Chemical Vapor Deposition of Refractory Metals and Ceramics: Volume 168 PDF Download

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Chemical Vapor Deposition of Refractory Metals and Ceramics: Volume 168

Chemical Vapor Deposition of Refractory Metals and Ceramics: Volume 168 PDF Author: Theodore M. Besmann
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 432

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Book Description
Papers originally presented at the symposium on [title] held in Boston, November/December 1989. The contributions are organized into six sections, covering fundamentals/modeling, diagnostics, process- microstructure relationships, microstructure-mechanical property relationships, novel/large-scale technologies, and metal-organic chemical vapor deposition. Acidic paper. Annotation copyrighted by Book News, Inc., Portland, OR