Ion-beam-assisted Deposition of Magnesium Oxide Films for Coated Conductors

Ion-beam-assisted Deposition of Magnesium Oxide Films for Coated Conductors PDF Author:
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The development of high critical-temperature thin-film superconductors and coated conducting wires is important for electric power applications. To achieve high transport current density, template films are necessary for the successful deposition of biaxially aligned YBa[sub 2]Cu[sub 3]O[sub 7-x] (YBCO) on flexible metal substrates. We grew biaxially aligned magnesium oxide (MgO) template films by ion-beam-assisted deposition with electron-beam evaporation. MgO films of[approx]100[angstrom] thickness were deposited on Si[sub 3]N[sub 4]-coated Si substrates at a deposition rate of[approx]1.5[angstrom]/sec with an ion flux of[approx]110[micro]A/cm[sup 2] bombarding the substrate at a 45[sup o] angle. To study crystalline structure by X-ray diffraction, we deposited an additional layer of MgO. Good in- and out-of-plane alignment was observed, with (111)[phi]-scan full-width half-maximum (FWHM) of 6.2[sup o] and (002)[omega]-scan FWHM of 2.2[sup o].