Advanced Interconnects and Contact Materials and Processes for Future Integrated Circuits: Volume 514 PDF Download
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Author: S. P. Murarka
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 596
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Book Description
Comprising the proceedings of an MRS symposium held in April of 1998, contributions in this volume are divided into ten sections: interconnection frontiers; aluminum interconnects; cobalt and other silicides; titanium silicide; MOSFET, source, drain, and interconnect engineering; copper interconnects and barriers; a poster session on advanced interconnects and contacts; contacts to compound semiconductor devices; novel interconnect materials and schemes; and diffusion barriers. Annotation copyrighted by Book News, Inc., Portland, OR
Author: S. P. Murarka
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 596
Get Book Here
Book Description
Comprising the proceedings of an MRS symposium held in April of 1998, contributions in this volume are divided into ten sections: interconnection frontiers; aluminum interconnects; cobalt and other silicides; titanium silicide; MOSFET, source, drain, and interconnect engineering; copper interconnects and barriers; a poster session on advanced interconnects and contacts; contacts to compound semiconductor devices; novel interconnect materials and schemes; and diffusion barriers. Annotation copyrighted by Book News, Inc., Portland, OR
Author: Daniel C. Edelstein
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 606
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: Electrochemical Society. Dielectric Science and Technology Division
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 290
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Book Description
Author: M. Matlosz
Publisher: The Electrochemical Society
ISBN: 9781566772563
Category : Technology & Engineering
Languages : en
Pages : 456
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Book Description
Author:
Publisher:
ISBN:
Category : Electroluminescent devices
Languages : en
Pages : 1074
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Author:
Publisher:
ISBN:
Category : Ions
Languages : en
Pages : 752
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Author:
Publisher:
ISBN:
Category : Catalysts
Languages : en
Pages : 296
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Book Description
Author: Richard Vinci
Publisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 576
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: Duane Dimos
Publisher: Mrs Proceedings
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 200
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: Easo P. George
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 864
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
