Device and Process Technologies for Microelectronics, MEMS, and Photonics IV PDF Download
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Languages : en
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Author:
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Languages : en
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Author: Jung-Chih Chiao
Publisher: Society of Photo Optical
ISBN: 9780819460684
Category : Science
Languages : en
Pages : 568
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Book Description
Includes Proceedings Vol. 7821
Author: Hark Hoe Tan
Publisher: Society of Photo Optical
ISBN: 9780819469717
Category : Technology & Engineering
Languages : en
Pages : 478
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Book Description
Includes Proceedings Vol. 7821
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Category :
Languages : en
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Category : Microelectromechanical systems
Languages : en
Pages : 574
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Book Description
Author: Anis Zribi
Publisher: Springer Science & Business Media
ISBN: 0387686096
Category : Technology & Engineering
Languages : en
Pages : 224
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Book Description
This book discusses advances in functional thin films for sensors and novel concepts for future breakthroughs. The focus is on guidelines and design rules for sensor systems, interaction between functional thin films and other sensor subsystems, fundamentals behind the intrinsic functionality in sensing thin films and nanostructures, state-of-the-art technologies used to develop sensors today and concrete examples of sensor designs.
Author: Ai-Qun Liu
Publisher: CRC Press
ISBN: 1420045717
Category : Technology & Engineering
Languages : en
Pages : 502
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Book Description
Photonic MEMS devices represent the next major breakthrough in the silicon revolution. While many quality resources exist on the optic and photonic aspect of device physics, today’s researchers are in need of a reference that goes beyond to include all aspects of engineering innovation. An extension on traditional design and analysis, Photonic MEMS Devices: Design, Fabrication, and Control describes a broad range of optical and photonic devices, from MEMS optical switches and bandgap crystal switches to optical variable attenuators (VOA) and injection locked tunable lasers. It deals rigorously with all these technologies at a fundamental level, systematically introducing critical nomenclature. Each chapter also provides analysis techniques, equations, and experimental results. The book focuses not only on traditional design analysis, but also provides extensive background on realistic simulation and fabrication processes. With a clear attention to experimental relevance, this book provides the fundamental knowledge needed to take the next-step in integrating photonic MEMS devices into commercial products and technology.
Author: Lukas Chrostowski
Publisher: Cambridge University Press
ISBN: 1316240894
Category : Technology & Engineering
Languages : en
Pages : 439
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Book Description
From design and simulation through to testing and fabrication, this hands-on introduction to silicon photonics engineering equips students with everything they need to begin creating foundry-ready designs. In-depth discussion of real-world issues and fabrication challenges ensures that students are fully equipped for careers in industry. Step-by-step tutorials, straightforward examples, and illustrative source code fragments guide students through every aspect of the design process, providing a practical framework for developing and refining key skills. Offering industry-ready expertise, the text supports existing PDKs for CMOS UV-lithography foundry services (OpSIS, ePIXfab, imec, LETI, IME and CMC) and the development of new kits for proprietary processes and clean-room based research. Accompanied by additional online resources to support students, this is the perfect learning package for senior undergraduate and graduate students studying silicon photonics design, and academic and industrial researchers involved in the development and manufacture of new silicon photonics systems.
Author: P. Rai-Choudhury
Publisher: SPIE Press
ISBN: 9780819437167
Category : Technology & Engineering
Languages : en
Pages : 544
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Book Description
The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
Author: Kevin Chau
Publisher: Society of Photo Optical
ISBN: 9780819434937
Category : Technology & Engineering
Languages : en
Pages : 394
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Book Description
This selection of papers on microelectromechanical systems (MEMS) and microelectronics explores the device and process technologies used in these disciplines.
