Containing Papers Presented at the European Materials Research Society 1992 Spring Meeting, Symposium C: Chemistry for Electronic Materials PDF Download
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Author:
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Category :
Languages : en
Pages : 206
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Author:
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ISBN:
Category :
Languages : en
Pages : 206
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Author: T. Hirai
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Category :
Languages : en
Pages : 296
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Author: T. Hirai
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Category :
Languages : en
Pages :
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Author: K.F. Jensen
Publisher: Elsevier
ISBN: 0444596909
Category : Science
Languages : en
Pages : 215
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The chemical aspects of materials processing used for electronic applications, e.g. Si, III-V compounds, superconductors, metallization materials, are covered in this volume. Significant recent advances have occurred in the development of new volatile precursors for the fabrication of III-V semiconductor and metal [Cu, W] films by OMCVD. Some fundamentally new and wide-ranging applications have been introduced in recent times. Experimental and modeling studies regarding deposition kinetics, operating conditions and transport as well as properties of films produced by PVD, CVD and PECVD are discussed. The thirty papers in this volume report on many other significant topics also. Research workers involved in these aspects of materials technology may find here some new perspectives with which to augment their projects.
Author: British Library. Document Supply Centre
Publisher:
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Category : Conference proceedings
Languages : en
Pages : 836
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Author:
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Category :
Languages : en
Pages : 394
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Author: European Materials Research Society. Spring Meeting. Symposium C: UV, Blue and Green Light Emission from Semi-Conductor Materials
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Category :
Languages : en
Pages : 309
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Author:
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Category :
Languages : en
Pages : 242
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Author: European Materials Research Society
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Category : Semiconductors
Languages : en
Pages : 301
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Author: European Materials Research Society. Spring Meeting. Symposium A: Defects in Silicon: Hydrogen
Publisher:
ISBN:
Category :
Languages : en
Pages : 190
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