High-precision EUV and X-ray Optics for Advanced Photon Source Facilities

High-precision EUV and X-ray Optics for Advanced Photon Source Facilities PDF Author: Qiushi Huang
Publisher: Frontiers Media SA
ISBN: 2832513182
Category : Science
Languages : en
Pages : 95

Get Book Here

Book Description

High-precision EUV and X-ray Optics for Advanced Photon Source Facilities

High-precision EUV and X-ray Optics for Advanced Photon Source Facilities PDF Author: Qiushi Huang
Publisher: Frontiers Media SA
ISBN: 2832513182
Category : Science
Languages : en
Pages : 95

Get Book Here

Book Description


User Facilities of the Office of Basic Energy Sciences

User Facilities of the Office of Basic Energy Sciences PDF Author:
Publisher:
ISBN:
Category : Government publications
Languages : en
Pages : 72

Get Book Here

Book Description
"This brochure overviews the scientific infrastructure that is constructed, maintained, and operated at Department of Energy laboratories for the pursuit of energy-related research." -- cf p. 4

EUV Sources for Lithography

EUV Sources for Lithography PDF Author: Vivek Bakshi
Publisher: SPIE Press
ISBN: 9780819458452
Category : Art
Languages : en
Pages : 1104

Get Book Here

Book Description
This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.

X-ray Optics Developments at the APS for Third-generation Synchrotron Radiation Sources

X-ray Optics Developments at the APS for Third-generation Synchrotron Radiation Sources PDF Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 29

Get Book Here

Book Description
High brilliance third-generation synchrotron radiation sources simultaneously provide both a need and an opportunity for the development of new x-ray optical components. The high power and power densities of the x-ray beams produced by insertion devices have forced researchers to consider novel, and what may seem like exotic, approaches to the mitigation of thermal distortions that can dilute the beam brilliance delivered to the experiment or next optical component. Once the power has been filtered by such high heat load optical elements, specialized components can be employed that take advantage of the high degree of brilliance. This presentation reviews the performance of optical components that have been designed, fabricated, and tested at the Advanced Photon Source, starting with high heat load components and followed by examples of several specialized devices such as a milli-eV resolution (in-line) monochromator, a high energy x-ray phase retarder, and a phase zone plate with submicron focusing capability.

Scientific and Technical Aerospace Reports

Scientific and Technical Aerospace Reports PDF Author:
Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 704

Get Book Here

Book Description


Advances in Mirror Technology for X-ray, EUV Lithography, Laser and Other Applications

Advances in Mirror Technology for X-ray, EUV Lithography, Laser and Other Applications PDF Author:
Publisher:
ISBN:
Category : Lasers
Languages : en
Pages : 216

Get Book Here

Book Description


Optical Technologies for Extreme-Ultraviolet and Soft X-ray Coherent Sources

Optical Technologies for Extreme-Ultraviolet and Soft X-ray Coherent Sources PDF Author: Federico Canova
Publisher: Springer
ISBN: 3662474433
Category : Science
Languages : en
Pages : 205

Get Book Here

Book Description
The book reviews the most recent achievements in optical technologies for XUV and X-ray coherent sources. Particular attention is given to free-electron-laser facilities, but also to other sources available at present, such as synchrotrons, high-order laser harmonics and X-ray lasers. The optical technologies relevant to each type of source are discussed. In addition, the main technologies used for photon handling and conditioning, namely multilayer mirrors, adaptive optics, crystals and gratings are explained. Experiments using coherent light received during the last decades a lot of attention for the X-ray regime. Strong efforts were taken for the realization of almost fully coherent sources, e.g. the free-electron lasers, both as independent sources in the femtosecond and attosecond regimes and as seeding sources for free-electron-lasers and X-ray gas lasers. In parallel to the development of sources, optical technologies for photon handling and conditioning of such coherent and intense X-ray beams advanced. New problems were faced for the realization of optical components of beamlines demanding to manage coherent X-ray photons, e.g. the preservation of coherence and time structure of ultra short pulses.

Logos

Logos PDF Author:
Publisher:
ISBN:
Category : Nuclear energy
Languages : en
Pages : 24

Get Book Here

Book Description


High Heat Load X-ray Optics Research and Development at the Advanced Photon Source -- An Overview

High Heat Load X-ray Optics Research and Development at the Advanced Photon Source -- An Overview PDF Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 22

Get Book Here

Book Description
Insertion devices at third generation synchrotron radiation sources such as the APS are capable of producing x-ray beams with total power in excess of 7 kilowatts or power densities of 150 watts/mm2 at a typical location of the optical components. Optical elements subjected to these types of heat fluxes will suffer considerably unless carefully designed to withstand these unprecedented power loadings. At the Advanced Photon Source (APS), we have an aggressive R & D program aimed at investigating possible methods to mitigate thermal distortions. The approaches being studied include, improved heat exchangers, use of liquid gallium and liquid nitrogen as coolants, novel crystal geometries, power filtering, and replacement of silicon with diamond for crystal monochromators. This paper will provide an overview of the high heat load x-ray optics program at the APS.

Grazing Incidence and Multilayer X-ray Optical Systems

Grazing Incidence and Multilayer X-ray Optical Systems PDF Author: Richard B. Hoover
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Nature
Languages : en
Pages : 562

Get Book Here

Book Description