Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods PDF Download

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Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods

Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods PDF Author: Vladimir V. Arabadzhi
Publisher:
ISBN: 9781608051571
Category : Technology & Engineering
Languages : en
Pages :

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Book Description
"Oxynitride thin film technology is rapidly impacting a broad spectrum of applications, ranging from decorative functions (through optoelectronics) to corrosion resistance. Developing a better understanding of the relationships between deposition processes"