Proceedings of the Symposium on Electromigration of Metals and First International Symposium on Multilevel Metallization and Packaging PDF Download
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Author: James R. Lloyd
Publisher:
ISBN:
Category : Electrodiffusion
Languages : en
Pages : 214
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Book Description
Author: James R. Lloyd
Publisher:
ISBN:
Category : Electrodiffusion
Languages : en
Pages : 214
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Book Description
Author: Toivo T. Kodas
Publisher: John Wiley & Sons
ISBN: 3527615849
Category : Technology & Engineering
Languages : en
Pages : 562
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Book Description
High purity, thin metal coatings have a variety of important commercial applications, for example, in the microelectronics industry, as catalysts, as protective and decorative coatings as well as in gas-diffusion barriers. This book offers detailed, up- to-date coverage of the chemistry behind the vapor deposition of different metals from organometallic precursors. In nine chapters, the CVD of metals including aluminum, tungsten, gold, silver, platinum, palladium, nickel, as well as copper from copper(I) and copper(II) compounds is covered. The synthesis and properties of the precursors, the growth process, morphology, quality and adhesion of the resulting films as well as laser- assisted, ion- assisted and plasma-assisted methods are discussed. Present applications and prospects for future developments are summarized. With ca. 1000 references and a glossary, this book is a unique source of in-depth information. It is indispensable for chemists, physicists, engineers and materials scientists working with metal- coating processes and technologies. From Reviews: 'I highly recommend this book to anyone interested in learning more about the chemistry of metal CVD.' J. Am Chem. Soc.
Author: American Society of Mechanical Engineers. Applied Mechanics Division
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 244
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Author:
Publisher:
ISBN:
Category : Electrical engineering
Languages : en
Pages : 550
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Book Description
Author:
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 806
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Author: J. L. de Segovia
Publisher:
ISBN:
Category : Fusion reactors
Languages : en
Pages : 752
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Author:
Publisher:
ISBN:
Category : Hybrid integrated circuits
Languages : en
Pages : 518
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Book Description
Author:
Publisher:
ISBN:
Category : Electrical engineering
Languages : en
Pages : 2304
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Author:
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 544
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Author: Institute of Electrical and Electronics Engineers
Publisher:
ISBN:
Category : Electric engineering
Languages : en
Pages : 870
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Book Description
Issues for 1973- cover the entire IEEE technical literature.
