Advanced Laser Chemical Processing For Microelectronics and Integrated Optics PDF Download
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Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 23
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Book Description
This report summarizes a three-year research effort to explore advanced laser-chemical processing for microelectronics and integrated optics. The main goals of the work have been: (a) to develop techniques for fabrication of integrated optical devices in GaAs multilayer and quantum well structures, and (b) to explore new and novel techniques of advanced semiconductor processing for microelectronics and optoelectronics.
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 23
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Book Description
This report summarizes a three-year research effort to explore advanced laser-chemical processing for microelectronics and integrated optics. The main goals of the work have been: (a) to develop techniques for fabrication of integrated optical devices in GaAs multilayer and quantum well structures, and (b) to explore new and novel techniques of advanced semiconductor processing for microelectronics and optoelectronics.
Author: Dieter Bäuerle
Publisher: Springer Science & Business Media
ISBN: 3662025051
Category : Science
Languages : en
Pages : 253
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Book Description
Materials processing with lasers is a rapidly expanding field which is increasingly captivating the attention of scientists, engineers and manufacturers alike. The aspect of most interest to scientists is provided by the basic interaction mechanisms between the intense light of a laser and materials exposed to a chemically reactive or nonreactive surrounding medium. Engineers and manufacturers see in the laser a new tool which will not only make manufacturing cheaper, faster, cleaner and more accurate but which also opens up entirely new technologies and manufacturing methods that are simply not available using existing techniques. Actual and potential applications range from laser machining to laser-induced materials transformation, coating, patterning, etc. , opening up the prospect of exciting new processing methods for micromechanics, metallurgy, integrated optics, semiconductor manufacture and chemical engineering. This book concentrates on the new and interdisciplinary field of 1 aser-i nduced chemicaZ process i ng of materi als. The techni que permits maskless single-step deposition of thin films of metals, semiconductors or insulators with lateral dimensions ranging from a few tenths of a micrometer up to several centimeters. Moreover, materials removal or synthesis, or surface modifications, such as oxidation, nitridation, reduction, metallization and doping, are also possible within similar dimensions. This book is meant as an introduction. It attempts to cater for the very broad range of specific interests which different groups of readers will have, and this thinking underlies the way in which the material has been arranged.
Author: K. G. Ibbs
Publisher:
ISBN: 9780521322546
Category : Technology & Engineering
Languages : en
Pages : 172
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Book Description
Nine expert contributors describe the application of laser processing techniques in the fabrication of semiconductor materials & devices for the microelectronics industry. This book comprises a carefully edited collection of specially written reviews by leading figures in all aspects of this important area of high technology. This subject matter should interest anyone involved with a semiconductor fabrication facility or a development laboratory with an interest in modern advances in processing technology, especially those people working in the larger electrical & electronics companies. In addition, it will be of value to university groups in engineering & physics departments involved in laser processing of materials, & of subsidiary interest to microfilm technologists working in optics fabrication.
Author: Dieter Bauerle
Publisher:
ISBN: 9783662025062
Category :
Languages : en
Pages : 256
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Book Description
Author: Dieter Bäuerle
Publisher: Springer Science & Business Media
ISBN: 3662040743
Category : Science
Languages : en
Pages : 788
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Book Description
Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser-matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid, and solid-solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. This third edition has been revised and enlarged to cover new topics such as the synthesis of nanoclusters and nanocrystalline films, ultrashort-pulse laser processing, laser polishing, cleaning, and lithography. Graduate students, physicists, chemists, engineers, and manufacturers alike will find this book an invaluable reference work on laser processing.
Author:
Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 704
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Book Description
Author: George Victor Treyz
Publisher:
ISBN:
Category :
Languages : en
Pages : 432
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Book Description
Author: Charles Blain
Publisher: Nova Publishers
ISBN: 9781590332252
Category : Technology & Engineering
Languages : en
Pages : 214
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Book Description
Developments in lasers continue to enable progress in many areas such as eye surgery, the recording industry and dozens of others. This book presents citations from the book literature for the last 25 years and groups them for ease of access which is also provided by subject, author and titles indexes.
Author: I.W. Boyd
Publisher: Elsevier
ISBN: 0444596658
Category : Science
Languages : en
Pages : 482
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Book Description
This volume discusses both the practical and theoretical aspects of energy beam materials processing. It highlights the recent advances in the use of beams and incoherent light sources to enhance or modify chemical processes at solid surfaces. Special attention is given to the latest developments in the use of ion, electron and photon beams, and on laser-assisted process chemistry. Thin film and surface and interface reactions as well as bulk phase transformations are discussed. Practical technological details and the criteria for present and future applications are also reviewed. The papers collected in this volume reflect the continuing strong interest and variety of development in this field.
Author: Dieter W. Bäuerle
Publisher: Springer
ISBN: 9783662040751
Category : Technology & Engineering
Languages : en
Pages : 788
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Book Description
Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser-matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid, and solid-solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. This third edition has been revised and enlarged to cover new topics such as the synthesis of nanoclusters and nanocrystalline films, ultrashort-pulse laser processing, laser polishing, cleaning, and lithography. Graduate students, physicists, chemists, engineers, and manufacturers alike will find this book an invaluable reference work on laser processing.
