Author: W. Lindinger
Publisher: Springer Science & Business Media
ISBN: 3709187737
Category : Science
Languages : en
Pages : 319
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Book Description
Our understanding of elementary processes in plasmas has been increasing dramatically over the last few years. The development of various swarm techniques, such as the temperature variable selected ion flow tube or the selected ion flow drift tube, has provided the prerequisite for detailed investigations into ion molecule reactions both in binary and three body collisions, and the mechanisms of many reactions are now understood quite satisfactorily. This information could not have been obtained without a detailed knowledge of the transport phenomena involved. Some of these, such as the internal-energy distribution of drifting ions, have only very recently been tackled both theoretically and experimentally; a consistent model is now being developed. As the interactions between the various branches of swarm research have become more and more intense, the most obvious thing to do was putting together a review on the present state of this subject, which is the aim of this book.
Author: Loucas G. Christophorou
Publisher: Springer Science & Business Media
ISBN: 1441989714
Category : Science
Languages : en
Pages : 791
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Book Description
This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro vides an up-to-date and comprehensive account of the fundamental in teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided. This fundamental knowledge has been obtained by us over the last eight years through a critical review and comprehensive assessment of "all" available data on low-energy electron collisions with plasma processing gases which we conducted at the National Institute of Standards and Technology (NIST). Data from this work were originally published in the Journal of Physical and Chemical Reference Data, and have been updated and expanded here. The fundamental electron-molecule interaction processes are discussed in Chapter 1. The cross sections and rate coefficients most often used to describe these interactions are defined in Chapter 2, where some recent advances in the methods employed for their measurement or calculation are outlined. The methodology we adopted for the critical evaluation, synthesis, and assessment of the existing data is described in Chapter 3. The critically assessed data and recommended or suggested cross sections and rate and transport coefficients for ten plasma etching gases are presented and discussed in Chapters 4, 5, and 6.
Author: U.S. Atomic Energy Commission. Division of Plans and Reports
Publisher:
ISBN:
Category : Nuclear energy
Languages : en
Pages : 392
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Book Description
Author:
Publisher:
ISBN:
Category : Nuclear energy
Languages : en
Pages : 1146
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Book Description
Author:
Publisher:
ISBN:
Category : Power resources
Languages : en
Pages : 980
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Book Description
Author:
Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 320
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Book Description
Author: Oak Ridge National Laboratory
Publisher:
ISBN:
Category : Nuclear energy
Languages : en
Pages : 476
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Book Description
Author:
Publisher:
ISBN:
Category : Energy development
Languages : en
Pages : 540
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Book Description
Author:
Publisher:
ISBN:
Category : Power resources
Languages : en
Pages : 510
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Book Description
Author: Fabio Sauli
Publisher: Cambridge University Press
ISBN: 1107043018
Category : Science
Languages : en
Pages : 513
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Book Description
Describes the fundamentals and applications of gaseous radiation detection, ideal for researchers and experimentalists in nuclear and particle physics.
