations of real problems with real numbers, as they occur in many practical applications. This is an essential reference for practicing design and optical engineers and users of infrared sensors and infrared cameras. With this book they will be able to transform the demonstrated solutions to their own problems, find ways to match their commercial IR sensors and cameras to their measurement conditions, and to tailor and optimise sensors and set-ups to particular IR measurement problems. The basic knowledge outlined in this book will give advanced undergraduate and graduate students a thorough grounding in this technology.