Extended Abstracts. Laser Chemical Processing of Semiconductor Devices. Proceedings of Symposium B 1984 Fall Meeting of the Materials Research Society Held on 27-29 November 1984 at Boston, Massachusetts PDF Download
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Author: F. A. Houle
Publisher:
ISBN:
Category :
Languages : en
Pages : 127
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Book Description
The conference emphasized the following areas: Fundamental mechanisms, laser-assisted growth of semiconductor films, process diagnostics, metallization from thin films and gases, photochemical etching, fundamental processes, and dielectric photoformation. Keywords: Semiconductor devices; Laser diagnostics; Lasers; Metallization; Photochemical Etching; Dielectric Photoformation. (Author).
Author: F. A. Houle
Publisher:
ISBN:
Category :
Languages : en
Pages : 127
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Book Description
The conference emphasized the following areas: Fundamental mechanisms, laser-assisted growth of semiconductor films, process diagnostics, metallization from thin films and gases, photochemical etching, fundamental processes, and dielectric photoformation. Keywords: Semiconductor devices; Laser diagnostics; Lasers; Metallization; Photochemical Etching; Dielectric Photoformation. (Author).
Author: Materials Research Society. Meeting Symposium B.
Publisher:
ISBN:
Category : Lasers in chemistry
Languages : en
Pages : 136
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Author: F.A. Houle
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
Author: Materials Research Society. Meeting Symposium B.
Publisher:
ISBN:
Category : Lasers in chemistry
Languages : en
Pages : 150
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Author:
Publisher:
ISBN:
Category : Government reports announcements & index
Languages : en
Pages : 968
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Author: D. Bäuerle
Publisher: Springer Science & Business Media
ISBN: 3642823815
Category : Science
Languages : en
Pages : 561
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Book Description
Laser processing is now a rapidly increasing field with many real and potential applications in different areas of technology such as micromecha nics, metallurgy, integrated optics, and semiconductor device fabrication. The neces s ity for such soph i st i cated 1 i ght sources as 1 asers is based on the spatial coherence and the monochromaticity of laser light. The spatial coherence permits extreme focussing of the laser light resulting in the availability of high energy densities which can be used for strongly loca lized heat- and chemical-treatment of materials, with a resolution down to 1 ess than 1 lJIll. When us i ng pul sed or scanned cw-l asers, 1 oca 1 i zat i on in time is also possible. Additionally, the monochromaticity of laser light allows for control of the depth of heat treatment and/or selective, nonthermal bond breaking - within the surface of the material or within the molecules of the surrounding reactive atmosphere - simply by tuning the laser wavelength. These inherent advantages of laser light permit micromachining of materials (drilling, cutting, welding etc.) and also allow single-step controlled area processing of thin films and surfaces. Processes include structural transformation (removal of residual damage, grain growth in polycrystalline material, amorphization, surface hardening etc.), etching, doping, alloying, or deposition. In addition, laser processing is not 1 imited to planar substrates.
Author: Daniel J. Ehrlich
Publisher:
ISBN:
Category :
Languages : en
Pages : 763
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Author:
Publisher:
ISBN:
Category : Lasers in chemistry
Languages : en
Pages : 425
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Author: A. Wayne Johnson
Publisher:
ISBN:
Category :
Languages : en
Pages : 649
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Book Description
The Materials Research Society held their symposium 'Laser & Particle-Beam Chemical Processes on Surfaces' in Boston, Massachusetts on November 28 - December 3, 1988. Parts I thru X of this report discuss the following research topics: Overview of Laser- and Beam-Induced Surface Processes; Laser-Induced Deposition of Metal Films; Laser-Induced Writing of Metal Lines; Laser-Induced Deposition of Semiconductors; Laser-Induced Chemical Etching; Laser-Induced Surface Ablation; Laser-Induced Surface Modification; Ion-, Electron-, and Plasma-Assisted Chemistry; and Integrated Circuits Fabricated Technology. (JG).
Author: Jaydish Narayan
Publisher: North Holland
ISBN:
Category : Laser beams
Languages : en
Pages : 800
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