Laser- and Particle-Beam Chemical Processes on Surfaces: PDF Download
Are you looking for read ebook online? Search for your book and save it on your Kindle device, PC, phones or tablets. Download Laser- and Particle-Beam Chemical Processes on Surfaces: PDF full book. Access full book title Laser- and Particle-Beam Chemical Processes on Surfaces: by A. Wayne Johnson. Download full books in PDF and EPUB format.
Author: A. Wayne Johnson
Publisher: Cambridge University Press
ISBN: 9781107410862
Category : Technology & Engineering
Languages : en
Pages : 672
Get Book Here
Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: A. Wayne Johnson
Publisher: Cambridge University Press
ISBN: 9781107410862
Category : Technology & Engineering
Languages : en
Pages : 672
Get Book Here
Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: A. Wayne Johnson
Publisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 680
Get Book Here
Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :
Get Book Here
Book Description
Author: Toivo T. Kodas
Publisher: John Wiley & Sons
ISBN: 3527615849
Category : Technology & Engineering
Languages : en
Pages : 562
Get Book Here
Book Description
High purity, thin metal coatings have a variety of important commercial applications, for example, in the microelectronics industry, as catalysts, as protective and decorative coatings as well as in gas-diffusion barriers. This book offers detailed, up- to-date coverage of the chemistry behind the vapor deposition of different metals from organometallic precursors. In nine chapters, the CVD of metals including aluminum, tungsten, gold, silver, platinum, palladium, nickel, as well as copper from copper(I) and copper(II) compounds is covered. The synthesis and properties of the precursors, the growth process, morphology, quality and adhesion of the resulting films as well as laser- assisted, ion- assisted and plasma-assisted methods are discussed. Present applications and prospects for future developments are summarized. With ca. 1000 references and a glossary, this book is a unique source of in-depth information. It is indispensable for chemists, physicists, engineers and materials scientists working with metal- coating processes and technologies. From Reviews: 'I highly recommend this book to anyone interested in learning more about the chemistry of metal CVD.' J. Am Chem. Soc.
Author: Kenzi Tamaru
Publisher: Springer Science & Business Media
ISBN: 1489916369
Category : Science
Languages : en
Pages : 365
Get Book Here
Book Description
When we see a jumbo jet at the airport, we sometimes wonder how such a huge, heavy plane can fly high in the sky. To the extent that we think in a static way, it is certainly not understandable. In such a manner, dynamics yields behavior quite different from statics. When we want to prepare an iron nitride, for example, one of the most orthodox ways is to put iron in a nitrogen atmosphere under pressures higher than the dissociation pressure of the iron nitride at temperatures sufficiently high to let the nitrogen penetrate into the bulk iron. This is the way thermodynamics tells us to proceed, which requires an elaborate, expensive high-pressure apparatus, sophisticated techniques, and great efforts. However, if we flow ammonia over the iron, even under low pressures, we can easily prepare the nitride-provided the hydrogen pressure is sufficiently low. Since the nitrogen desorption rate is the determining step of the ammonia decomposition on the iron surface, the virtual pressure of nitrogen at the surface can reach an extremely high level (as is generally accepted) because, in such a dynamic system, the driving force of the ammonia decomposition reaction pushes the nitrogen into the bulk iron to form the nitride. Thus, dynamics is an approach considerably different from statics.
Author:
Publisher:
ISBN:
Category : Power resources
Languages : en
Pages : 752
Get Book Here
Book Description
Author: A.J. van Roosmalen
Publisher: Springer Science & Business Media
ISBN: 148992566X
Category : Science
Languages : en
Pages : 247
Get Book Here
Book Description
This book has been written as part of a series of scientific books being published by Plenum Press. The scope of the series is to review a chosen topic in each volume. To supplement this information, the abstracts to the most important references cited in the text are reprinted, thus allowing the reader to find in-depth material without having to refer to many additional publications. This volume is dedicated to the field of dry (plasma) etching, as applied in silicon semiconductor processing. Although a number of books have appeared dealing with this area of physics and chemistry, these all deal with parts of the field. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI. Examples are given throughout the fundamental sections, in order to give the reader a better insight in the meaning and magnitude of the many parameters relevant to dry etching. Electrical engineering concepts are emphasized to explain the pros and cons of reactor concepts and excitation frequency ranges. In the description of practical applications, extensive use is made of cross-referencing between processes and materials, as well as theory and practice. It is thus intended to provide a total model for understanding dry etching. The book has been written such that no previous knowledge of the subject is required. It is intended as a review of all aspects of dry etching for silicon semiconductor processing.
Author: D. B. Poker
Publisher: Mrs Proceedings
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 328
Get Book Here
Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: Herbert Reichl
Publisher: Springer Science & Business Media
ISBN: 3642456782
Category : Technology & Engineering
Languages : en
Pages : 843
Get Book Here
Book Description
On September 10-13, 1990, the first international meeting on Microsystem Technologies takes place at the Berlin International Congress Center. Most of the traditional congresses deal with themes that become more and more specific, and only a small part of the scientific world is reflected. The Micro System Technologies is attempting to take the opposite direction: During the last two decades the development of microelectronics was characterized by a tremendous increase of complexity of integrated circuits. At the same time the fields of microoptics and micromechanics have been developed to an advanced state of the art by the application of thin film and semiconductor technologies. The trend of the future development is to increase the integration density by combining the microelectronic, microoptic, and micro mechanic aspects to new complex multifunctional systems, which are able to comprise sensors, actuators, analogue and digital circuits on the same chip or on multichip-modules. Microsystems will lead to extensions of the field of microelectronic applications with important technical alterations and can open new considerable markets. For the realization of economical solutions for microsystems a lot of interdisciplinary cooperation and know-how has to be developed. New materials for sensitive layers, substrates, conducting, semiconducting, or isolating thin films are the basis for the development of new technologies. The increasing complexity leads to increasing interaction among electrical and non-electrical quantities.
Author: James A. Knapp
Publisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 912
Get Book Here
Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
