Helium Ion Microscopy

Helium Ion Microscopy PDF Author: David C. Joy
Publisher: Springer Science & Business Media
ISBN: 1461486602
Category : Technology & Engineering
Languages : en
Pages : 63

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Book Description
Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions – such as the Helium Ion Microscope (HIM) – are destined to become the imaging tools of choice for the 21st century. Topics covered include the principles, operation, and performance of the Gaseous Field Ion Source (GFIS), and a comparison of the optics of ion and electron beam microscopes including their operating conditions, resolution, and signal-to-noise performance. The physical principles of Ion-Induced Secondary Electron (iSE) generation by ions are discussed, and an extensive database of iSE yields for many elements and compounds as a function of incident ion species and its energy is included. Beam damage and charging are frequently outcomes of ion beam irradiation, and techniques to minimize such problems are presented. In addition to imaging, ions beams can be used for the controlled deposition, or removal, of selected materials with nanometer precision. The techniques and conditions required for nanofabrication are discussed and demonstrated. Finally, the problem of performing chemical microanalysis with ion beams is considered. Low energy ions cannot generate X-ray emissions, so alternative techniques such as Rutherford Backscatter Imaging (RBI) or Secondary Ion Mass Spectrometry (SIMS) are examined.

Helium Ion Microscopy

Helium Ion Microscopy PDF Author: David C. Joy
Publisher: Springer Science & Business Media
ISBN: 1461486602
Category : Technology & Engineering
Languages : en
Pages : 63

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Book Description
Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions – such as the Helium Ion Microscope (HIM) – are destined to become the imaging tools of choice for the 21st century. Topics covered include the principles, operation, and performance of the Gaseous Field Ion Source (GFIS), and a comparison of the optics of ion and electron beam microscopes including their operating conditions, resolution, and signal-to-noise performance. The physical principles of Ion-Induced Secondary Electron (iSE) generation by ions are discussed, and an extensive database of iSE yields for many elements and compounds as a function of incident ion species and its energy is included. Beam damage and charging are frequently outcomes of ion beam irradiation, and techniques to minimize such problems are presented. In addition to imaging, ions beams can be used for the controlled deposition, or removal, of selected materials with nanometer precision. The techniques and conditions required for nanofabrication are discussed and demonstrated. Finally, the problem of performing chemical microanalysis with ion beams is considered. Low energy ions cannot generate X-ray emissions, so alternative techniques such as Rutherford Backscatter Imaging (RBI) or Secondary Ion Mass Spectrometry (SIMS) are examined.

Helium Ion Microscopy

Helium Ion Microscopy PDF Author: Gregor Hlawacek
Publisher: Springer
ISBN: 3319419900
Category : Science
Languages : en
Pages : 536

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Book Description
This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.

Helium Ion Microscopy

Helium Ion Microscopy PDF Author: Gregor Hlawacek
Publisher: Springer
ISBN: 9783319419886
Category : Science
Languages : en
Pages : 0

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Book Description
This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.

Chemical Imaging Analysis

Chemical Imaging Analysis PDF Author: Freddy Adams
Publisher: Elsevier
ISBN: 0444634509
Category : Science
Languages : en
Pages : 493

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Book Description
Chemical Imaging Analysis covers the advancements made over the last 50 years in chemical imaging analysis, including different analytical techniques and the ways they were developed and refined to link the composition and structure of manmade and natural materials at the nano/micro scale to the functional behavior at the macroscopic scale. In a development process that started in the early 1960s, a variety of specialized analytical techniques was developed – or adapted from existing techniques – and these techniques have matured into versatile and powerful tools for visualizing structural and compositional heterogeneity. This text explores that journey, providing a general overview of imaging techniques in diverse fields, including mass spectrometry, optical spectrometry including X-rays, electron microscopy, and beam techniques. Provides comprehensive coverage of analytical techniques used in chemical imaging analysis Explores a variety of specialized techniques Provides a general overview of imaging techniques in diverse fields

Special Issue on Diverse Helium Ion Microscopy

Special Issue on Diverse Helium Ion Microscopy PDF Author: David C. Bell
Publisher:
ISBN:
Category :
Languages : en
Pages : 55

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Book Description


Scanning Ionoluminescence Microscopy with a Helium Ion Microscope

Scanning Ionoluminescence Microscopy with a Helium Ion Microscope PDF Author: Thomas Franklin
Publisher:
ISBN:
Category :
Languages : en
Pages :

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Book Description
The ORIONR PLUS scanning helium ion microscope (HIM) images at sub nanometer resolution. Images of the secondary electron emission have superior resolution and depth of field compared to a scanning electron microscope (SEM). Ionoluminescent imaging is not an area that has been extensively explored by typical ion beam systems as they have large spot sizes in the region of microns, leading to poor spatial resolution. This thesis confirms that the ORIONR PLUS can form images from the ionoluminescent signal, resolutions of 20nm can be obtained for images of bright nanoparticles. Ionoluminescence spectra can also be obtained from some samples. The position of emission peaks in samples under the ORIONR PLUS does not deviate significantly from cathodoluminescence (CL) peaks under SEM. However, the relative heights of the emission peaks in a sample can vary between ionoluminescence (IL) and CL. In addition, It is found that there exists a proportional relationship between acceleration voltage and ionoluminescent signal in the ORIONR PLUS, this relationship is also exhibited in CL. However, when normalised for current and acceleration voltage there appears to be no samples that show greater luminescence under ionoluminescence than cathodoluminescence, with ionoluminescent intensities up to an order of magnitude lower. Ionoluminescence under the ORIONR PLUS is found to be a poor candidate for the analysis of direct band gap semiconductors, this is attributed to the smaller interaction volumes and achievable beam current of the ORIONR PLUS. It is also found that some direct band gap materials are very susceptible to beam damage under the ion beam at beam doses typically used for secondary electron (SE) imaging. It is possible to obtain simultaneous IL and SE images of organic fluorospores in a biological sample. However, the luminescence of the fluorospores was only just sufficient to form images with a 200nm resolution. Rare earth based nanoparticles show brighter luminescence and greater resistance to beam damage than organic fluorospores. If such particles could be utilised for immunofluorescence it would make combined secondary electron and immunofluorescence imaging under the ORIONR PLUS a viable technique.

Field Ion Microscopy

Field Ion Microscopy PDF Author: Erwin W. Müller
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 340

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Book Description


Scanning Electron Microscopy and X-Ray Microanalysis

Scanning Electron Microscopy and X-Ray Microanalysis PDF Author: Joseph Goldstein
Publisher: Springer Science & Business Media
ISBN: 1461332737
Category : Science
Languages : en
Pages : 679

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Book Description
This book has evolved by processes of selection and expansion from its predecessor, Practical Scanning Electron Microscopy (PSEM), published by Plenum Press in 1975. The interaction of the authors with students at the Short Course on Scanning Electron Microscopy and X-Ray Microanalysis held annually at Lehigh University has helped greatly in developing this textbook. The material has been chosen to provide a student with a general introduction to the techniques of scanning electron microscopy and x-ray microanalysis suitable for application in such fields as biology, geology, solid state physics, and materials science. Following the format of PSEM, this book gives the student a basic knowledge of (1) the user-controlled functions of the electron optics of the scanning electron microscope and electron microprobe, (2) the characteristics of electron-beam-sample inter actions, (3) image formation and interpretation, (4) x-ray spectrometry, and (5) quantitative x-ray microanalysis. Each of these topics has been updated and in most cases expanded over the material presented in PSEM in order to give the reader sufficient coverage to understand these topics and apply the information in the laboratory. Throughout the text, we have attempted to emphasize practical aspects of the techniques, describing those instru ment parameters which the microscopist can and must manipulate to obtain optimum information from the specimen. Certain areas in particular have been expanded in response to their increasing importance in the SEM field. Thus energy-dispersive x-ray spectrometry, which has undergone a tremendous surge in growth, is treated in substantial detail.

Helium Ion Microscopy

Helium Ion Microscopy PDF Author: Henning Vieker
Publisher:
ISBN:
Category :
Languages : en
Pages : 0

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Book Description


Scanning Electron Microscopy for the Life Sciences

Scanning Electron Microscopy for the Life Sciences PDF Author: Heide Schatten
Publisher: Cambridge University Press
ISBN: 0521195993
Category : Science
Languages : en
Pages : 275

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Book Description
A guide to modern scanning electron microscopy instrumentation, methodology and techniques, highlighting novel applications to cell and molecular biology.