Run-to-Run Control in Semiconductor Manufacturing PDF Download

Are you looking for read ebook online? Search for your book and save it on your Kindle device, PC, phones or tablets. Download Run-to-Run Control in Semiconductor Manufacturing PDF full book. Access full book title Run-to-Run Control in Semiconductor Manufacturing by James Moyne. Download full books in PDF and EPUB format.

Run-to-Run Control in Semiconductor Manufacturing

Run-to-Run Control in Semiconductor Manufacturing PDF Author: James Moyne
Publisher: CRC Press
ISBN: 1420040669
Category : Technology & Engineering
Languages : en
Pages : 368

Get Book

Book Description
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.