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Author: J. Michael Sherer
Publisher: CRC Press
ISBN: 1420027190
Category : Technology & Engineering
Languages : en
Pages : 214
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Book Description
Given the myriad exhaust compounds and the corresponding problems that they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, Semiconductor Industry: Wafer Fab Exhaust Management offers practical guidance on selecting an appropriate system for a given application. Using examples that provide a clear understanding of the concepts discussed, Sherer covers facility layout, support facilities operations, and semiconductor process equipment, followed by exhaust types and challenges. He reviews exhaust point-of-use devices and exhaust line requirements needed between process equipment and the centralized exhaust system. The book includes information on wet scrubbers for a centralized acid exhaust system and a centralized ammonia exhaust system and on centralized equipment to control volatile organic compounds. It concludes with a chapter devoted to emergency releases and a separate chapter of examples illustrating these systems in use. Drawing on the author's 20 years of industry experience, the book shows you how to customize strategies specific to your needs, solve current problems, and prevent future issues in your exhaust management systems.
Author: J. Michael Sherer
Publisher: CRC Press
ISBN: 1420027190
Category : Technology & Engineering
Languages : en
Pages : 214
Get Book Here
Book Description
Given the myriad exhaust compounds and the corresponding problems that they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, Semiconductor Industry: Wafer Fab Exhaust Management offers practical guidance on selecting an appropriate system for a given application. Using examples that provide a clear understanding of the concepts discussed, Sherer covers facility layout, support facilities operations, and semiconductor process equipment, followed by exhaust types and challenges. He reviews exhaust point-of-use devices and exhaust line requirements needed between process equipment and the centralized exhaust system. The book includes information on wet scrubbers for a centralized acid exhaust system and a centralized ammonia exhaust system and on centralized equipment to control volatile organic compounds. It concludes with a chapter devoted to emergency releases and a separate chapter of examples illustrating these systems in use. Drawing on the author's 20 years of industry experience, the book shows you how to customize strategies specific to your needs, solve current problems, and prevent future issues in your exhaust management systems.
Author: Charles Nehme
Publisher: Independently Published
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 0
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Book Description
In the dynamic world of semiconductor manufacturing, where precision meets innovation, the role of exhaust systems is often overlooked but crucial. These systems play a vital role in ensuring the safety of workers, protecting the environment, and maintaining the integrity of semiconductor production processes. From managing toxic gases in reactive ion etching to controlling fumes in general ventilation, each type of exhaust system is tailored to mitigate specific risks and optimize operational efficiency. This preface sets the stage for exploring the intricate network of exhaust systems within semiconductor plants. It delves into their functions, components, and significance, highlighting how these systems uphold stringent standards of safety, environmental stewardship, and operational excellence. By understanding their pivotal role, semiconductor professionals can appreciate the meticulous planning and engineering that underpin these critical infrastructure components.
Author: Charles Nehme
Publisher: Charles Nehme
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 30
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Book Description
HVAC stands for (Heating, Ventilation & Air Conditioning) This book is about HVAC applications of Semiconductor Plants & How they require large amounts of exhaust due to all the chemicals used in manufacturing silicon wafers. I will simplify this book as much as possible to be understood by non HVAC literate professionals or beginners in the HVAC industry. Charles Nehme is an HVAC Consultant with 30 years of international expertise and has accomplished and implemented many projects on different applications. keywords: hvac semiconductor hvac systems for semiconductor clean rooms Cleanroom semiconductor manufacturing semiconductor clean room standards semiconductor fabrication facility
Author: David G. Baldwin
Publisher: William Andrew
ISBN: 0815518978
Category : Science
Languages : en
Pages : 363
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Book Description
This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.
Author: Yoshio Nishi
Publisher: CRC Press
ISBN: 1420017667
Category : Technology & Engineering
Languages : en
Pages : 1720
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Book Description
Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
Author: William R. Acorn
Publisher: Elsevier
ISBN: 0080945899
Category : Technology & Engineering
Languages : en
Pages : 374
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Book Description
Facilities which utilize hazardous liquids and gases represent a significant potential liability to the owner, operator, and general public in terms of personnel safety and preservation of assets. It is obvious that a catastrophic incident or loss of property or personnel is to be avoided at all costs. This book was conceived to give the reader a guide to understanding the requirements of the various codes and regulations that apply to the design, construction, and operation of facilities utilizing hazardous materials in their processes.
Author: D. J. Burton
Publisher:
ISBN: 9781883992088
Category : Exhaust systems
Languages : en
Pages : 200
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Book Description
Author: United States. Congress. House. Committee on Science. Subcommittee on Technology
Publisher:
ISBN:
Category : Political Science
Languages : en
Pages : 192
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Book Description
Author: United States. Congress. House. Committee on Science
Publisher:
ISBN:
Category : Political Science
Languages : en
Pages : 876
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Book Description
Author: Karen K. Gleason
Publisher: John Wiley & Sons
ISBN: 3527337997
Category : Technology & Engineering
Languages : en
Pages : 484
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Book Description
The method of CVD (chemical vapor deposition) is a versatile technique to fabricate high-quality thin films and structured surfaces in the nanometer regime from the vapor phase. Already widely used for the deposition of inorganic materials in the semiconductor industry, CVD has become the method of choice in many applications to process polymers as well. This highly scalable technique allows for synthesizing high-purity, defect-free films and for systematically tuning their chemical, mechanical and physical properties. In addition, vapor phase processing is critical for the deposition of insoluble materials including fluoropolymers, electrically conductive polymers, and highly crosslinked organic networks. Furthermore, CVD enables the coating of substrates which would otherwise dissolve or swell upon exposure to solvents. The scope of the book encompasses CVD polymerization processes which directly translate the chemical mechanisms of traditional polymer synthesis and organic synthesis in homogeneous liquids into heterogeneous processes for the modification of solid surfaces. The book is structured into four parts, complemented by an introductory overview of the diverse process strategies for CVD of polymeric materials. The first part on the fundamentals of CVD polymers is followed by a detailed coverage of the materials chemistry of CVD polymers, including the main synthesis mechanisms and the resultant classes of materials. The third part focuses on the applications of these materials such as membrane modification and device fabrication. The final part discusses the potential for scale-up and commercialization of CVD polymers.
