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Author: Victor M. Bright
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 654
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Book Description
A selection of 81 papers on six major topics within the field of optical microelectromechanical systems (MEMS).
Author: Victor M. Bright
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 654
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Book Description
A selection of 81 papers on six major topics within the field of optical microelectromechanical systems (MEMS).
Author: Huikai Xie
Publisher: MDPI
ISBN: 3039213032
Category : Technology & Engineering
Languages : en
Pages : 176
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Book Description
This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines
Author: Francis T. S. Yu
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Computers
Languages : en
Pages : 668
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Book Description
SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.
Author: Mohammad S. Alam
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Computers
Languages : en
Pages : 672
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Book Description
SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.
Author: Paweł Knapkiewicz
Publisher: MDPI
ISBN: 3039435795
Category : Technology & Engineering
Languages : en
Pages : 74
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Book Description
As users, we require more and more reliable and longer operation of electronic devices. Most often, the efforts of scientists and engineers related to energy management, energy conversion, and energy storage are overlooked. The PowerMEMS slogan in its meaning hides the science of materials enabling the construction of modern accumulators and batteries, so important for the developing consumer electronics and electromobility; energy harvesters used wherever conventional power sources cannot be used; and finally the methods and algorithms of energy processing and management that increase the efficiency of the devices they operate. This Special Issue contains six research papers selected from those presented at the 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Power MEMS 2019), as and representative of all papers presented during the Conference.
Author: Jan Korvink
Publisher: Springer Science & Business Media
ISBN: 3540336559
Category : Technology & Engineering
Languages : en
Pages : 981
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Book Description
A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.
Author: Markku Tilli
Publisher: Elsevier
ISBN: 0815519885
Category : Technology & Engineering
Languages : en
Pages : 670
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Book Description
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures
Author: Sing H. Lee
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Computers
Languages : en
Pages : 744
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Book Description
SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.
Author: Olaf Minet
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Medical
Languages : en
Pages : 746
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Book Description
SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.
Author: Jeffrey H. Hunt
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Nonlinear optical spectroscopy
Languages : en
Pages : 708
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Book Description
SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.
