2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) PDF Author: IEEE Staff
Publisher:
ISBN: 9781665409124
Category :
Languages : en
Pages :

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Book Description
The major areas of activity in the development of MEMS and NEMS solicited and expected at this conference include but are not limited to materials, design, simulation, fabrication, assembly, packaging, experimental verification and analysis of micro and nanocomponents