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Author: Rainer Behrisch
Publisher: Springer Science & Business Media
ISBN: 3540445021
Category : Technology & Engineering
Languages : en
Pages : 527
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Book Description
This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.
Author: Rainer Behrisch
Publisher: Springer Science & Business Media
ISBN: 3540445021
Category : Technology & Engineering
Languages : en
Pages : 527
Get Book Here
Book Description
This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.
Author: Rainer Behrisch
Publisher: Springer
ISBN: 9783540534280
Category : Science
Languages : en
Pages : 440
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Book Description
Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering.
Author: Rainer Behrisch
Publisher: Springer Science & Business Media
ISBN: 3540445005
Category : Technology & Engineering
Languages : en
Pages : 527
Get Book Here
Book Description
This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.
Author:
Publisher:
ISBN: 9780387125930
Category :
Languages : en
Pages :
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Book Description
Author: Rainer Behrisch
Publisher: Springer
ISBN: 9783662311042
Category : Science
Languages : en
Pages : 415
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Book Description
Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering.
Author: Rainer Behrisch
Publisher:
ISBN:
Category : Sputtering (Physics)
Languages : en
Pages : 410
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Book Description
Author: R. Behrisch
Publisher: Springer
ISBN: 9783662308882
Category : Science
Languages : en
Pages : 284
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Book Description
With contributions by numerous experts
Author: R. Behrisch
Publisher: Springer
ISBN: 9783540105213
Category : Science
Languages : en
Pages : 304
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Book Description
With contributions by numerous experts
Author: Diederik Depla
Publisher: Springer Science & Business Media
ISBN: 3540766642
Category : Technology & Engineering
Languages : en
Pages : 584
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Book Description
In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.
Author: R. Behrisch
Publisher: Springer
ISBN: 9783540125938
Category : Science
Languages : en
Pages : 412
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Book Description
With contributions by numerous experts
