Multi-Wafer Rotating MEMS Machines PDF Download
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Author: Jeffrey Lang
Publisher: Springer Science & Business Media
ISBN: 0387777474
Category : Technology & Engineering
Languages : en
Pages : 469
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Book Description
The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.
Author: Jeffrey Lang
Publisher: Springer Science & Business Media
ISBN: 0387777474
Category : Technology & Engineering
Languages : en
Pages : 469
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Book Description
The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.
Author: Maurice L. Adams
Publisher: CRC Press
ISBN: 1351642812
Category : Technology & Engineering
Languages : en
Pages : 224
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Book Description
Rotating Machinery Research and Development Test Rigs presents the purpose and development processes for test apparatuses built for Research & Development in machinery technology and product development. Each R & D apparatus is the focus of an entire chapter, with fifteen detailed case studies included from mechanical, aerospace, chemical and biomedical engineering. Specific machinery components covered include bearings, seals, power plant pumps, rotors, turbines and compressors. Machinery condition monitoring and product development processes have been integrated. The specific purpose and results for each test rig are comprehensively presented and explained.
Author: Thomas B. Jones
Publisher: Cambridge University Press
ISBN: 1139619047
Category : Technology & Engineering
Languages : en
Pages : 581
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Book Description
Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles.
Author: Steven Percy
Publisher: Springer Science & Business Media
ISBN: 1461492157
Category : Technology & Engineering
Languages : en
Pages : 76
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Book Description
This book discusses the history of thermal heat generators and focuses on the potential for these processes using micro-electrical mechanical systems (MEMS) technology for this application. The main focus is on the capture of waste thermal energy for example from industrial processes, transport systems or the human body to generate useable electrical power. A wide range of technologies is discussed, including external combustion heat cycles at MEMS ( Brayton, Stirling and Rankine), Thermoacoustic, Shape Memory Alloys (SMAs), Multiferroics, Thermionics, Pyroelectric, Seebeck, Alkali Metal Thermal, Hydride Heat Engine, Johnson Thermo Electrochemical Converters, and the Johnson Electric Heat Pipe.
Author: Aragona Patty
Publisher: CRC Press
ISBN: 1351851942
Category : Science
Languages : en
Pages : 933
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Book Description
The 2016 International Conference on Materials Science, Energy Technology and Environmental Engineering (MSETEE 2016) took place May 28-29, 2016 in Zhuhai City, China. MSETEE 2016 brought together academics and industrial experts in the field of materials science, energy technology and environmental engineering. The primary goal of the conference was to promote research and developmental activities in these research areas and to promote scientific information interchange between researchers, developers, engineers, students, and practitioners working around the world. The conference will be held every year serving as platform for researchers to share views and experience in materials science, energy technology and environmental engineering and related areas.
Author: Enrico Ciulli
Publisher: Springer Nature
ISBN: 3031626168
Category :
Languages : en
Pages : 492
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Book Description
Author: Christopher Cadou
Publisher: Momentum Press
ISBN: 1606503081
Category : Technology & Engineering
Languages : en
Pages : 720
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Book Description
Recent advances in microfabrication technologies have enabled the development of entirely new classes of small-scale devices with applications in fields ranging from biomedicine, to wireless communication and computing, to reconnaissance, and to augmentation of human function. In many cases, however, what these devices can actually accomplish is limited by the low energy density of their energy storage and conversion systems. This breakthrough book brings together in one place the information necessary to develop the high energy density combustion-based power sources that will enable many of these devices to realize their full potential. Engineers and scientists working in energy-related fields will find: • An overview of the fundamental physics and phenomena of microscale combustion; • Presentations of the latest modeling and simulation techniques for gasphase and catalytic micro-reactors; • The latest results from experiments in small-scale liquid film, microtube, and porous combustors, micro-thrusters, and micro heat engines; • An assessment of the additional research necessary to develop compact and high energy density energy conversion systems that are truly practical.
Author: Markku Tilli
Publisher: Elsevier
ISBN: 012817787X
Category : Technology & Engineering
Languages : en
Pages : 1028
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Book Description
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Author: Cornelius T. Leondes
Publisher: Springer Science & Business Media
ISBN: 0387257861
Category : Technology & Engineering
Languages : en
Pages : 2142
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Book Description
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Author: Sami Franssila
Publisher: John Wiley & Sons
ISBN: 1119991897
Category : Technology & Engineering
Languages : en
Pages : 534
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Book Description
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike. www.wiley.com/go/Franssila_Micro2e
