Author: Kevin Harding
Publisher: SPIE-International Society for Optical Engineering
ISBN: 9780819483850
Category : Engineering inspection
Languages : en
Pages : 532
Book Description
Includes Proceedings Vol. 7821
Optical Metrology and Inspection for Industrial Applications
Author: Kevin Harding
Publisher: SPIE-International Society for Optical Engineering
ISBN: 9780819483850
Category : Engineering inspection
Languages : en
Pages : 532
Book Description
Includes Proceedings Vol. 7821
Publisher: SPIE-International Society for Optical Engineering
ISBN: 9780819483850
Category : Engineering inspection
Languages : en
Pages : 532
Book Description
Includes Proceedings Vol. 7821
Handbook of Optical Metrology
Author: Toru Yoshizawa
Publisher: CRC Press
ISBN: 1351831844
Category : Technology & Engineering
Languages : en
Pages : 866
Book Description
Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text: Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements Addresses interferometry, holography, and speckle methods and applications Explains Moiré metrology and the optical heterodyne measurement method Delves into the specifics of diffraction, scattering, polarization, and near-field optics Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.
Publisher: CRC Press
ISBN: 1351831844
Category : Technology & Engineering
Languages : en
Pages : 866
Book Description
Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text: Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements Addresses interferometry, holography, and speckle methods and applications Explains Moiré metrology and the optical heterodyne measurement method Delves into the specifics of diffraction, scattering, polarization, and near-field optics Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.
Introduction to Metrology Applications in IC Manufacturing
Author: Bo Su
Publisher:
ISBN: 9781628416626
Category : Integrated circuits
Languages : en
Pages : 187
Book Description
Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. Includes example spreadsheets of measurement uncertainty analysis--specifically, precision, matching, and relative accuracy.
Publisher:
ISBN: 9781628416626
Category : Integrated circuits
Languages : en
Pages : 187
Book Description
Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. Includes example spreadsheets of measurement uncertainty analysis--specifically, precision, matching, and relative accuracy.
Optical Inspection of Microsystems
Author: Wolfgang Osten
Publisher: CRC Press
ISBN: 1420019163
Category : Science
Languages : en
Pages : 524
Book Description
Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.
Publisher: CRC Press
ISBN: 1420019163
Category : Science
Languages : en
Pages : 524
Book Description
Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.
Optical Metrology and Inspection for Industrial Applications
Author: Society of Photo-Optical Instrumentation Engineers
Publisher:
ISBN: 9781510657052
Category : Optical measurements
Languages : en
Pages : 0
Book Description
Publisher:
ISBN: 9781510657052
Category : Optical measurements
Languages : en
Pages : 0
Book Description
Harnessing Light
Author: National Research Council
Publisher: National Academies Press
ISBN: 0309059917
Category : Technology & Engineering
Languages : en
Pages : 358
Book Description
Optical science and engineering affect almost every aspect of our lives. Millions of miles of optical fiber carry voice and data signals around the world. Lasers are used in surgery of the retina, kidneys, and heart. New high-efficiency light sources promise dramatic reductions in electricity consumption. Night-vision equipment and satellite surveillance are changing how wars are fought. Industry uses optical methods in everything from the production of computer chips to the construction of tunnels. Harnessing Light surveys this multitude of applications, as well as the status of the optics industry and of research and education in optics, and identifies actions that could enhance the field's contributions to society and facilitate its continued technical development.
Publisher: National Academies Press
ISBN: 0309059917
Category : Technology & Engineering
Languages : en
Pages : 358
Book Description
Optical science and engineering affect almost every aspect of our lives. Millions of miles of optical fiber carry voice and data signals around the world. Lasers are used in surgery of the retina, kidneys, and heart. New high-efficiency light sources promise dramatic reductions in electricity consumption. Night-vision equipment and satellite surveillance are changing how wars are fought. Industry uses optical methods in everything from the production of computer chips to the construction of tunnels. Harnessing Light surveys this multitude of applications, as well as the status of the optics industry and of research and education in optics, and identifies actions that could enhance the field's contributions to society and facilitate its continued technical development.
Optical Metrology for Precision Engineering
Author: Wei Gao
Publisher: Walter de Gruyter GmbH & Co KG
ISBN: 3110542366
Category : Technology & Engineering
Languages : en
Pages : 655
Book Description
This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields. • Introduces fundamental theories and techniques • Combines theories with practical applications • Presents technologies in an easy-to-understand way
Publisher: Walter de Gruyter GmbH & Co KG
ISBN: 3110542366
Category : Technology & Engineering
Languages : en
Pages : 655
Book Description
This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields. • Introduces fundamental theories and techniques • Combines theories with practical applications • Presents technologies in an easy-to-understand way
Digital Optical Measurement Techniques and Applications
Author: Pramod Rastogi
Publisher: Artech House
ISBN: 1608078078
Category : Technology & Engineering
Languages : en
Pages : 473
Book Description
This new resource explains the principles and applications of today’s digital optical measurement techniques. From start to finish, each chapter provides a concise introduction to the concepts and principles of digital optical metrology, followed by a detailed presentation of their applications. The development of all these topics, including their numerous methods, principles, and applications, has been illustrated using a large number of easy-to-understand figures. This book aims to not only help the reader identify the appropriate techniques in function of the measurement requirements, but also assess modern digital measurement systems.
Publisher: Artech House
ISBN: 1608078078
Category : Technology & Engineering
Languages : en
Pages : 473
Book Description
This new resource explains the principles and applications of today’s digital optical measurement techniques. From start to finish, each chapter provides a concise introduction to the concepts and principles of digital optical metrology, followed by a detailed presentation of their applications. The development of all these topics, including their numerous methods, principles, and applications, has been illustrated using a large number of easy-to-understand figures. This book aims to not only help the reader identify the appropriate techniques in function of the measurement requirements, but also assess modern digital measurement systems.
Machine Vision
Author: Jürgen Beyerer
Publisher: Springer
ISBN: 3662477947
Category : Technology & Engineering
Languages : en
Pages : 802
Book Description
The book offers a thorough introduction to machine vision. It is organized in two parts. The first part covers the image acquisition, which is the crucial component of most automated visual inspection systems. All important methods are described in great detail and are presented with a reasoned structure. The second part deals with the modeling and processing of image signals and pays particular regard to methods, which are relevant for automated visual inspection.
Publisher: Springer
ISBN: 3662477947
Category : Technology & Engineering
Languages : en
Pages : 802
Book Description
The book offers a thorough introduction to machine vision. It is organized in two parts. The first part covers the image acquisition, which is the crucial component of most automated visual inspection systems. All important methods are described in great detail and are presented with a reasoned structure. The second part deals with the modeling and processing of image signals and pays particular regard to methods, which are relevant for automated visual inspection.
Optical Imaging and Metrology
Author: Wolfgang Osten
Publisher: John Wiley & Sons
ISBN: 3527648461
Category : Science
Languages : en
Pages : 471
Book Description
A comprehensive review of the state of the art and advances in the field, while also outlining the future potential and development trends of optical imaging and optical metrology, an area of fast growth with numerous applications in nanotechnology and nanophysics. Written by the world's leading experts in the field, it fills the gap in the current literature by bridging the fields of optical imaging and metrology, and is the only up-to-date resource in terms of fundamental knowledge, basic concepts, methodologies, applications, and development trends.
Publisher: John Wiley & Sons
ISBN: 3527648461
Category : Science
Languages : en
Pages : 471
Book Description
A comprehensive review of the state of the art and advances in the field, while also outlining the future potential and development trends of optical imaging and optical metrology, an area of fast growth with numerous applications in nanotechnology and nanophysics. Written by the world's leading experts in the field, it fills the gap in the current literature by bridging the fields of optical imaging and metrology, and is the only up-to-date resource in terms of fundamental knowledge, basic concepts, methodologies, applications, and development trends.