Microfabricated Systems and MEMS VI PDF Download
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Author: Peter J. Hesketh
Publisher: The Electrochemical Society
ISBN: 9781566773720
Category : Microelectromechanical systems
Languages : en
Pages : 268
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Book Description
Author: Peter J. Hesketh
Publisher: The Electrochemical Society
ISBN: 9781566773720
Category : Microelectromechanical systems
Languages : en
Pages : 268
Get Book Here
Book Description
Author:
Publisher:
ISBN:
Category : Microelectronics
Languages : en
Pages : 274
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Book Description
Author:
Publisher: The Electrochemical Society
ISBN: 9781566774222
Category : Microelectromechanical systems
Languages : en
Pages : 352
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Book Description
Author:
Publisher: The Electrochemical Society
ISBN: 9781566772860
Category : Technology & Engineering
Languages : en
Pages : 278
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Book Description
Author: Mohamed Gad-el-Hak
Publisher: CRC Press
ISBN: 1420036564
Category : Technology & Engineering
Languages : en
Pages : 678
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Book Description
Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.
Author: P. J. Hesketh
Publisher: The Electrochemical Society
ISBN: 1566776600
Category : Science
Languages : en
Pages : 131
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Book Description
The papers included in this issue of ECS Transactions were originally presented in the symposium ¿Microfabricated and Nanofabricated Systems for MEMS/NEMS 8¿, held during the PRiME 2008 meeting of The Electrochemical Society, in Honolulu, Hawaii, from October 12 to 17, 2008.
Author: Cornelius T. Leondes
Publisher: Springer Science & Business Media
ISBN: 0387257861
Category : Technology & Engineering
Languages : en
Pages : 2142
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Book Description
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Author: Zhuoqing Yang
Publisher: Springer Nature
ISBN: 303079749X
Category : Technology & Engineering
Languages : en
Pages : 312
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Book Description
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
Author: Tai-Ran Hsu
Publisher: John Wiley & Sons
ISBN: 1119771161
Category : Technology & Engineering
Languages : en
Pages : 576
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Book Description
Technology/Engineering/Mechanical A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering. Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances. Other highlights of the Second Edition include: * Expanded coverage of microfabrication plus assembly and packaging technologies * The introduction of microgyroscopes, miniature microphones, and heat pipes * Design methodologies for thermally actuated multilayered device components * The use of popular SU-8 polymer material Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.
Author: Raja Nassar
Publisher: Springer Science & Business Media
ISBN: 3662087928
Category : Technology & Engineering
Languages : en
Pages : 276
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Book Description
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
