Semiconductor cleaning technology 1989 PDF Download
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Author: Jerzy Ruzyllo
Publisher:
ISBN:
Category :
Languages : en
Pages : 399
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Book Description
Author: Jerzy Ruzyllo
Publisher:
ISBN:
Category :
Languages : en
Pages : 399
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Book Description
Author: Electrochemical Society. Dielectrics and Insulation Division
Publisher:
ISBN:
Category : Semiconductor wafers
Languages : en
Pages : 399
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Book Description
Author: Richard E. Novak
Publisher:
ISBN:
Category :
Languages : en
Pages : 399
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Book Description
Author:
Publisher: The Electrochemical Society
ISBN: 9781566772594
Category : Technology & Engineering
Languages : en
Pages : 636
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Book Description
Author: Electrochemical Society
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
Author: Takeshi Hattori
Publisher: The Electrochemical Society
ISBN: 156677568X
Category : Microelectronics
Languages : en
Pages : 497
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Book Description
This issue covers topics related to the removal of contaminants from and conditioning of Si (SOI), SiC, Ge, SiGe, and III-V semiconductor surfaces; cleaning media, including non-aqueous cleaning methods and tools; front- and back-end cleaning operations; integrated cleaning; cleaning of MEMS; photomasks (reticles); porous low-k dielectrics; post-CMP cleaning; wafer bevel cleaning and polishing; characterization, evaluation, and monitoring of cleaning; correlation with device performance as well as cleaning of equipment and storage and handling hardware. The hardcover edition includes a bonus CD-ROM of Cleaning Technology in Semiconductor Device Manufacturing 1989?2007: Proceedings from the ECS Semiconductor Cleaning Symposia 1?10. This bonus material is not available with the PDF edition.
Author: Jerzy Rużyłło
Publisher: The Electrochemical Society
ISBN: 9781566774116
Category : Technology & Engineering
Languages : en
Pages : 452
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Book Description
Author: Jerzy Rużyłło
Publisher: The Electrochemical Society
ISBN: 9781566771887
Category : Technology & Engineering
Languages : en
Pages : 668
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Book Description
Author: Vikram J. Kapoor
Publisher: The Electrochemical Society
ISBN: 9781566770484
Category : Science
Languages : en
Pages : 644
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Book Description
Author: Werner Kern
Publisher: William Andrew
ISBN:
Category : Science
Languages : en
Pages : 654
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Book Description
Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.
