Optical Inspection of Microsystems, Second Edition

Optical Inspection of Microsystems, Second Edition PDF Author: Wolfgang Osten
Publisher: CRC Press
ISBN: 0429532652
Category : Technology & Engineering
Languages : en
Pages : 692

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Book Description
Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS

Optical Inspection of Microsystems, Second Edition

Optical Inspection of Microsystems, Second Edition PDF Author: Wolfgang Osten
Publisher: CRC Press
ISBN: 0429532652
Category : Technology & Engineering
Languages : en
Pages : 692

Get Book Here

Book Description
Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS

Optical Inspection of Microsystems

Optical Inspection of Microsystems PDF Author: Wolfgang Osten
Publisher: CRC Press
ISBN: 1420019163
Category : Science
Languages : en
Pages : 524

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Book Description
Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

Microlithography

Microlithography PDF Author: Bruce W. Smith
Publisher: CRC Press
ISBN: 1420051539
Category : Technology & Engineering
Languages : en
Pages : 866

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Book Description
This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of international experts. New in the Second Edition In addition to updated information on existing material, this new edition features coverage of technologies developed over the last decade since the first edition appeared, including: Immersion Lithography 157nm Lithography Electron Projection Lithography (EPL) Extreme Ultraviolet (EUV) Lithography Imprint Lithography Photoresists for 193nm and Immersion Lithography Scatterometry Microlithography: Science and Technology, Second Edition authoritatively covers the physics, chemistry, optics, metrology tools and techniques, resist processing and materials, and fabrication methods involved in the latest generations of microlithography such as immersion lithography and extreme ultraviolet (EUV) lithography. It also looks ahead to the possible future systems and technologies that will bring the next generations to fruition. Loaded with illustrations, equations, tables, and time-saving references to the most current literature, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to achieve robust, accurate, and cost-effective microlithography processes and systems.

Synthesizing and Characterizing Plant-Mediated Biocompatible Metal Nanoparticles

Synthesizing and Characterizing Plant-Mediated Biocompatible Metal Nanoparticles PDF Author: Das, Susanta
Publisher: IGI Global
ISBN:
Category : Science
Languages : en
Pages : 508

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Book Description
Metal nanoparticles, ranging from 1 nanometer (nm) to 100 nm, possess unique physical, chemical, and biological properties, driving significant scientific and technological advancements. Traditional methods for producing these nanoparticles, such as physical and chemical synthesis, are often costly, time-consuming, and hazardous to health. In response, green synthesis has gained popularity due to its non-toxic, eco-friendly, and cost-effective approach. This method uses plant materials and microorganisms to produce stable, biocompatible nanoparticles. As a result, green synthesis is becoming a promising alternative for the development of metal nanoparticles. Synthesizing and Characterizing Plant-Mediated Biocompatible Metal Nanoparticles describes the domain of synthesizing and characterizing plant-mediated biocompatible metal nanoparticles, exploring numerous applications from fostering a sustainable environment to diverse nanotechnological applications such as drug discovery, cancer treatment, and beyond. It further addresses a broad spectrum of societal and technological challenges and related issues, thereby assisting stakeholders in making informed decisions within this rapidly evolving field in our dynamic and contemporary scientific society. Covering topics such as antibiotics, nano-fertilizer, and wastewater treatment, this book is an excellent resource for policymakers, industry professionals, academicians, researchers, graduate and postgraduate students, and more.

Optical Waveguides

Optical Waveguides PDF Author: María L. Calvo
Publisher: CRC Press
ISBN: 1351837230
Category : Technology & Engineering
Languages : en
Pages : 353

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Book Description
Although the theory and principles of optical waveguides have been established for more than a century, the technologies have only been realized in recent decades. Optical Waveguides: From Theory to Applied Technologies combines the most relevant aspects of waveguide theory with the study of current detailed waveguiding technologies, in particular, photonic devices, telecommunication applications, and biomedical optics. With self-contained chapters written by well-known specialists, the book features both fundamentals and applications. The first three chapters examine the theoretical foundations and bases of planar optical waveguides as well as critical optical properties such as birefringence and nonlinear optical phenomena. The next several chapters focus on contemporary waveguiding technologies that include photonic devices and telecommunications. The book concludes with discussions on additional technological applications, including biomedical optical waveguides and the potential of neutron waveguides. As optical waveguides play an increasing part in modern technology, photonics will become to the 21st century what electronics were to the 20th century. Offering both novel insights for experienced professionals and introductory material for novices, this book facilitates a better understanding of the new information era—the photonics century.

Gas Lasers

Gas Lasers PDF Author: Masamori Endo
Publisher: CRC Press
ISBN: 1351837192
Category : Technology & Engineering
Languages : en
Pages : 607

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Book Description
Lasers with a gaseous active medium offer high flexibility, wide tunability, and advantages in cost, beam quality, and power scalability. Gas lasers have tended to become overshadowed by the recent popularity and proliferation of semiconductor lasers. As a result of this shift in focus, details on modern developments in gas lasers are difficult to find. In addition, different types of gas lasers have unique properties that are not well-described in other references. Collecting expert contributions from authorities dealing with specific types of lasers, Gas Lasers examines the fundamentals, current research, and applications of this important class of laser. It is important to understand all types of lasers, from solid-state to gaseous, before making a decision for any application. This book fills in the gaps by discussing the definition and properties of gaseous media along with its fluid dynamics, electric excitation circuits, and optical resonators. From this foundation, the discussion launches into the basic physics, characteristics, applications, and current research efforts for specific types of gas lasers: CO lasers, CO2 lasers, HF/DF lasers, excimer lasers, iodine lasers, and metal vapor lasers. The final chapter discusses miscellaneous lasers not covered in the previous chapters. Collecting hard-to-find material into a single, convenient source, Gas Lasers offers an encyclopedic survey that helps you approach new applications with a more complete inventory of laser options.

Dynamic Laser Speckle and Applications

Dynamic Laser Speckle and Applications PDF Author: Hector J. Rabal
Publisher: CRC Press
ISBN: 1351834975
Category : Science
Languages : en
Pages : 273

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Book Description
Speckle study constitutes a multidisciplinary area with inherent complexities. In order to conquer challenges such as the variability of samples and sensitive measurements, researchers must develop a theoretical and statistical understanding of both biological and non-biological metrology using dynamic speckle laser. Dynamic Laser Speckle and Applications discusses the main methodologies used to analyze biospeckle phenomena with a strong focus on experimentation. After establishing a theoretical background in both speckle and biospeckle, the book presents the main methodologies for statistical and image analysis. It then deals with the concept of frequency decomposition before moving on to a discussion of fuzzy methods to treat dynamic speckle data. The book dedicates two sections to applications, including agricultural approaches. Additional features include photo images of experiments and software to aid in easy start-up of dynamic speckle usage. A systematic approach to new dynamic speckle laser phenomena, this book provides the physical theory and statistical background needed to analyze images formed by laser illumination in biological and non-biological samples.

Near-Earth Laser Communications

Near-Earth Laser Communications PDF Author: Hamid Hemmati
Publisher: CRC Press
ISBN: 1351837311
Category : Science
Languages : en
Pages : 307

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Book Description
Invented more than a hundred years ago by Alexander Graham Bell, the technology of free-space optical communications, or lasercom, has finally reached the level of maturity required to meet a growing demand for operational multi-giga-bit-per-second data rate systems communicating to and from aircrafts and satellites. Putting the emphasis on near-earth links, including air, LEO, MEO, and GEO orbits, Near-Earth Laser Communications presents a summary of important free-space laser communication subsystem challenges and discusses potential ways to overcome them. This comprehensive reference provides up-to-date information on component and subsystem technologies, fundamental limitations, and approaches to reach those limits. It covers basic concepts and state-of-the-art technologies, emphasizing device technology, implementation techniques, and system trades. The authors discuss hardware technologies and their applications, and also explore ongoing research activities and those planned for the near future. The analytical aspects of laser communication have been covered to a great extent in several books. However, a detailed approach to system design and development, including trades on subsystem choices and implications of the hardware selection for satellite and aircraft telecommunications, is missing. Highlighting key design variations and critical differences between them, this book distills decades’ worth of experience into a practical resource on hardware technologies.

Optoelectronics

Optoelectronics PDF Author: Dave Birtalan
Publisher: CRC Press
ISBN: 1351834738
Category : Science
Languages : en
Pages : 340

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Book Description
Organized as a mini-encyclopedia of infrared optoelectronic applications, this long awaited new edition of an industry standard updates and expands on the groundbreaking work of its predecessor. Pioneering experts, responsible for many advancements in the field, provide engineers with a fundamental understanding of semiconductor physics and the technical information needed to design infrared optoelectronic devices. Fully revised to reflect current developments in the field, Optoelectronics: Infrared-Visible-Ultraviolet Devices and Applications, Second Edition reviews relevant semiconductor fundamentals, including device physics, from an optoelectronic industry perspective. This easy-reading text provides a practical engineering introduction to optoelectronic LEDs and silicon sensor technology for the infrared, visible, and ultraviolet portion of the electromagnetic spectrum. Utilizing a practical and efficient engineering approach throughout, the text supplies design engineers and technical management with quick and uncluttered access to the technical information needed to design new systems.

Handbook of Optical Metrology

Handbook of Optical Metrology PDF Author: Toru Yoshizawa
Publisher: CRC Press
ISBN: 1351831844
Category : Technology & Engineering
Languages : en
Pages : 866

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Book Description
Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text: Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements Addresses interferometry, holography, and speckle methods and applications Explains Moiré metrology and the optical heterodyne measurement method Delves into the specifics of diffraction, scattering, polarization, and near-field optics Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.