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Author: Wei Gao
Publisher: Springer Science & Business Media
ISBN: 1849962545
Category : Technology & Engineering
Languages : en
Pages : 358
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Book Description
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.
Author: Wei Gao
Publisher: Springer Science & Business Media
ISBN: 1849962545
Category : Technology & Engineering
Languages : en
Pages : 358
Get Book Here
Book Description
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.
Author: Richard Leach
Publisher: William Andrew
ISBN: 1437778321
Category : Technology & Engineering
Languages : en
Pages : 349
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Book Description
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. - Provides a basic introduction to measurement and instruments - Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force - Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) - Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) - Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
Author: Richard Leach
Publisher: Elsevier
ISBN: 1455777501
Category : Science
Languages : en
Pages : 384
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Book Description
Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques. The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology. - Demystifies nanometrology for a wide audience of engineers, scientists, and students involved in nanotech and advanced manufacturing applications and research - Introduces metrologists to the specific techniques and equipment involved in measuring at the nano-scale or to nano-scale uncertainty - Fully updated to cover the latest technological developments, standards, and regulations
Author: Kuang-Chao Fan
Publisher: MDPI
ISBN: 3039217127
Category : Science
Languages : en
Pages : 596
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Book Description
This collection represents successful invited submissions from the papers presented at the 8th Annual Conference of Energy Economics and Management held in Beijing, China, 22–24 September 2017. With over 500 participants, the conference was co-hosted by the Management Science Department of National Natural Science Foundation of China, the Chinese Society of Energy Economics and Management, and Renmin University of China on the subject area of “Energy Transition of China: Opportunities and Challenges”. The major strategies to transform the energy system of China to a sustainable model include energy/economic structure adjustment, resource conservation, and technology innovation. Accordingly, the conference and its associated publications encourage research to address the major issues faced in supporting the energy transition of China. Papers published in this collection cover the broad spectrum of energy economics issues, including building energy efficiency, industrial energy demand, public policies to promote new energy technologies, power system control technology, emission reduction policies in energy-intensive industries, emission measurements of cities, energy price movement, and the impact of new energy vehicle.
Author: David J. Whitehouse
Publisher: Taylor & Francis
ISBN: 1351442074
Category : Science
Languages : en
Pages : 1015
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Book Description
Written by the leading authority in the subject, Handbook of Surface Metrology covers every conceivable aspect of measuring and characterizing a surface. Focusing both on theory and practice, the book provides useful guidelines for the design of precision instruments and presents data on the functional importance of surfaces. It also clearly explains the essential theory relevant to surface metrology. The book defines most terms and parameters according to national and international standards. Many examples and illustrations are drawn from the esteemed author's large fund of groundbreaking research work. This unparalleled, all-encompassing "metrology bible" is beneficial for engineering postgraduate students and researchers involved in tribology, instrumentation, data processing, and metrology.
Author: Wei Gao
Publisher: Elsevier
ISBN: 0128178515
Category : Technology & Engineering
Languages : en
Pages : 452
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Book Description
Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. - Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology - Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components - Assesses the best techniques for repairing micro-defects
Author: Wei Gao
Publisher: Walter de Gruyter GmbH & Co KG
ISBN: 3110542366
Category : Technology & Engineering
Languages : en
Pages : 655
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Book Description
This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields. • Introduces fundamental theories and techniques • Combines theories with practical applications • Presents technologies in an easy-to-understand way
Author: Richard Leach
Publisher: CRC Press
ISBN: 0429887442
Category : Technology & Engineering
Languages : en
Pages : 676
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Book Description
Advances in engineering precision have tracked with technological progress for hundreds of years. Over the last few decades, precision engineering has been the specific focus of research on an international scale. The outcome of this effort has been the establishment of a broad range of engineering principles and techniques that form the foundation of precision design. Today’s precision manufacturing machines and measuring instruments represent highly specialised processes that combine deterministic engineering with metrology. Spanning a broad range of technology applications, precision engineering principles frequently bring together scientific ideas drawn from mechanics, materials, optics, electronics, control, thermo-mechanics, dynamics, and software engineering. This book provides a collection of these principles in a single source. Each topic is presented at a level suitable for both undergraduate students and precision engineers in the field. Also included is a wealth of references and example problems to consolidate ideas, and help guide the interested reader to more advanced literature on specific implementations.
Author: Yongsheng Gao
Publisher: Trans Tech Publications Ltd
ISBN: 3038130222
Category : Technology & Engineering
Languages : en
Pages : 753
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Book Description
The requirements of high precision and of high-quality components and devices in meeting the needs of modern industry and society in disciplines such as semiconductors, optics, nanotechnology, MEMS, manufacturing, biomedical and environmental engineering, make measurement technology and intelligent instruments (which sense, measure and report), more important than ever, and essential for the rapid development of information technology. Following the lead of the previous five publications (1989, 1993, 1996, 1998, 2001) in the series, “Measurement Technology and Intelligent Instruments”, this book presents the most recent advances in this important field. In all, 123 papers were contributed from many regions of the world; including China, Taiwan (China), Japan, Russia, Hong Kong (China), Germany, Australia, Austria, Canada, Korea, Poland, Slovakia and the UK and US.
Author: Wei Gao
Publisher: Springer
ISBN: 9789811049378
Category : Technology & Engineering
Languages : en
Pages : 0
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Book Description
The aim of this handbook is to provide a comprehensive summary of sensing and measurement in precision manufacturing, which is essential for process and quality control. The importance of precision sensing and measurements lies not only in the ability to distinguish whether the manufactured part meets the assigned tolerances through inspection but also, in many cases, reduce the deviation of the manufactured part from the designed values through improvement of the process or compensation manufacturing based on the sensing and measurement results. The information provided in the book will be of interest to industrial practitioners and researchers in the field of precision manufacturing sensing and measurements. This volume is part of a multi-volume handbook series that covers a comprehensive range of scientific and technological matters in ‘Precision Manufacturing’, for more information please view this link- https://www.springer.com/series/15575.
