Laser Chemical Processing for Microelectronics PDF Download
Are you looking for read ebook online? Search for your book and save it on your Kindle device, PC, phones or tablets. Download Laser Chemical Processing for Microelectronics PDF full book. Access full book title Laser Chemical Processing for Microelectronics by K. G. Ibbs. Download full books in PDF and EPUB format.
Author: K. G. Ibbs
Publisher:
ISBN: 9780521322546
Category : Technology & Engineering
Languages : en
Pages : 172
Get Book Here
Book Description
Nine expert contributors describe the application of laser processing techniques in the fabrication of semiconductor materials & devices for the microelectronics industry. This book comprises a carefully edited collection of specially written reviews by leading figures in all aspects of this important area of high technology. This subject matter should interest anyone involved with a semiconductor fabrication facility or a development laboratory with an interest in modern advances in processing technology, especially those people working in the larger electrical & electronics companies. In addition, it will be of value to university groups in engineering & physics departments involved in laser processing of materials, & of subsidiary interest to microfilm technologists working in optics fabrication.
Author: K. G. Ibbs
Publisher:
ISBN: 9780521322546
Category : Technology & Engineering
Languages : en
Pages : 172
Get Book Here
Book Description
Nine expert contributors describe the application of laser processing techniques in the fabrication of semiconductor materials & devices for the microelectronics industry. This book comprises a carefully edited collection of specially written reviews by leading figures in all aspects of this important area of high technology. This subject matter should interest anyone involved with a semiconductor fabrication facility or a development laboratory with an interest in modern advances in processing technology, especially those people working in the larger electrical & electronics companies. In addition, it will be of value to university groups in engineering & physics departments involved in laser processing of materials, & of subsidiary interest to microfilm technologists working in optics fabrication.
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 23
Get Book Here
Book Description
This report summarizes a three-year research effort to explore advanced laser-chemical processing for microelectronics and integrated optics. The main goals of the work have been: (a) to develop techniques for fabrication of integrated optical devices in GaAs multilayer and quantum well structures, and (b) to explore new and novel techniques of advanced semiconductor processing for microelectronics and optoelectronics.
Author: Daniel J. Ehrlich
Publisher:
ISBN:
Category :
Languages : en
Pages : 763
Get Book Here
Book Description
Author: Y. Pauleau
Publisher: Springer Science & Business Media
ISBN: 940100353X
Category : Technology & Engineering
Languages : en
Pages : 372
Get Book Here
Book Description
An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.
Author: J. J. Ritsko
Publisher:
ISBN:
Category : Lasers
Languages : en
Pages : 268
Get Book Here
Book Description
Author: Dieter Bäuerle
Publisher: Springer Science & Business Media
ISBN: 3642176135
Category : Science
Languages : en
Pages : 846
Get Book Here
Book Description
Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser-matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid, and solid-solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. This fourth edition has been revised and enlarged to cover new topics such as 3D microfabrication, advances in nanotechnology, ultrafast laser technology and laser chemical processing (LCP). Graduate students, physicists, chemists, engineers, and manufacturers alike will find this book an invaluable reference work on laser processing.
Author: Dieter Bäuerle
Publisher: Springer Science & Business Media
ISBN: 3662032538
Category : Science
Languages : en
Pages : 649
Get Book Here
Book Description
Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser--matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas--solid, liquid--solid, and solid--solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. Students, engineers, and manufacturers alike will find this book an invaluable reference work for the state of the art in laser processing.
Author:
Publisher:
ISBN:
Category : Lasers in chemistry
Languages : en
Pages :
Get Book Here
Book Description
Author: Daniel J. Ehrlich
Publisher: Cambridge University Press
ISBN: 9781107411043
Category : Technology & Engineering
Languages : en
Pages : 534
Get Book Here
Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: J. Mazumder
Publisher: Springer Science & Business Media
ISBN: 1489914307
Category : Technology & Engineering
Languages : en
Pages : 406
Get Book Here
Book Description
In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.
