Laser and Particle-beam Chemical Processing for Microelectronics PDF Download
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Author: Daniel J. Ehrlich
Publisher:
ISBN:
Category :
Languages : en
Pages : 763
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Book Description
Author: Daniel J. Ehrlich
Publisher:
ISBN:
Category :
Languages : en
Pages : 763
Get Book Here
Book Description
Author: Daniel J. Ehrlich
Publisher: Cambridge University Press
ISBN: 9781107411043
Category : Technology & Engineering
Languages : en
Pages : 534
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 632
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Book Description
The Materials Research Society held their symposium 'Laser & Particle-Beam Chemical Processes on Surfaces' in Boston, Massachusetts on November 28 - December 3, 1988. Parts I thru X of this report discuss the following research topics: Overview of Laser- and Beam-Induced Surface Processes; Laser-Induced Deposition of Metal Films; Laser-Induced Writing of Metal Lines; Laser-Induced Deposition of Semiconductors; Laser-Induced Chemical Etching; Laser-Induced Surface Ablation; Laser-Induced Surface Modification; Ion-, Electron-, and Plasma-Assisted Chemistry; and Integrated Circuits Fabricated Technology. (JG).
Author: I.W. Boyd
Publisher: Elsevier
ISBN: 0444596658
Category : Science
Languages : en
Pages : 482
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Book Description
This volume discusses both the practical and theoretical aspects of energy beam materials processing. It highlights the recent advances in the use of beams and incoherent light sources to enhance or modify chemical processes at solid surfaces. Special attention is given to the latest developments in the use of ion, electron and photon beams, and on laser-assisted process chemistry. Thin film and surface and interface reactions as well as bulk phase transformations are discussed. Practical technological details and the criteria for present and future applications are also reviewed. The papers collected in this volume reflect the continuing strong interest and variety of development in this field.
Author: A. Wayne Johnson
Publisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 680
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: K. G. Ibbs
Publisher:
ISBN: 9780521322546
Category : Technology & Engineering
Languages : en
Pages : 172
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Book Description
Nine expert contributors describe the application of laser processing techniques in the fabrication of semiconductor materials & devices for the microelectronics industry. This book comprises a carefully edited collection of specially written reviews by leading figures in all aspects of this important area of high technology. This subject matter should interest anyone involved with a semiconductor fabrication facility or a development laboratory with an interest in modern advances in processing technology, especially those people working in the larger electrical & electronics companies. In addition, it will be of value to university groups in engineering & physics departments involved in laser processing of materials, & of subsidiary interest to microfilm technologists working in optics fabrication.
Author: J. Mazumder
Publisher: Springer Science & Business Media
ISBN: 1489914307
Category : Technology & Engineering
Languages : en
Pages : 406
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Book Description
In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.
Author: Kash L. Mittal
Publisher: CRC Press
ISBN: 1466563702
Category : Science
Languages : en
Pages : 435
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Book Description
Polymeric materials are used for a legion of applications in a wide array of technological areas, and their proper surface/interface characteristics are of cardinal importance for their applications. Therefore, the need to characterize polymer surfaces/interfaces and their suitable modification to impart desired characteristics is quite patent. This book chronicles the proceedings of the Symposium on Polymer Surfaces and Interfaces: Characterization, Modification and Application held as a part of the Society of Plastics Engineers Annual Technical Conference, Boston, May 7--11, 1995. The articles in this book address many aspects of polymer surfaces and interfaces. Topics covered include: various ways (chemical, photochemical, laser, flame, corona) to modify polymer surfaces; modification of contact lens surfaces; various ways to analyze/characterize polymer surfaces; metal/polymer interfaces; metal/polyimide adhesion; metal/self-assembled organic monolayer interfaces; polymer alignment layers for liquid crystals; alignment of liquid crystal surfaces; polyimide alignment layers; molecular re-orientation of polymer surfaces; plasma polymerized organic coatings; epoxy/fiber interphase; epoxy underfill materials for packaging integrated circuits; transport in polymers; polymer miscibility; and cell adhesion.
Author: E. Fogarassy
Publisher: Elsevier
ISBN: 0444596682
Category : Science
Languages : en
Pages : 495
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Book Description
The papers in this volume cover all aspects of laser assisted surface processing ranging from the preparation of high-Tc superconducting layer structures to industrial laser applications for device fabrication. The topics presented give recent results in organometallic chemistry and laser photochemistry, and novel surface characterization techniques. The ability to control the surface morphology by digital deposition and etching shows one of the future directions for exciting applications of laser surface processing, some of which may apply UV and VUV excitation. The understanding of elementary proceses is essential for the design of novel deposition methods, with diamond CVD being an outstanding example. The high quality of these contributions once again demonstrates that the E-MRS is an efficient forum for interaction between research workers and industry.
Author: Daniel J. Ehrlich
Publisher: Elsevier
ISBN: 0080918026
Category : Technology & Engineering
Languages : en
Pages : 602
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Book Description
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
