Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices PDF Download

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Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices

Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices PDF Author: Eric Garfunkel
Publisher: Springer Science & Business Media
ISBN: 9401150087
Category : Technology & Engineering
Languages : en
Pages : 503

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Book Description
An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.