Ellipsometry and Polarized Light PDF Download
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Author: R. M. A. Azzam
Publisher: North Holland
ISBN:
Category : Science
Languages : en
Pages : 570
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Book Description
Ellipsometry is a unique optical technique of great sensitivity for in situ non-destructive characterization of surface (inter-facial) phenomena (reactions) utilizing the change in the state of polarization of a light-wave probe. Although known for almost a century, the use of ellipsometry has increased rapidly in the last two decades. Among the most significant recent developments are new applications, novel and automated instrumentation and techniques for error-free data analysis. This book provides the necessary analytical and experimental tools needed for competent understanding and use of these developments. It is directed to those who are already working in the field and, more importantly, to the newcomer who would otherwise have to sift through several hundred published papers. The authors first present a comprehensive study of the different mathematical representations of polarized light and how such light is processed by optical systems, going on to show how these tools are applied to the analysis of ellipsometer systems. To relate ellipsometric measurements to surface properties, use is then made of electromagnetic theory. Experimental techniques and apparatus are described and the many interesting applications of ellipsometry to surface and thin-film phenomena are reviewed. This reference work is addressed to researchers and students with a strong interest in surface and thin-film physics and optics and their applications. It is a must for libraries in the fields of solid state physics, physical chemistry, electro-chemistry, metallurgy and optical engineering.
Author: R. M. A. Azzam
Publisher: North-Holland
ISBN:
Category : Science
Languages : en
Pages : 572
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Book Description
Ellipsometry is a unique optical technique of great sensitivity for in situ non-destructive characterization of surface (inter-facial) phenomena (reactions) utilizing the change in the state of polarization of a light-wave probe. Although known for almost a century, the use of ellipsometry has increased rapidly in the last two decades. Among the most significant recent developments are new applications, novel and automated instrumentation and techniques for error-free data analysis. This book provides the necessary analytical and experimental tools needed for competent understanding and use of these developments. It is directed to those who are already working in the field and, more importantly, to the newcomer who would otherwise have to sift through several hundred published papers. The authors first present a comprehensive study of the different mathematical representations of polarized light and how such light is processed by optical systems, going on to show how these tools are applied to the analysis of ellipsometer systems. To relate ellipsometric measurements to surface properties, use is then made of electromagnetic theory. Experimental techniques and apparatus are described and the many interesting applications of ellipsometry to surface and thin-film phenomena are reviewed. This reference work is addressed to researchers and students with a strong interest in surface and thin-film physics and optics and their applications. It is a must for libraries in the fields of solid state physics, physical chemistry, electro-chemistry, metallurgy and optical engineering.
Author: Rasheed M. A. Azzam
Publisher:
ISBN:
Category :
Languages : en
Pages : 529
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Book Description
Author: Dennis Goldstein
Publisher: CRC Press
ISBN: 9780203911587
Category : Technology & Engineering
Languages : en
Pages : 680
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Book Description
Polarized Light, Second Edition explores polarized light, its production, and its use, facilitating self-study without prior knowledge of Maxwell's equations. This comprehensive second edition includes more than 2500 thoroughly updated figures and equations for easier understanding and application across various industries. It features new chapters on polarization by refraction and reflection, polarization elements, anisotropic materials, Stokes polarimetry, Mueller matrix polarimetry, the mathematics of the Mueller matrix. This edition also offers updated and expanded material on the derivation of the Fresnel equations with plots of the magnitude and phase of the reflection coefficients.
Author: Rointan Framroze Bunshah
Publisher: William Andrew
ISBN: 0815513372
Category : Science
Languages : en
Pages : 888
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Book Description
This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.
Author: Harland Tompkins
Publisher: William Andrew
ISBN: 0815517475
Category : Science
Languages : en
Pages : 887
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Book Description
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
Author: Russell Chipman
Publisher: CRC Press
ISBN: 1498700578
Category : Science
Languages : en
Pages : 1037
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Book Description
Polarized Light and Optical Systems presents polarization optics for undergraduate and graduate students in a way which makes classroom teaching relevant to current issues in optical engineering. This curriculum has been developed and refined for a decade and a half at the University of Arizona’s College of Optical Sciences. Polarized Light and Optical Systems provides a reference for the optical engineer and optical designer in issues related to building polarimeters, designing displays, and polarization critical optical systems. The central theme of Polarized Light and Optical Systems is a unifying treatment of polarization elements as optical elements and optical elements as polarization elements. Key Features Comprehensive presentation of Jones calculus and Mueller calculus with tables and derivations of the Jones and Mueller matrices for polarization elements and polarization effects Classroom-appropriate presentations of polarization of birefringent materials, thin films, stress birefringence, crystal polarizers, liquid crystals, and gratings Discussion of the many forms of polarimeters, their trade-offs, data reduction methods, and polarization artifacts Exposition of the polarization ray tracing calculus to integrate polarization with ray tracing Explanation of the sources of polarization aberrations in optical systems and the functional forms of these polarization aberrations Problem sets to build students’ problem-solving capabilities.
Author: R. M. A. Azzam
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 754
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Book Description
Author: Harland G. Tompkins
Publisher: Academic Press
ISBN: 0323140009
Category : Science
Languages : en
Pages : 279
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Book Description
This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth. Allows the user to optimize turn-key operation of ellipsometers and move beyond limited turn-key applications Provides comprehensive discussion of the measurement of film thickness and optical constants in film Discusses the trajectories of the ellipsometric parameters Del and Psi and how changes in the materials affect the parameter Includes 14 case studies to reinforce specific applications Includes three appendices for helpful references
Author: Ranjan S. Muttiah
Publisher: Springer Science & Business Media
ISBN: 940171620X
Category : Science
Languages : en
Pages : 319
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Book Description
Remote sensing of the environment is covered through spectroscopic analysis of soil and vegetation response during active and passive sensing. Fundamental aspects of spectroscopic methods for environmental applications are given. Applications range from remote sensing of saline soils, soil moisture detection, landscape evolution, weed detection, fluorescence imaging, and use of vegetation indices to measure ecosystem variables such as plant stress.
Author: Alexei A. Maradudin
Publisher: Springer Science & Business Media
ISBN: 0387356592
Category : Science
Languages : en
Pages : 513
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Book Description
This book covers both experimental and theoretical aspects of nanoscale light scattering and surface roughness. Topics include: spherical particles located on a substrate; surface and buried interface roughness; surface roughness of polymer thin films; magnetic and thermal fluctuations at planar surfaces; speckle patterns; scattering of electromagnetic waves from a metal; multiple wavelength light scattering; nanoroughness standards.
