Author: Richard Cousins
Publisher:
ISBN:
Category :
Languages : en
Pages :

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Author: Silvan Schmid
Publisher: Springer Nature
ISBN: 3031296281
Category : Technology & Engineering
Languages : en
Pages : 215

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Book Description
Now in an updated second edition, this classroom-tested textbook introduces and summarizes the latest models and skills required to design and optimize nanomechanical resonators, taking a top-down approach that uses macroscopic formulas to model the devices. The authors cover the electrical and mechanical aspects of nanoelectromechanical system (NEMS) devices in six expanded and revised chapters on lumped-element model resonators, continuum mechanical resonators, damping, transduction, responsivity, and measurements and noise. The applied approach found in this book is appropriate for engineering students and researchers working with micro and nanomechanical resonators.

Author: Vahid Qaradaghi
Publisher:
ISBN:
Category : Carbon nanotubes
Languages : en
Pages :

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Book Description
Nanoelectromechanical (NEM) resonators have been used to detect masses of organic or inorganic particles in nanoscale or even atomic level. A reduction in the resonator mass can increase its mass sensitivity (frequency shift per loaded mass). However, the operation of most small resonators is restricted to vacuum or air since operation in liquid sharply decreases their quality factor (Q) due to the excessive damping resulting from liquid viscosity. Q factor is a dimensionless parameter that describes how underdamped an oscillator or resonator is, and higher Q indicates a lower rate of energy loss relative to the stored energy of the resonator. Typically, large size resonators such as Quartz Crystal Microbalance (QCM) are used for mass detection in liquid to preserve a high Q factor that determines the resolution of measurements. However, as it was mentioned earlier, such resonators cannot offer high sensitivity due to their relatively large size and mass. Therefore, highly-sensitive resonators capable of real-time mass measurement with high Q both in air and liquid currently do not exist. Thermal piezoresistive disk resonator surface merely slides alongside the solid-liquid interface in the rotational mode, as opposed to paddling against the surrounding liquid offering high Q. In this dissertation, thermal-piezoresistive disk resonators with much smaller dimensions in the deep submicron range have been fabricated using electron beam lithography (EBL), and the effect of scaling on mass sensitivity, power consumption and quality factor (Q) is investigated. Disk resonators with diameter ranging from 2μm to 20μm with thermal actuator beams as narrow as 35nm have been fabricated via electron beam lithography. Mass sensitivity of disk resonators was characterized in air by formation of a self-assembled monolayer of hexa-methyl-disilazane (HMDS) on the surfaces. Frequency shifts as high as 318 Hz were measured for a calculated deposited mass of one attogram using a 2μm diameter disk resonator resonating at 221MHz. Operation in liquid was characterized by exposing a 20μm disk resonator to a 10mM solution of mercaptohexanol (MCH) diluted in ethyl alcohol (ethanol). For this experiment, frequency shift of 20 kHz for 2.8 pg of added MCH mass was obtained. In conventional rotational mode disk resonators, as the dimensions scale down, the mechanical losses including anchor loss increase. This adversely affects the detection of the resonance mode at higher frequencies. To alleviate this issue, donut-shaped resonators have been proposed potentially offering higher Qs while resonating at higher frequencies. Mass sensitivity of donut resonators with different sizes has been investigated with deposited 10nm gold nanoparticles (AuNPs) as added mass showing mass sensitivity of 36 Hz/attogram (712 Hz/AuNp) in air characterization. Due to the reduction of the surface area, the probability of adsorption of molecules or particulates of interest onto the NEM resonator surfaces diminishes. To address this issue, forests of multiwall carbon nanotubes (MWCNTs) have been used to enhance the effective surface area, which allows detection of much lower concentrations of analytes. Using this approach, average effective surface area enhancement as high as 9 times for organic and inorganic nanoparticles was demonstrated.

Author: Dustin Wade Carr
Publisher:
ISBN:
Category :
Languages : en
Pages : 298

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Author: John M. Roland
Publisher:
ISBN:
Category :
Languages : en
Pages : 58

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Author: Nabi Onur Azak
Publisher:
ISBN:
Category :
Languages : en
Pages : 142

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Author: Nguyen Van Toan
Publisher: CRC Press
ISBN: 0429560990
Category : Technology & Engineering
Languages : en
Pages : 159

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Book Description
Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology. Features Introduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators Provides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator. Discusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor. Focusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body. Reviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.

Author: Felix Nägele
Publisher:
ISBN:
Category :
Languages : en
Pages :

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Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1482274663
Category : Technology & Engineering
Languages : en
Pages : 1992

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Book Description
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Author: Zhuoqing Yang
Publisher: Springer Nature
ISBN: 303079749X
Category : Technology & Engineering
Languages : en
Pages : 312

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Book Description
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.