Printable Thin-film Sol-gel Lead Zirconate Titanate (PZT) Deposition Using NanoJet and Inket Printing Methods PDF Download
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Author: Amanda R. Marotta
Publisher:
ISBN:
Category : Ink-jet printing
Languages : en
Pages : 69
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Book Description
"Lead zirconate titanate (PZT) sub-5μm thin-films deposited using NanoJet and inkjet printing techniques will be presented. PZT, a perovskite ferroelectric ceramic, possesses both electrical and mechanical properties making it well suited for sensor and actuator applications. Large-scale and additive manufacturing of PZT deposition is currently unobtainable. A novel PZT sol-gel, therefore, comprised of an alkoxide mixture, was adapted for printing. Polyethylene glycol (PEG, 200MW) was discovered to be a superior film forming aid to the PZT sol-gel composite. PEG was added to the PZT composite to prevent film cracking upon gelation and thermal sintering. A powder-based sample of the PZT sol-gel was characterized using Scanning Electron Microscopy-Energy Dispersive X-Ray Spectroscopy (SEM-EDS), and Raman Spectroscopy. The Raman spectra displayed wavelength peaks around 200cm-1, 400cm-1, and 800cm-1 which indicated the desired 52/48 PZT molar ratio composite. The PZT sol-gel was printed into a thin-film using NanoJet and inkjet printing onto a cleaned stainless-steel substrate. The thin-film was thermally sintered at 700oC, and quenched in liquid nitrogen, to produce a defect-free thick film. The sub-five micron thick PZT films exhibited ferroelectric properties. This work begins to show a forward pathway for the larger scale manufacturing of device applications, such as concussion sensors, pressure sensors, and aerospace products."--Abstract.
Author: Amanda R. Marotta
Publisher:
ISBN:
Category : Ink-jet printing
Languages : en
Pages : 69
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Book Description
"Lead zirconate titanate (PZT) sub-5μm thin-films deposited using NanoJet and inkjet printing techniques will be presented. PZT, a perovskite ferroelectric ceramic, possesses both electrical and mechanical properties making it well suited for sensor and actuator applications. Large-scale and additive manufacturing of PZT deposition is currently unobtainable. A novel PZT sol-gel, therefore, comprised of an alkoxide mixture, was adapted for printing. Polyethylene glycol (PEG, 200MW) was discovered to be a superior film forming aid to the PZT sol-gel composite. PEG was added to the PZT composite to prevent film cracking upon gelation and thermal sintering. A powder-based sample of the PZT sol-gel was characterized using Scanning Electron Microscopy-Energy Dispersive X-Ray Spectroscopy (SEM-EDS), and Raman Spectroscopy. The Raman spectra displayed wavelength peaks around 200cm-1, 400cm-1, and 800cm-1 which indicated the desired 52/48 PZT molar ratio composite. The PZT sol-gel was printed into a thin-film using NanoJet and inkjet printing onto a cleaned stainless-steel substrate. The thin-film was thermally sintered at 700oC, and quenched in liquid nitrogen, to produce a defect-free thick film. The sub-five micron thick PZT films exhibited ferroelectric properties. This work begins to show a forward pathway for the larger scale manufacturing of device applications, such as concussion sensors, pressure sensors, and aerospace products."--Abstract.
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 6
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Book Description
In fabricating lead zirconate titanate (PZT) films for nonvolatile memories and decoupling capacitors, various deposition methods have been investigated. Each can produce films with acceptable dielectric and ferroelectric properties, but sol-gel methods offer excellent control of film stoichiometry and coating uniformity. The sol-gel approaches for PZT film fabrication fall into two categories: processes that use 2-methoxyethanol as a solvent, and processes that use chelating agents, such as acetic acid, for reducing the hydrolysis sensitivity of the alkoxide compounds. Due to concerns about the toxicity of 2-methoxyethanol, we have concentrated on the second category. It was found that, in addition to reducing the hydrolysis sensitivity, the chelating agents serves to define the processing behavior of the films: film consolidation after deposition and densification and crystallization during heat treatment. This paper discusses the relations between precursor structure (reactions between chelating agents and the metal alkoxide starting reagents) and film consolidation, densification, and crystallization.
Author: Mark Daniel Losego
Publisher:
ISBN:
Category :
Languages : en
Pages : 152
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Book Description
Keywords: ferroelectrics, CSD, sol-gel, embedded passives, PZT, thin film, piezoelectric.
Author: Annabel Susan Nickles
Publisher:
ISBN:
Category :
Languages : en
Pages : 418
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Book Description
Author: Brek J. Meuris
Publisher:
ISBN:
Category : Thin films
Languages : en
Pages : 58
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Book Description
Lead Zirconate Titanate (PZT), known for its ferroelectric properties, is widely used in micro-electromechanical (MEMS) and nano-electromechanical (NEMS) devices. PZT is a ceramic material that is most commonly found in its sol gel form, which allows for a relatively simple and cost-effective means of deposition and device fabrication. The material properties of PZT have been subject to significant research; however, the material properties of PZT sol gels remain largely unknown. In an effort to further understand thermal strain development, a combination of thermal loading and digital image correlation (DIC) were used to analyze the mechanical response of PZT sol gel films. Additionally, current numerical models are lacking the effects of film adhesion on film failure; therefore, the thermal strain development was analyzed for both well and poorly adhered films. To promote poor adhesion, PZT sol gel films were deposited on a hydrophobic self-assembling monolayer (SAM) and analyzed. Results indicate that a change in mechanical and optical properties of PZT thin films occurs from 200°C to 225°C. The peak strain associated with this point is approximately 61.4% greater in 12-layer films than 3-layer films. Sub-cracking of PZT films occurs after island formed during initial film failure experience an area reduction over 30%. The peak thermal strain development in well adhered 3-layer films is approximately 41.2% greater than poorly adhered films, indicating that adhesion largely dictates film failure. The 3-layer and 12-layer poorly adhered films fail at temperatures within 2% percent of each other despite varying surface strain fields, indicating the strain magnitude at the interface drives film failure.
Author: Cheng-Chen Hsueh
Publisher:
ISBN:
Category :
Languages : en
Pages : 296
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Author: Stephen Bathurst
Publisher:
ISBN:
Category :
Languages : en
Pages : 113
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Book Description
Of the readily available piezoelectric engineering materials perovskite phase lead zirconate titanate (PZT) has the strongest mechanical to electrical coupling. PZT based devices have the potential to have the highest performance. Due to the strong piezoelectric response and low operating voltage, many groups have worked to integrate thin film PZT into a wide range of microelectromechanical systems (MEMS) devices including: actuators, energy harvesters, resonators, pressure sensors, pumps, nano-positioning stages, and MEMS switches. However, processing of thin film PZT is not readily compatible with existing MEMS fabrication processes and significant design constraints exist when integrating thin film PZT. In recent years drop-on-demand (DOD) printing has been studied as a robust, flexible, and inexpensive method of material deposition for MEMS. Direct printing enables the designer to deposit a film based on a digital pattern file only eliminating the need for photolithography and subsequent etching steps in the manufacturing process flow. There is a significant cost savings due to a reduction in the material consumption during manufacturing and in chemical waste produced. The result is a manufacturing process that is cleaner and cheaper than other common deposition techniques. The most compelling benefit of direct printing of PZT is that it provides a freedom of geometry that eliminates many of the design constraints currently associated with PZT MEMS. Since high quality thin films can be achieved with deposition control that is not possible with spin coating, novel functionalities can be incorporated into PZT MEMS. Specifically, PZT printing is able to deposit material over and around large out-of-plane features. In addition, the thickness of thin film PZT can vary deterministically across a device or across a wafer. A new manufacturing method for the deposition of PZT thin films based on ink jet printing has been developed and used to fabricate a piezoelectric micromachined ultrasonic transducer. A solvent system and processes parameters were established that enable the deposition of high quality PZT thin films. Substrate temperature and drop spacing for uniform deposition were determined and both multilayer and single layer PZT films were successfully deposited. Alignment within 10[mu]m and a resolution limit of 30[mu]m were demonstrated. The performance of a printed PZT based ultrasonic transducer was fit to established models to determine piezoelectric coupling and dielectric properties. The piezoelectric coupling coefficient, d31, for printed PZT was between -75pC/N and -95pC/N. Impedance data at 1kHz provided the relative permittivity (750-890) and the dielectric loss tangent (2.4%-2.8%). The final printing process enabled the first digital deposition of thin film PZT and the printed PZT based pMUT confirmed the properties of the film are within the range required for a high performance piezoelectric MEMS devices.
Author: Taweesak Sudyoadsuk
Publisher:
ISBN: 9789746642118
Category : Ferroelectric thin films
Languages : en
Pages : 148
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Book Description
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 18
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Book Description
This report summarizes the effort to use modifications to a lead zirconate titanate (PZT) chemical solution process to create high performance ferroelectric, dielectric, and piezoelectric thin films with reduced film thicknesses.
Author: Stephen Bathurst
Publisher:
ISBN:
Category :
Languages : en
Pages : 114
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Book Description
Thus far, use of lead zirconate titanate (PZT) in MEMS has been limited due to the lack of process compatibility with existing MEMS manufacturing techniques. Direct printing of thin films eliminates the need for photolithographic patterning and etching, as well as allows for controlled deposition over non-planar topographies which cannot be accomplished with conventional spin coating processes. This thesis reports the optimal conditions of deposition and crystallization for high dielectric quality PZT thin films via thermal ink jet printing. Included are details of the solution chemistry developed, printing conditions required for MEMS quality films, and thermal processing parameters that enable a strong piezoelectric response.
