Extreme Ultraviolet (EUV) Holographic Metrology for Lithography Applications PDF Download
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Author: Sang-hun Yi
Publisher:
ISBN:
Category :
Languages : en
Pages : 332
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Book Description
Author: Sang-hun Yi
Publisher:
ISBN:
Category :
Languages : en
Pages : 332
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Book Description
Author:
Publisher:
ISBN:
Category : Electric engineering
Languages : en
Pages : 632
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Book Description
Author: Thomas Vincent Pistor
Publisher: Ann Arbor, Mich. : University Microfilms International
ISBN:
Category :
Languages : en
Pages : 360
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Book Description
Author:
Publisher:
ISBN:
Category : Dissertations, Academic
Languages : en
Pages : 850
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Book Description
Author: Ting-Chung Poon
Publisher: Springer Science & Business Media
ISBN: 0387313974
Category : Science
Languages : en
Pages : 435
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Book Description
Digital holography and its application to 3-D display is one of the formidable problems of evolving areas of high technology to receive great attention in recent years. This book offers a collection of key chapters that covers digital holography and 3-D display techniques to provide the state-of-the-art developments in these important areas. The book contains research material as well as reviews, new ideas and fresh insights.
Author: Robert K. Tyson
Publisher: CRC Press
ISBN: 1000531368
Category : Technology & Engineering
Languages : en
Pages : 606
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Book Description
Principles of Adaptive Optics describes the foundations, principles, and applications of adaptive optics (AO) and its enabling technologies. This leading textbook addresses the fundamentals of AO at the core of astronomy, high-energy lasers, biomedical imaging, and optical communications. Key Features: Numerous examples to explain and support the underlying principles Hundreds of new references to support the topics that are addressed End-of-chapter questions and exercises A complete system design example threaded through each chapter as new material is introduced
Author: Claude Phipps
Publisher: Springer Science & Business Media
ISBN: 0387304525
Category : Science
Languages : en
Pages : 598
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Book Description
Laser ablation describes the interaction of intense optical fields with matter, in which atoms are selectively driven off by thermal or nonthermal mechanisms. The field of laser ablation physics is advancing so rapidly that its principal results are seen only in specialized journals and conferences. This is the first book that combines the most recent results in this rapidly advancing field with authoritative treatment of laser ablation and its applications, including the physics of high-power laser-matter interaction. Many practical applications exist, ranging from inertial confinement fusion to propulsion of aerostats for pollution monitoring to laser ignition of hypersonic engines to laser cleaning nanoscale contaminants in high-volume computer hard drive manufacture to direct observation of the electronic or dissociative states in atoms and molecules, to studying the properties of materials during 200kbar shocks developed in 200fs. Selecting topics which are representative of such a broad field is difficult. Laser Ablation and its Applications emphasizes the wide range of these topics rather than - as is so often the case in advanced science – focusing on one specialty or discipline. The book is divided into four sections: theory and modeling, ultrafast interactions, material processing and laser-matter interaction in novel regimes. The latter range from MALDI to ICF, SNOM’s and femtosecond nanosurgery to laser space propulsion. The book arose from the SPIE series of High Power Laser Ablation Symposia which began in 1998. It is intended for a graduate course in laser interactions with plasmas and materials, but it should be accessible to anyone with a graduate degree in physics or engineering. It is also intended as a major reference work to familiarize scientists just entering the field with laser ablation and its applications.
Author:
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ISBN:
Category : Aeronautics
Languages : en
Pages : 538
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Book Description
Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.
Author: Chris Mack
Publisher: John Wiley & Sons
ISBN: 1119965071
Category : Technology & Engineering
Languages : en
Pages : 503
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Book Description
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
Author: Robert Erf
Publisher: Elsevier
ISBN: 0323149502
Category : Technology & Engineering
Languages : en
Pages : 461
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Book Description
Holographic Nondestructive Testing presents a unified discussion of the principles and methods of holography and its application holographic nondestructive testing. The book discusses in detail the basic theoretical concepts, the experimental methods for recording holograms, and different specialized holographic techniques. Several kinds of holography are discussed in the beginning chapters such as continuous-wave holography, pulsed holography, and interferometric holography. Other topics covered in the book are holographic surface contouring, holographic correlation, and holographic vibration analysis. Microwave and acoustical holography are the major areas of interest in Chapters 9 and 10. The text serves as an important reference to both engineers and optical scientists.
