Micromachining and Microfabrication Process Technology and Devices PDF Download
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Author: Norman C. Tien
Publisher:
ISBN:
Category : Electromechanical devices
Languages : en
Pages : 440
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Book Description
Author: Norman C. Tien
Publisher:
ISBN:
Category : Electromechanical devices
Languages : en
Pages : 440
Get Book Here
Book Description
Author: Norman C. Tien
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 460
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Book Description
Author: P. Rai-Choudhury
Publisher: IET
ISBN: 9780852969113
Category : Technology & Engineering
Languages : en
Pages : 716
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Book Description
Contains useful process details, recipes, tables, charts and includes numerous device applications.
Author: Karen W. Markus
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 352
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Book Description
Author:
Publisher:
ISBN:
Category : Micromechanics
Languages : en
Pages : 220
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Book Description
Author:
Publisher:
ISBN:
Category : Electromechanical devices
Languages : en
Pages : 402
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Book Description
Author: Jean-Michel Karam
Publisher: SPIE-International Society for Optical Engineering
ISBN: 9780819438300
Category : Technology & Engineering
Languages : en
Pages : 0
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Book Description
Author: Society of Photo-optical Instrumentation Engineers
Publisher: SPIE-International Society for Optical Engineering
ISBN: 9780819426550
Category : Science
Languages : en
Pages : 0
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Book Description
Author: Stella W. Pang
Publisher: SPIE-International Society for Optical Engineering
ISBN: 9780819422774
Category : Electromechanical devices
Languages : en
Pages : 366
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Book Description
Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1420055194
Category : Technology & Engineering
Languages : en
Pages : 672
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Book Description
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
