Multi-Wafer Rotating MEMS Machines PDF Download

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Multi-Wafer Rotating MEMS Machines

Multi-Wafer Rotating MEMS Machines PDF Author: Jeffrey Lang
Publisher: Springer Science & Business Media
ISBN: 0387777474
Category : Technology & Engineering
Languages : en
Pages : 469

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Book Description
The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.